Transfer

500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

1.63

D-M9WV D-M9AV 5 Note 2) 1 pc. 10 2 pcs. 5 Note 2) 1 pc. D-M9A 10 Note 2) 2 pcs. 5 1 pc. D-M9V 5 2 pcs. 5 1 pc. D-A9V 10 2 pcs. 5 1 pc. D-A9 10 2 pcs. 1 pc. 15 D-P3DWA 2 pcs. 15 Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.

LG1H

For open collector method, it is 2 m or less. 103 Series LECSA Series LECSB Options Motor cable, Lock cable, Encoder cable LE-CSM-: Motor cable LE CS M S 5 A (13.7) Direction of connector Motor type (30) L A B S Axis side AC servo motor Counter axis side LE-CSB-: Lock cable Cable length (L) [m] Cable contents 2 5 M B E 2 5 Motor cable (11.8) Lock cable A 10 Encoder cable L (29.6) Cable type

Magnetically Coupled Rodless Cylinder

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

4/5 Port Solenoid Valve

) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

17

Maximum Load Mass MY1B/m1 MY1B/m2 MY1B/m3 200 30 40 50 20 100 30 20 10 50 40 10 5 30 4 4 5 20 3 Load mass kg Load mass kg Load mass kg 3 2 10 2 MY1B40 MY1B40 MY1B40 MY1B40 MY1B40 MY1B40 MY1B32 1 MY1B32 MY1B32 1 MY1B25 5 4 MY1B25 MY1B25 0.5 3 0.5 0.4 0.4 0.3 2 0.3 0.2 0.2 1 0.1 100 200 300 400 500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston

5 Port Solenoid Valve

S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72 102.4 39 12 12 12 12 12 21.8 5 4 4 x M4 mounting hole SI unit Stations 1 2 3 4 5 6 7 8 n D side U side C8: 3(R) port C8: 8 one-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A Plug-in Manifold Stacking Base (12) (12) 17.5 6.5

0.4

: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2

0.4

(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01

AC Servo Motor Driver

NP L H PP 0002h A-phase pulse train B-phase pulse train NP 5 15 5.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

HRX-OM-W002

4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu . 5-6 5.3.3 Notice for maintenance Menu . 5-6 5.3.4 Monitor Menu . 5-7 5.3.5 Standard setting menu . 5-8 5.3.6

Air Slide Table/Long Stroke Type Series MXY

), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Auto switch operating range A B A B A B 54 MXY6 34 MXH 59 5 MXY8 39 MXU 67 MXY12 47 MXS Solid State Auto Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside MXQ (mm) B B Model Mounting Auto switch operating range MXF A B A B A B 50 MXY6 3 38 MXW 55 MXY8 3.5 43 MXJ 63 MXY12 3 51 MXP Lead wire entries parallel

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY3A MY3B MY1H/m1 MY1H/m2 MY1H/m3 MY3M 50 50 50 40 40 40 30 30 30 20 20 20 Load mass kg Load mass kg Load mass kg MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 10 10 10 MY1H32 MY1H32 MY1H32 MY1H32 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 5 5 5 4 4 4 3 3 3 2 2 2 D1 1 1 -X 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting Position of the Heater Heater symbol XLm-100(-1)-X152 XLm-160(-1)-X152 H4 (100C) (b), (c) (a), (b), (c) H5 (120C) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 5 XLm-100/160(-1)-X152 Specific Product Precautions Be sure to read this before handling the products.

CG1

5 !

Hygienic Design Cylinder Series HY

male thread Width across flats KA MM Width across flats B1 H1 C1 X K L1 A1 + Stroke CJ5 CG5 HY C M Rod End Male Thread (mm) Bore size A1 72 75 MM M6 x 1.0 M8 x 1.25 20 25 B1 10 13 C1 10 12 H1 3.6 5 K 5 5 KA 6 8 L1 22 24 X 12 14 (mm) Bore size A 60 61 H M4 x 0.7 M5 x 0.8 20 25 B 50 51 C 8 10 D 8 10 E 33 40 F 6 6 I 42 50 K 5 5 KA 6 8 L 10 10 M 22 26 N 4.4 5.4 OA M5 x 0.8 M6 x 1.0 Q 14 14 R

25

Transition wiring cable length (same cable length) m Power supply cable length: 3 m Transition wiring cable length (same cable length) m Power supply cable length: 10 m Bar length symbol 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 2.

Cylinder with Lock Series CNS

Load in direction of rod extension Load in direction of rod retraction m from 0.3MPa Graph 5 F from 0.4MPa Graph 6 m from 0.5MPa Graph 7 F 14 Series CNS Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 3000 3000 2000 2000 1000 1000 160 700 800 900 700 800 900 Load weight: m(kg) Load weight: m(kg) 140 600 600 125 P125 500 500 400 400 160 300 300 140 125 200 200 100 500 400 300