LX

pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

24

D-X 471 A MGP Series Construction/MGPM Series @6 @4 q w u e !5 !7 !8 !9 !0 !4 @8 !1 @7 !3 i !1 y r 20, 25: 25 stroke #5 o 20, 32, 40, 80, 100 @5 t @2 !6 @3 63 or more #6 50 or more 50, 63 Non-locking type (Head end lock) (Rod end lock) t #2 #9 #7 #4 $4 $5 #3 $5 #1 #0 @9 80, 100 20 to 63 80, 100 20 to 63 Component Parts Component Parts No.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

or less 1/4 0.67 Center 1/8 0.65 Exhaust NVFS2400 20 or less 3 Position 1/4 0.67 Center 1/8 0.65 Pressure NVFS2500 20 or less 1/4 0.67 Center 1/8 0.4 Perfect NVFS2600 25 or less 1/4 0.4 (Double Check) T E C H N I C A L SPECIFICATIONS O P T I O N A L T E C H N I C A L SPECIFICATIONS S T A N D A R D Pilot Type External Pilot Type Fluid Air and Inert Gas Manual Override Pilot Operator Non Locking

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Modular Design with Uniform Body Style

For use, a separate spacer (or spacer with bracket) is required. 51-1 A Attachments AC-D Series T-Spacer: 1/8, 1/4, 3/8, 1/2, 3/4 Using a T-spacer facilitates the branching of air flow.

Free Mount Cylinder Series CU

A 2 x P through KA B 4 x T counterbore Width across flats L S + Stroke CUJ Z + Stroke CU CQS CQ2 RQ (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB CQM 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 12 15.5 19.5 14 18 22 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 8 10 12 M5 x 0.8 M5 x 0.8 1/8 MU Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5

Metal Seal/Rubber Seal Series VQ Body Ported

, 16, 10 P kit w AXT100-2-F (2) D-sub connector housing assembly = Number of pins: 25, 15 F kit e (3) AXT100-2-TA1 Terminal block assembly (8 terminals) T kit r (3) AXT100-2-TA2 Terminal block assembly (8 terminals) T kit t Note 1) A S kit is composed of a flat ribbon cable housing assembly (AXT100-2-PS20) of q SI unit and w P kit (20 pins).

CJ2

Material: Iron CD(cd) 3.3 5 MM M4 x 0.7 M5 x 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 GB 18 23 H 20 20 KA 4.2 5.2 CX 3.2 6.5 A 15 15 BA 12 18.3 BB 12 18.3 CA 14 20 CB 14 20 Bore size (mm) 10 16 Dimensions by Stroke Applicable bore (mm) Part no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Rc Nil G F VP4 20 20 stations 4(A), 2(B) port N NPTF T NPT Rc 1/4 3/5(R) port Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Base Mounted Metal Seal/Rubber Seal Series VQ

With lead wire ZS-20-A ZS-20-5A-50 0.6 m 3 m 5 m Nil 30 50 (The flow characteristics are for the supply pressure of 0.5 MPa.)

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

LVQ

PA PA t A B A B B A A B Description No.

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

Free Mount Cylinder

A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc1/8 Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8

Possible to transfer a workpiece at low-speed.

The rotation angle can be adjusted between 90 and 190. n io r a at n t g o Rotation starting point e R End of rotation DL L R B B L e o g t B a n ti a o r n n o r a ti n a g t Rotation starting point End of rotation o A A e Operating size 20 30 40 Operating size 20 30 40 R A Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Rotation starting point End of rotation Lmax 24 27 31.5 Lmax 24 27 31.5 Size

Air Cylinder NCA1 Series

X B 5 S T D. R O D T H R E A D S T D.

NCA1

X B 5 S T D. R O D T H R E A D S T D.

Table of Contents

High Precision, Digital Pressure Switch for General Fluids Dimensions Bracket A A 30 20 ZSE ISE 20 PSE 45 Z I SE3 55 4.5 11.5 40 15 PS 4.5 Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6.5 1.6 ZSP 20 41.5 ZS-24-A Bracket A View A ISA2 IS Bracket D ZSM

LJ1H

A: Stroke + 124 A: Stroke + 32 20 0.02 92 0.02 A 92 92 A Positioning hole 2 x 8H10 4 x T-slot Recommended dimension 8 (Refer to JIS B0952.) 67 Long positioning hole LJ1H30 M8 bolt M8 bolt 30 30 2 x T-slot Recommended dimension 8 (Refer to JIS B0952.)

7

fitting P A B D E F I J K Model Conduit terminal Conduit Flat terminal C L T 52.5 (58) 52.5 (58) 99.5 U V T 58.5 (64.5) U T U 10, 3/8", 12 91 (97) 22.5 3 A VXD2 68.5 47.5 23 30 45 20 6 13.5 41.5 25 33 Model Mounting bracket dimensions One-touch fitting P a b d e f 10, 3/8", 12 58 65 67 52 25.5 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions. 139 VXD Series For Air/Water/Oil 3 A