CXS

D-F9PW D-F9NWV D-F9NW Main circuit of switch OUT Black [White] 7 7 7 Lead wire length: 0.5m 7 7 7 32 32 34 Lead wire length: 3m 34 34 34 DC() Blue [Black] Dimensions D-F9PW(V) D-F9NW, D-F9PW, D-F9BW DC(+) Brown [Red] M2.5 x 4 Slotted set screw Main circuit of switch Main circuit of switch Indicator light 2 2.7 OUT Black [White] DC() Blue [Black] 22 2.8 2.6 4 D-F9BW(V) Most sensitive position

SMC Basic Pneumatics

I 2 1 ../ p : (bar) lq 7. 5. 7 7-, 15{)00 -t-.-71--Z -_ 500 400 300 ?

%silltr

I 2 1 ../ p : (bar) lq 7. 5. 7 7-, 15{)00 -t-.-71--Z -_ 500 400 300 ?

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B 2.2 J X C *3 I/O 1) I/O 1 1.5m 2 1.5m DIN 7 NPN 3 3m 8 PNP 4 3m DIN 4 5 5m 6 5m DIN 7 8 DIN 1)I/O (1.5m~5m) I/O 2 LEY Series LEYG Series LEF Series LES/LESH Series 2) LER Series LEPY/LEPS Series 2 3 LEH Series 2) 360 8 No.SFOD-OMT0009CN-B 2.3 1) PLC I/O 2) :JXC-C2-* DC24V 1) I/O ENC : LE-CP-*-* LE-CP-*-*-S USB MOT JXC-W1-1 CI 2) ()

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

CJP

NCM 6 3 Y-P006 I-P006 +0.040 0 0.020 0.045 +0.040 0 4 5 6 4 5 3 5 12 M3 x 0.5 3 5 12 M3 x 0.5 9 3.5 5 3.5 5 10 5 5 5 Y-P010 I-P010 +0.048 0 0.030 0.060 +0.048 0 8 6.3 10 10 6.3 7 5 7 10 16 M4 x 0.7 5 8 16 M4 x 0.7 13.6 NCA 5.5 6.5 5.5 6.5 12 6 6 6 Y-P015 I-P015 +0.048 0 0.030 0.060 +0.048 0 10 7.8 15 12 7.8 9 6 9 15 19 M5 x 0.8 6 10 19 M5 x 0.8 15.8 7 7 7 7 DKnuckle pin Trunnion pin -X Material

Rotary Actuator/Vane Type

) 7 to 20 10-(20-X) to (X-1.5) 30 10 to 22 12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.

90

Note 7) Cannot be selected for vacuum pump system.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 7. Exploded View of Manifold/Replacement Parts 7.1. Exploded View of Manifold Individual wiring (3)Tension bolt (2) End plate U (1) End plate D (6) (4) (5) (7) U side Single unit for manifold (8) (Individual wiring specification) D side Common wiring (9) -37No. ZK2-OM01301 7.2.

Vacuum Unit Ejector / Vacuum Pump System

KJH 06 C2 Port size 06 6 One-touch fitting (Straight) Metric size 07 1/4 One-touch fitting (Straight) Inch size (9) Sound absorbing material (10 pcs. per set) ZK2 SE1 1 A Sound absorbing material holes diameter 1 300m (10) Vacuum port adapter assembly ZK2 VA1S 8 A One-touch fitting size 6 6 One-touch fitting Metric size 8 8 One-touch fitting 7 1/4 One-touch fitting Inch size 9 5/16 One-touch

Vacuum Unit

stations Release valve 9 10 5 stations Release valve 18 Supply valve Supply valve 6 11 12 6 stations Release valve 6 stations 19 Release valve 7 Supply valve 13 14 Supply valve 20 7 stations Release valve 7 stations Release valve 8 15 16 Supply valve Supply valve 21 8 stations Release valve 9 8 stations Release valve 17 18 22 Supply valve Supply valve 10 19 20 9 stations Release valve 9 stations

Slider Type Ball Screw Drive/11-LEFS Series

1050 11-LEFS40ll-1000l 1414.5 1444.5 1006 1178 16 7 1050 526

LEYx-OMZ0015

7 12 13 14 15 1 2 3 4 5 6 8 In-line [LEY63] In-line [LEY25/32] Rod end male thread 26 24 32 26 29 30 27 28 27 31 27 28 27 25 7 Parts list No.

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification . 4 1.1 LECS series driver . 4 1.1.1 How to order . 4 1.1.2 Specification . 4 1.2 LECY series driver . 7 1.2.1 How to order . 7 1.2.2 Specification . 8 1.3 Construction . 9 2.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

+0.030 0 (172) 122 M4 x 0.7 depth 8 (F.G. terminal) 25 (3.1) 90 129 Motor cable (6) 68 124 160 124 47 35 Encoder cable (7) 114 79 Note 2) (158) Note 2) 49.5 6H9 ( ) depth 7 +0.030 0 7 63.5 73 Encoder Z-phase detecting position L A (Table traveling distance) (64) 186 (B: With lock/226) 28 (64) Stroke 39 (4) 21 Motor cable (6) 70 58 47 6.7 17.5 Vacuum port Rc1/8 Note 3) 35 Encoder cable (7)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5 5.5(3.5) 10.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

B 0(0) 0(0) 1(0) 6 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGQ 5.5(3.5) 10.5 4.5(2.5) 9.5

LC6D/LC6C

18 Interface cable 7 9 8 Power cable 14 Power cable b View b View a a Wiring Signal description Cable description Color Pin no.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

LC6D Connector Cable LC6C Power Connector Cable Model LC6-1-C1--X258 Model LC6-1-C2--X252 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17 18 Interface cable 7 9 8 Power cable