Vacuum Unit

K V V Direct exhaust Complex exhaust1 End plate exhaust C Refer to page 18 for the standard supply pressure per nozzle diameter.

Modular Type Regulators Series AR

port size) D U M N T Bracket (Option) J 2 x P1 (Port size) AR50(K), AR60(K) A Q C B K IN OUT F R S P2 (Pressure gauge port size) U M J T N D Bracket (Option) Applicable model AR20(K) to AR60(K) AR10, AR20(K) to AR60(K) Round type pressure gauge (with color zone) AR20(K) to AR60(K) Digital pressure switch Square embedded type pressure gauge Option Round type pressure gauge J J J H H H Center

Table of Contents

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

DS: DIN terminal with light DN: DIN terminal without connector Applicable cable 6 to 12 F K L D G1/2 F K D C E C E J G J G B B WN: M12 connector D F K C J G E B [mm] Size Port size A B C D E F G 20 1/8, 1/4 42 40 77.6 36 17.5 18 15.5 30 1/4, 3/8 53 53 94.5 42 21.5 21 18 40 1/4, 3/8, 1/2 71 70 102.5 42 25.5 21 22.5 Size Port size DIN terminal DIN terminal without connector M12 connector

modular-press-e

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Modular F.R.L. Pressure Control Equipment

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Table of Contents

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

Air Cylinder Series MB

Individual -X Technical data 293 Series MB Without Mounting Bracket Cushion valve Basic: (B) WV Port G 2 x P MM G With rod boot E E D e C B d H1 MB Effective thread 2 x 4 x J C B A K F N MA 10.2 10.2 f l N S + Stroke H h ZZ + Stroke Width across flats Stroke range (mm) Bore size (mm) Effective thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W 32 40 50 63 80 100 125 22 30 35 35

EX120/121/122

R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.

Compact Manifold Regulator Series ARM5

C P P K K 8 U 57 (at handle locked) DIN rail part no.

0.4

250 k/500 kbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 9.6 k/19.2 k/45.45 k/93.75 k/ 187.5 k/500 k/1.5 M/3 M/6 M/12 Mbps 21.6 to 26.4 VDC 100 mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage Internal current consumption 22.8 to 26.4 VDC 11 to 25 VDC 100 mA or less Power supply for output Power supply voltage Power supply for Power supply

Series KDM Rectangular Multi-connector

(Panel mounting hole: See Dimensions.) 2 r o t c e n n o C h c n I c i r t e M 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K e u l B 2 3 / 5 3 0 P M D K 4 4 0 P M D K r o t c e n n o C g u l P d e R 4 / 1 7 0 P M D K 6 6 0 P M D K 6 1 / 5 9 0 P M D K 8 8 0 P M D K 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K r o t c e n n o c t e k c o S ) g n i k c a p h t i W ( e u l B 2 3 / 5 3 0 P M D K 4 4

AC

C Auto drain float style (N.C.)

Table of Contents

C D E F Dimensions Part no.

Electric Slide Tables

DP V1 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 156 k/625 k/2.5 M /5 M/10 M Communication speed [bps] 10 M/100 M 125 k/250 k/500 k Configuration file Note 2) GSD file EDS file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 57 words Output 57 words Input 256 bytes Output 256 bytes Input 200 bytes Output 200

CATALOG VC10

V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

CQ2

C Mounting bolt Model No. Mounting bolt Model No.

Modular/F.R.L. Units Series AC

K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

CRBU

Applicable shaft configurations shafts K, T Applicable shaft configurations Shaft J, K, T (mm) L2max W L1max X (mm) (mm) Shaft form 15 20 30 Size J K T J K T J K T J K T Size Size Thread Thread Shaft form 15 20 30 6.5 to 14 8 to 18 9 to 20 11.5 to 22 10 15 20 30 L11 L11 L11 L12 X3 X4 X4.5 X5 0.5 to 2 0.5 to 2.5 0.5 to 3 0.5 to 4 K T K T K T M3 X 0.5 M4 X 0.7 M5 X 0.8 2.5 2.5 3.3 2.5 3.3