Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2.
13 30 39 17 44 32 1/2 136 36 65 68 80 M16 x 1.5 25 to 800 82.7 17 26 149 114.5 16 M33 x 2 93 115 186 18 45 60 41 46 20 57 3/4 159 9 41 45 68 76 100 25 to 1000 96.9 M16 x 1.5 19 32 172 128 16 M42 x 2 101 130 216 72 50 20 63 168 26 56 47 3/4 56 10 52 79 91 Bore size (mm) X2 Y Y1 Y2 ZA Z V X1 ZZ 32 5.5 73 153.5 60 20 13 10 128 26 40 6.5 98 185 22 62 20 10 153 31 50 7 92 199 20 67 29 13 159
No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250
) 20 10 20 10 Min. speed [mm/s] (Speed tuning control) 25 13 27 14 -109No.
Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H K VCKL1209-02F H KFS-12 N Gasket VCKK-4-1 Nylon 1 10 set unit 23 Troubleshooting (Valve
Symbol Specifications/Description Intermediate stroke Rod-end female thread Change of angle adjustable range Long Stroke (101 to 200 mm) MSQ X1 X2 X5 X10 Linear Motion Parts/Standard Stroke MSZ 32, 40 Standard stroke (mm) Size 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 CRQ2X MSQX Refer to page 352 for other intermediate strokes.
2 Input 4 2 3 Input 5 4 0 V (Control and input) X2 1 24 V (Control and input) X3 2 Input 6 3 3 Input 7 4 0 V (Control and input) X3 1 24 V (Control and input) X4 2 Input 8 4 3 Input 9 4 0 V (Control and input) X4 1 24 V (Control and input) X5 2 Input 10 5 3 Input 11 4 0 V (Control and input) X5 1 24 V (Control and input) X6 2 Input 12 6 3 Input 13 4 0 V (Control and input) X6 1 24 V (Control
or less 8.3 or less 1 or more 10 or less 8.3 or less 1 or more 10 or less 2.5 or more ZNC30 8.3 or less 3.6 or more ZNC(40, 60) 11.3 or less 3.9 or more 11 or less 1.2 or more 11 or less 1.2 or more 11 or less ZNC80 16.8 or less 2.7 or more 15 or less 16.2 or less 4.5 or more 18 ZNC Series Specific Product Precautions 5 Be sure to read this before handling the products.
Bit 12 Bit 14 (EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 EX600-DXB -31No.EX-OMN0035CN-A
EX600-DX E EX600-DX F 1 1 2 Configuration Configuration 3 4 1 2 5 1 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 Configuration 2 1 3 5 4 7 6 9 8 11 10 13 12 3 7 6 5 Group Pin number 3 1 0 2 13 11 12 10 8 6 9 7 5 3 1 4 2 Pin number 4 3 2 2 1 4 3 2 1 4 3 2 4 3 2 1 4 4 24 V (control and input) X3 24 V (control and input) X2 24 V (control and input) X1 24 V (control and input) X0 0 V (control and input
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/4, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: Nickel Plated
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: Nickel Plated
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover Removable, Wrench Tighten, Option: Nickel Plated
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable, Option: Nickel Plated
Pressure Gauge: ø42 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable, Option: Nickel Plated
Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Grade: SRA (Precision Cleaning, Clean Room M5.5)
Display Pressure: 10 (1.0MPa), Connection Thread: 01 (R 1/8), Grade: SRB (General Degreasing, Production Line)
Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/8, Option: None, Size: 42.5, Grade: Parts: general degreasing, Assembly: general production line, Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly, Unit
Type: Pressure Gauge W/ Color Zone, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/8, Transparent cover material: Polycarbonate, Special Configurations: -, Attachment: Without cover ring assembly
Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/8, Transparent cover material: Nylon, Special Configurations: -, Attachment: Without cover ring assembly