Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model

MONOSASHI-KUN

40 mm N Without cushion 50 50 mm R Front cushion 63 63 mm H Rear cushion Standard cylinder stroke(mm) Standard cylinder stroke Bore size Stroke 25 50 75 100 125 150 175 200 250 300 400 500 2-2-2 Applicable Auto-Switch Models Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

, 50, 80, 100 200 10 400 12 10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Internal parts are broken. 40 - Refere nce Problem Possible cause Solution page 25 35 Please confirm the presence of the wound in the cylinder inner wall after cleaning the inside of the cylinder.

Rotary Table

Fig. 20 Fig. 21 Size 10 Size 20305070100200 Fig. 22 Piston assembly Push nut side 40 - (4) Install the bearing, bearing holder and table on the body.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard stroke (mm) 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 Auto switch specifications Lead wire length (m) Load voltage Indicator light Auto switch type Electrical entry Applicable load Wiring (output) Special function Type 0.5 (Nil) 3 (L) 5 (Z) DC AC Perpendicular In-line 5V 12V IC circuit A90 100V or less No A90V Reed switch Solid state switch 2-wire 24V

Magnet: D (Built-in), Mounting: A [Double End Tapped [ø32 - ø50]], Bore Size: Ø32 mm, Port Thread: TN [NPT (ø32-ø100)], Stroke: 40 mm, Auto Switch: A90--Reed, DC Volt, AC Volt, Horizontal

Bearing Style: M (Slide Bearing), Bore Size: 20mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm, Auto Switch: A90--Reed, AC Volt, Horizontal

Bore Size: 12mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M

Bore Size: 8mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M

Bore Size: Ø6, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M

Bore Size: 10mm, Stroke: 40mm, Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 6mm, Stroke: 40mm, Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 20mm, Stroke: 40mm, Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -

Bore Size: 8mm, Port Thread: Rc, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -, Stroke Adjuster: -