Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: Clear Cover Removable, Wrench Tighten, Option: -

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover Removable, Wrench Tighten, Option: -

AU

G46-10-01) indicates the type of threads used for connection. For Rc, leave the symbol blank, and for NPT, enter N. Please contact SMC concerning the supply of NPT pressure gauges. Relieving type is provided as standard for AU100.

AU

G46-10-01) indicates the type of threads used for connection. For Rc, leave the symbol blank, and for NPT, enter N. Please contact SMC concerning the supply of NPT pressure gauges. Relieving type is provided as standard for AU100.

A_HEC-OM-K001

Communication . 7-1 7.1 Preparation for Communication . 7-1 7.2 Specifications of communication method. 7-2 7.3 Communication format . 7-3 7.3.1 Control code used for communication . 7-3 7.3.2 Command code list . 7-3 7.3.3 Communication procedures and format . 7-4 7.3.4 Calculation of Check Sum . 7-6 7.4 Details of Communication Format . 7-7 7.4.1 Setting of target temp.

Table of Contents

Vane Style Size: 1, 3, 7, 20 .

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 Component Parts Description Material Description Material No. !1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

CRB2/CRBU2/CRB1

Y = C2 L4 = L2 = 15 Y-3 L2 + 1.5 4.5 to 9 3 to 4 10 3 6 to 14 X-4.5 L1 +1 .5 C1 20 Y-3.5 3 to 5 5 to 10 L2 + 2 15 7 to 18 X-5.5 L1 + 1.5 3 to 4 D2 = C2 = L1 = L3 = 3 to 6 7 to 13 Y-5 L2 + 3 30 20 8 to 20 X-6.5 3 to 5 L1 + 2 X = E2 = E4 = 3 to 6 8 to 15 L2 + 5 Y-5.5 40 30 3 to 6 L1 + 3 10 to 22 X-8 Double shaft Symbol: A16 Symbol: A13 Applicable to single vane type only A special end is machined

SMC Pneumatic Clean Series

A FY H S + Stroke H + Stroke ZZ + 2 x Stroke 4-FD 40 (mm) 7 5.5 5.5 5 K 14 12 10 8 D 21 19.5 19.5 15.5 AL 88 64 62 62 H 21.5 15 15 15 S 1/4 1/8 1/8 1/8 F P H1 7 7 7 7 FD FT FY 66 60 60 60 FZ 11 8 8 8 FX 188 154 152 144 G ZZ 52 40 40 34 B E 20-0.033 0 46.5 37.5 33.5 28 N 41 32 32 26 B2 47.3 37 37 30 I 24 22 22 18 C2 22 17 17 13 B1 45 41 41 37 H2 42.5 34.5 30 24 NA A M14 x 1.5 M10 x 1.25 M10

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24

CRBU

Refer to p.1.2-7 for further information.)

Rotary Actuator/Vane Style Series CRB2

(If not specifying dimension C2, indicate instead.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(If not specifying dimension C2, indicate instead.)

Rotary Actuator

E1 = E3 = D2 C1 = Y L1 max L4 Size (mm) 10 3 4 to 8 Y-2.5 L2 + 1.5 X L1 max L3 D1 Size D1 = Y2 = L4 = L2 = 15 C2 10 3 to 4 4.5 to 9 Y-3 L2 + 1.5 3 6 to 14 X-4.5 L1 + 1.5 C1 The standard chamfer may not be altered depending on the type of machining required. 20 15 3 to 5 5 to 10 Y-3.5 L2 + 2 3 to 4 7 to 18 X-5.5 L1 + 1.5 D2 = L1 = C2 = 30 L3 = 20 3 to 6 7 to 13 Y-5 L2 + 3 3 to 5 8 to 20

Compact Rotary Actuator Series CRQ2

7 @7 @6 t y e @4 !0 !2 @0 !1 @2 u @5 q @1 !9 !8 !4 !3 Component Parts Component Parts Description Material Description Material No. No.

Possible to transfer a workpiece at low-speed.

(If not specifying dimension C2, indicate instead.)

CRQ2

7 !1 !9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

SMC offers a variety of pressure gauges including general purpose, oil-free/external parts copper-free with limit indicator, clean series and a pressure gauge with a pressure switch.  Pressure ranges vary from 0 to 1.5MPa, depending on the selected gauge.  Panel mounting is possible.General purpose gauge w/limit indicator , Back or vertical side thread , Indication precision: ±3% F.S. (full