SV 12.5) L1 58.4 60.9 3/5 3/5 E E 4 A 4 A 4 A 4 A 85.4 101.2 105.7 MAX.21 98.7 2 B 2 B 2 B 2 B (Station n) (Station 1) P 1 P 1 5 3 E 1 P Light/Surge voltage suppressor 1 1 Individual SUP spacer SV3000-00Interface regulator 82.7 Individual EXH spacer 63.8 75 SV3000-M1Interface regulator 12 (10) (For DIN rail mounting) B B B B 157.9 14.7 139.9 A A A A B A B A B A B A L Dimension n: Stations L
B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146 200 191 M8 x 1.25 20 30 5
B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146 200 191 M8 x 1.25 20 30 5
Manual override Nil B Non-locking push type Locking slotted type Number of auto switches Nil S N 2 pcs. 1 pc. n pcs.
Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k Black For supply valve (,+)
T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.
thread (mm) A B C D E F G H J K M P Q R S L Bore size (mm) 20 9.5 depth 5.4 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 43 1/8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24
M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13
Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.
(With 2 input blocks) With external pilot specification 46.5 (Pitch) M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 8.6 9.5 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 3 3 PWR 3 3 42.7 3 5 E 5 3 E 5 3 E 3 5 E PWR 43 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 N9 1 1 1 1 BUS 0 BUS 0 0 0 PE PE X
Long stroke (mm) Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke X Y Z Bore size (mm) Stroke range (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 SCXT Tube bore size A, #2(#2+#3) SCXT Tube bore size B, #2(#2+#3) 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150,
B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3[65.5] 15.3 32 17 7.5 (4.4) 111.5[115.9] 12.4 1 98.6[103] A A A A A A 16 R P R P 31.2 31.5 64.1[66.3] 36.4 B B B B B B 65.3 17 50.4 70.2 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5 1/8 (P, R port) (Station n) (Station 1) (Light/surge voltage suppressor) Applicable connector:
W 2 J D C 21 B Nil Built-in magnet No Number of auto switches D With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc. n pcs.
Port size KKA3P-01M-1 -02M-1 -03M-1 KKA4P-02M-1 -03M-1 -04M-1 KKA6P-03M-1 -04M-1 -06M-1 KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Port size Body size Part no.
Auto Switch Mounted from Direction B 1.
7 1 1 Head cover Aluminum alloy Rod seal B NBR White anodized w !8 1 1 Cylinder tube Aluminum alloy Piston seal NBR Hard anodized e !
Applicable cylinder MY1B25 MY1B32 MY1B40 Model MY-J Bore size SMY1B Bore size , #3 (#1 + #3 + #6) B 28 40 44 B 78 88 108 F 96 111 131 C 14 20 22 C 39 44 54 E 1 1 1 E 1 1 1 MY-J25 MY-J32 MY-J40 Note) One set of floating brackets consists of one right piece and one left piece.
C G GB H K J LD L LL LW M MM N NC Model 110 9 5.5 16 24.5 54 9.5 M6 x 1 5.6 114 53 90 9 M5 x 0.8 30 20 MY1H25 NE P NW 53 NH 39 40.5 Rc 1/8 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 110 13 M6 x 1 37 25 MY1H32 49 64 50 Rc 1/8 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 121 13 M6 x 1 45 30.5 MY1H40 63 Rc 1/4 61.5 75 P indicates cylinder supply ports.
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68