VM

One way roller lever VM430-01-02 VM430-01-02S JIS Symbol 17 polyacetal or hard steel roller 4.0 mm P.T. 11 N F.O.F. 4-4.5 mounting hole 5.0 mm O.T. 9.0 mm T.T.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire length) 300 : With light/surge voltage suppressor Built-in One-touch fittings VZ5 20-DIN terminal (D) VZ5 20-D-01 C6 C8 3 4 5 3 4 5 C6: MAX. 6 C8: MAX. 6.5 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable

5 Port Solenoid Valve Series SY3000/5000/7000/9000

In the case of external pilot type> G: Approx. 300 H: Approx. 600 97.3[101.7] (Lead wire length) 53.5[60.5] 50 24.5 16.5 11 11 7.5 (P, EA, EB port) 1/8 20.5 41 L plug connector (L): M plug connector (M): M8 connector (WO): 10-SY3 40(R)-M-01 3 4 5 10-SY3 40(R)-WO-01 3 4 5 10-SY3 40(R)-L-01 3 4 5 Approx. 300 (Lead wire length) 38.1 53.5[60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6

Table of Contents

(mm) Weight (g) (1) D Applicable tubing KGH04-M5 KGH04-01 4 M5 x 0.8 4 2.4 9 16 4 1 4 KGH04-02 19.5 13.5 14 4 8 17 22 8 14 13 4 1 8 10 16 18 5.6 M5 x 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 4 10 12 14 18.5 22.5 23 10 15 18.5 17 1 8 1 4 6 13.1 10.4 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 Connection thread 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 28

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Symbol 01 02 B, A P, EA, EB 1 8 Rc Rc Rc M Mixed 2 stations are needed to mount control unit. 1 4 1 4 The asterisk denotes the symbol for assembly.

VFS

Please connect with corresponding power side. 01 VV5FS2 1 06 01 Nil N Rc NPT NPTF G Symbol T Series VFS2000 Manifold Passage Porting specifications A, B EA, EB P F Symbol Option Port size 1 2 Side Bottom Plug-in type With attachment plug lead wire Common Common Symbol 01 02 A, B P, EA, EB 3 Side Bottom Individual Common 1 8 Rc Rc Rc M Mixed VK 4 Stations 1 4 1 4 5 Side Bottom Common Individual

Table of Contents

Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(L): 10-SYJ5 43-L-01 3 4 5 M plug connector (M): 10-SYJ5 43-M-01 3 4 5 DIN Terminal (D): 10-SYJ5 43-D-01 3 4 5 M8 connector (WO): 10-SYJ5 43-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 MAX.10 75.4 50.1[57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2[68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 59.3 103.4[107.8] 123[127.4] 45.5 45.5 45.5 45.5 18.1 43.3

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

1.6 P R2 R1 27.2 1/8 (P, R1, R2 port) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ7 23-L-01 3 4 5 M plug connector (M): 10-SYJ7 23-M-01 3 4 5 DIN terminal (D, Y): 10-SYJ7 23-D Y-01 3 4 5 M8 connector (WO): 10-SYJ7 23-WO-01 3 4 5 Approx. 300 (Lead wire length) 65 Max. 10 31.5 [38.5] 57.5 16.1 46.2

Table of Contents

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Symbol 01 02 Port size 1/8 (6A) Stations 2 3 4 5 n Uside D side 1/4 (8A) Material All IN ports are 3/8.

SYJ300/500/700

VFN 4-4-43 Series SYJ700 Manifold for Internal Pilot Type Type 20/Type 21 How to Order Applicable solenoid valve SYJ712--01 SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7 20 05 A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -

VZS

8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center: VZS3550-L(Z)-01 02 K plug connector 2 position double: VZS3250-KZ-01 02 3 position closed center: VZS3350-KZ-01 02 3 position exhaust center: VZS3450-KZ-01 02 3 position pressure center: VZS3550

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) (Specify 1/8 (01) or 1/4 (02)) SUP Relocation EXH Relocation '-~~~r~~_ce_r _ _ .---__ ~~ r:::..:.~-,-,c.

EXxx-OMO0027

Configuration Data (AM) (continued) Index Name / Meaning Type Value 80x7:0 Slot x: Upper limit value USINT 4 80x7:01 Channel 0 / User set upper limit value UINT 0 to 65535 80x8:0 Slot x: Monitor lower limit USINT 4 80x8:01 Channel 0 / Monitor user set lower limit Enum0807 0=Disable 1=Enable 80x9:0 Slot x: Lower limit value USINT 4 80x9:01 Channel 0 / User set lower limit value UINT 0 to 65535

VM

Roller lever VM430-01-01 VM430-01-01S JIS Symbol 17 polyacetal or hard steel roller 4.0 mm P.T. 12 N F.O.F. 4-4.5 mounting hole 4.5 mm O.T. 8.5 mm T.T. One way roller lever VM430-01-02 VM430-01-02S JIS Symbol 17 polyacetal or hard steel roller 4.0 mm P.T. 11 N F.O.F. 4-4.5 mounting hole 5.0 mm O.T. 9.0 mm T.T.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) A B C D E F G H I J Y A B C D E F G H I J Y Model Model ZPX40HBJ25-01-A18 ZPX63HBJ25-01-A18 109 160 120 171 50-01-A18 50-01-A18 144 195 155 206 40 41 28 43 20.5 32 47 69 13 63 65 46 68 31.5 43 58 80 21.5 75-01-A18 75-01-A18 180 231 191 242 ZPX50HBJ25-01-A18 ZPX80HBJ25-01-A18 112.5 163.5 125.5 176.5 50-01-A18 50-01-A18

SY

4 5 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 (37) With plug (12.5) 41 3 4 5 L type plug connector (L): SY3 40(R)-L-01 M type plug connector (M): SY3 40(R)-M-01 3 4 5 Manifold spec. sheets Order made Type 45 Type 45Grommet .

OMU0023

operation 4 01 05 001A FF00 sent.

13

Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8

5 Port Air Operated Valve Series SYA3000/5000/7000 1

B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.