Guide Cylinder Series MGG

size (mm) 20 25 32 40 50 Bore size (mm) S O P T U V W X Z HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 1/8 26 12 82 48 40 39 157 38.5 12(14) 98(106) 12 37 25.3 11 95 M6 x 1 depth 9 1/8 31 13 100 57 46 46 175 39 12(14) 98(106) 12 40 28.3 11 95 M6 x 1 depth 13 1/8 38 16 114 65 52 46 201 40 12(14) 101(109) 12 43 31.3 11 97 M6 x 1 depth 13 1/8 47 20 138 84 62 56 238 41 12(15) 109(118) 13

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Usable range

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Courtesy of

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 NA 2 2 2 2 2 4 4 4 GA 16 16 16 16 51 61 109 159 KA 125 173 223 13-/22-MXS16L-10 13-/22

Precautions 1

2 M14 x 1.5 32 42.5 21.5 (mm) ZZ Z TZ TY TX TT TD S QY Bore size (mm) 20 25 32 40 116 36 52 32 32 10 8 62 14 D120 40 60 40 40 10 9 62 14 122 40 60 40 40 10 9 64 16 -X 154 44.5 77 53 53 11 10 88 16 Individual -X 1571 Series CVM5 Head Side Trunnion Style (T) CVM5T Bore size Stroke Max. 21 Min. 18 Manual override Width across flats B2 Width across flats B1 Width across flats NA S + Stroke Z

Sine Cylinder Series REC

MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width

Sine Cylinder Series REC

MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width

Sine Cylinder Series REC

MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width

Smooth Cylinder

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

Stroke Reading Cylinder and Counter

to 63 13 NBR 32 Rolled steel Cushion ring B Piston gasket 40 to 63 NBR 14 33 Port seal Cushion valve 40 to 63 NBR 15 34 Joint seal Piston nut NBR 40 to 63 Rolled steel 16 35 Valve seal NBR Port joint 40 to 63 Stainless steel 17 36 Wear ring Valve retainer seal NBR 40 to 63 18 Resin 37 Spacer for switch type Aluminum alloy 12 38 Since there is a possibility of improper operation, please

CE

Cushion (applicable bore size 40 to 63) 1pc. S 3pcs. 3 "n" pcs.

CXT

Direct mounting Wire length (1) (m) Load voltage Rail mounting Special function Style Electrical entry Wiring (Output) Indicator 32, 40 12 to 40 Applicable load 0.5 () 3 (L) 5 (Z) (N) AC DC Perpendicular In-line Perpendicular In-line 3 wire (Equivalent to NPN) A96V A96 A76H 5V IC A72H A72 200V Yes Grommet Reed switch Solid state switch A73 A73H 100V 12V A93V A93 Relay PLC 2 wire A90V

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm 40: 37mm 2 auto

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Free Mount Cylinder for Vacuum Series ZCUK

Symbol 2 to 8 10 to 16 20 to 32 40, 50 02 04 06 08 10 13 16 20 25 32 40 50 Suffix 2 4 6 8 10 13 16 20 25 32 40 50 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 B4 M4 x 0.7 Female thread Applicable cylinder model Symbol M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Nil ZC(D)UK 16 to 32 M10 x 1.25 B10 Material Note) -X11 pad: 2 to 8 diameter and flat style

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40

XLAQ/XLDQ

55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface

MXF

10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60 Load (N) Load (N) Load (N) 8-6-4 5 Low Profile Slide

Bore Size: 20mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M