3 Port Solenoid Valve Metal Seal Series VZ200 1

-15-20

Series KG Stainless Steel One-touch Fittings

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

pilot port (Only external pilot style(R)) 3 4 5 3 4 5 L plug connector (L): VQZ2 5 (R)lLl 0 1 01 02 0 1 01 02 DIN connector (Y): VQZ2 5 (R)lYl Indicator light 148<150> 300 (Lead wire length) 67.5<68.5> Applicable cord O.D. 3.5 to 7 Pg.7 155.5 MAX.10 53<56.5> 71.5 Indicator light Cover diameter 1.5 Cross section 0.23mm2 < >: AC 82.5 75 3 4 5 M plug connector (M): VQZ2 5 (R)lMl 0 1 01 02

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

JXCx-OMY0008

0-15 Trigger LV (7, 11) 1% Index 7027h: Pushing speed Description Index Bit Signal name Input range Min. unit 7027h 0-15 Pushing speed (7, 11) 1 mm/s Index 7028h: Pushing force for positioning Description Index Bit Signal name Input range Min. unit 7028h 0-15 Pushing force for positioning (7, 11) 1% Index 7029h: AREA 1 Description Index Bit Signal name Input range Min. unit 7029h 0-31 AREA1

0.

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (for VQZ100) This is used when changing piping location.

VZ5000

Prefix it to the part nos. of the solenoid valve, etc. 3-3-60 5 Port Solenoid Valve Body Ported Series VZ5000 Common SUP/Common EXH Type 20 How to Order Stations VV5Z5 05 20 1 4(A), 2(B) port P, R port thread type 02 2 stations 1(P) port NPT G Nil Rc Rc 1/8 Applicable solenoid valve 15 15 stations 00F Rc 1/8 3/5(R) port VK 00N G L M D 01 C6 C8 NPTF 00T VZ52VZ Note) For more than 6 stations

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.) Model AS Applicable tubing O.D.

HRX-OM-M091

(Request)[STX] 01WSV100258 [ETX] [5Ch] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message SV1 Circulating fluid set temperature [06h] BCC value 00258 Write information (25.8 oC) [5Ch] BCC value 5.8 Command explanation HRS Series 5-18 HRX-OM-M091 Chapter

LEC-OM02704CN

PB13PB14 1 , 2 0 01 OFF 15 81 15 PB02 VRFT () PA08()23 PA081 1( 0h ) ( PB19) (PB20) 0 0 0 0 OFF () 1 () PB19 PB20 2 .

VM

00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Polyacetal roller Hard steel roller Polyacetal roller Hard steel roller Roller lever VM121-01-01 VM121-01-01S VM130-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Mechanical operation Manual operation One way roller lever VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123

Basic type / Direct mount type Series CY3B/CY3R

of numbers 15 through 19.

Speed Controller: Standard Type Series AS In-line Type

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-34 Speed Controller: Standard Type In-line Push Locking Type Series AS Construction Dimensions Component Parts No.

JXCx-OMY0004

Please take appropriate countermeasures in accordance with alarm content in reference to the controller Operation Manual. 15. Alarm for Motor Control (P.64) SF Red LED is ON. Alarm generated Check the content of alarm Refer to the controller operation manual and take appropriate measures. 15.

High performance type Step Motor Controller (Servo/24 VDC)

(5) Operation pattern setting 15 (6) Trial run 15 3.

VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

CLA

l~ length 01 thread wnhoul boot With boot --l ~ 40 500 20-500 27 30 60 96 V. y, 44 16 32 10 85 15 26 54 10 10 M8X1.25 100 -750 20750 37 40 11 6 140 V. y, 92 30 52 14 124 21 31 76 25 19 M1 2Xl .75 50 600 20-600 32 35 70 108 Yo V. 52 20 40 10 95 17 27 59 13 12 M 8X 1. 25 63 -600 20-600 32 35 86 11 5 'I, 'I, 64 20 40 10 102 17 26 67 18 15 Ml 0Xl .25 80 750 20750 37 40 102 129 'I.

60

0.15 0.3 0.85 0.1 0.3 0.08 0.2 1.2 2.0 0.3 0.85 0.1 0.3 0.08 0.2 VXK2112-01 VXK2122-01 VXK2132-01 VXK2112-02 VXK2122-02 VXK2-02 VXK2322-02 VXK2132-02 VXK2232-02 VXK2332-02 VXK2242-02 VXK2342-02 VXK2-03 VXK2322-03 VXK2232-03 VXK2332-03 VXK2242-03 VXK2342-03 2 3 4.5 2 2 3 4.5 2 0.8 0.45 0.2 0.8 0.45 0.7 1.0 0.2 0.3 0.6 0.15 0.35 0.7 1.0 0.3 0.6 0.15 0.35 0.17 0.33 0.61 0.17 4.1 7.9 15 4.1

Stainless Steel 316 Fittings

(mm) H (Width across flat) 12 12 17 12 17 19 14 17 19 17 19 Connection thread Rc Note 1) D M Weight (g) L1 L2 Model KQG2F23-01 KQG2F04-01 KQG2F04-02 KQG2F06-01 KQG2F06-02 KQG2F06-03 KQG2F08-01 KQG2F08-02 KQG2F08-03 KQG2F10-02 KQG2F10-03 KQG2F12-02 KQG2F12-03 KQG2F12-04 KQG2F16-03 KQG2F16-04 3.2 1/8 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 23.3 23.7 28.7 24.2 29.2 30.6 26.3