Table of Contents

Fixed 4% F .S.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Rotary Actuator

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = Y = C2 J axis X axis K axis T axis D2 = C2 = C L2 = [mm] [mm] [mm] Size Y L2max D2 30 3 to 25 Y-2 5 to 7.9 50 1 to 36 Y 5 to 14.9 63 1 to 41 Y 5 to 16.9 80 1 to 50 Y 8 to 19.9 100 1 to 60 Y 8 to 24.9 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 218

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Multi-Axis Step Motor Controller

Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Environment

Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

EX500-GPR1A.eng

Socket Connector Pin Layout Plug Connector Pin Layout 1 8 1 7 6 5 4 3 2 8 3 4 5 6 7 Two communication connectors in SI unit and one communication connector in Input unit are installed respectively. To the communication connector ( C2 ) or ( 1 ) of SI unit, connect the branch cable with M12 connector from GW.

XL

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Valve seal (Maintenance part) 4.

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Removable, Wrench Tighten, Option: -

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.2MPa, Connection Thread: R 1/4, Attachment: Clear Cover Removable, Wrench Tighten, Option: -

Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 0.7MPa, Connection Thread: R 1/8, Attachment: Clear Cover Removable, Wrench Tighten, Option: -

Type: General-Purpose/Standard Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.2, Outer Diameter(φ): 57, Shape: Back side thread, Maximum Indicated Pressure: 0.2 MPa, Connection screw: R 1/8, Option: None, Size: 57, Transparent cover material: Polycarbonate, Special Configurations: None, Attachment: Clear cover has protrusion. (Clear cover is removable). The wrench flats protrude., Unit

Type: General-Purpose/Standard Pressure Gauge, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 57, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/8, Option: None, Size: 57, Transparent cover material: Polycarbonate, Special Configurations: None, Attachment: Clear cover has protrusion. (Clear cover is removable). The wrench flats protrude., Unit

Type: General-Purpose/Standard Pressure Gauge, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 57, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/4, Option: None, Size: 57, Transparent cover material: Polycarbonate, Special Configurations: None, Attachment: Clear cover has protrusion. (Clear cover is removable).

CATALOG

1/2 5/8 3/8 3/4 3/4 1/2 6 1/4 250 (2.5) 1 1/8 3.1 1.5 1/2 5/16-24 3 0 1.3 1.06 1 1 3/8 2.48 6 3/4 3 3/4 2.13 3/4-16 7/8 3/8 3/8 1/2 1/2 5/8 3/8 3/4 3/4 1/2 7 3/4 325 (3.25) 1 5/8 3.9 2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 1 3/8 1 5/8 2.72 8 1/2 1 1 1/4 4 1/4 1 1/4 2.59 1-14 1/2 5/8 3/4 3/4 5/8 3/4 7 3/4 400 (4) 1 3/8 1 5/8 4.7 2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 1 5/8 2.72 8 1/2 1 1 1/4 4

A

1/2 5/8 3/8 3/4 3/4 1/2 6 1/4 250 (2.5) 1 1/8 3.1 1.5 1/2 5/16-24 3 0 1.3 1.06 1 1 3/8 2.48 6 3/4 3 3/4 2.13 3/4-16 7/8 3/8 3/8 1/2 1/2 5/8 3/8 3/4 3/4 1/2 7 3/4 325 (3.25) 1 5/8 3.9 2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 1 3/8 1 5/8 2.72 8 1/2 1 1 1/4 4 1/4 1 1/4 2.59 1-14 1/2 5/8 3/4 3/4 5/8 3/4 7 3/4 400 (4) 1 3/8 1 5/8 4.7 2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 1 5/8 2.72 8 1/2 1 1 1/4 4