Manifold Specifications

Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) G: 300 mm H: 600 mm Manual override (Non-locking) (PE port) (Lead wire length)

e

P Cable length is selectable from 1 m, 3 m and 5 m. P Improvement in the maximum operating temperature from 40C to 50C (Actuator unit only) P Mounting method can be selected among 3 types.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Supply the following power to L11 and L21.

CS1

Bore size (mm) 125 140 160 180 200 250 300 Refer to p.1.10-7 for How to Order Auto Switches Style.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Consult P/A.

SZ3000

(A) 4 (B) 2 Electrical entry B MN: Without lead wire MO: Without connector M: With lead wire (Length 300 mm) SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

SZ3000

(A) 4 (B) 2 Electrical entry B MN: Without lead wire MO: Without connector M: With lead wire (Length 300 mm) SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

NCQ8

(3"), 400(4") For 075, 106 For 300, 400 N-through hole P-port 2 places Q Q Z 4 places C-depth D-rod dia.

LX

Refer to page 100 for part numbers. 289 Made to Order Series LXP AC Servomotor Specification Guide Rod Type With Motor Brake/Without Motor Brake How to Order X12 LX P B A B D 100 F9N 1 S B AC servomotor specification Guide rod type P Actuator configuration Refer to the applicable motor list on the next page. Number of auto switches Ball bushing B Guide type 1 2 1 pc. 2 pcs.

0.4

Semistandard Exploded View of Manifold P. 1 P. 3 P. 5 P. 7 P. 11 P. 15 Features Variations Cylinder Speed Chart VQ1000 How to Order, Manifold Options VQ2000 How to Order, Manifold Options VQ1000/2000 Model, Standard/Manifold Specifications VQ1000/2000 F kit (D-sub connector) P. 17 VQ1000/2000 P kit (Flat ribbon cable) P. 21 VQ1000/2000 J kit (Flat ribbon cable) P. 25 VQ1000/2000 G kit (Flat

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P O A 75, 100 125, 150 200, 250 300 63 100 66 180 135 117 65 228 60 M12 234 135 12 14 180 158 250 228 25 25 M12 x 1.75 depth 23 Rc 1/4 Rc 3/8 Rc 1/2 200 80 115 76 214 160 138 75 262 70 M12 268 155 16 14 200 178 284 262 27 30 M12 x 1.75 depth 28 230 100 125 80 245 190 153 85 304 80 M14 310 175 16 16 226 200 326 300

LX

Guide rod type P Actuator configuration Refer to the applicable motor list on the next page.

Air Slide Table

= 100 V = 100 3 3 V = 200 V = 200 2 2 V = 300 V = 300 V = 500 1 1 0 0 50 100 150 200 250 300 0 0 50 100 150 200 250 300 350 400 L3: Overhang Allowable range: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

45

= 16 (Pitch) P = 16 DIN rail release button SV 2n-One-touch fittings 2-One-touch fittings 2-One-touch fittings 2n-One-touch fittings (A, B port) (P , R port) Applicable tubing O.D.: 10 (P , R port) Applicable tubing O.D.: 10 (A, B port) Applicable tubing O.D.: 4 6 8 4 6 8 Applicable tubing O.D.: SZ DIN rail holding screw DIN rail holding screw SY SYJ SX 300 (Lead wire length) (Rail mounting

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

P.1516 P.1410 P.125 P.219 P.285 P.329 P.353 P.409 P.447 P.463 P.479 P.547 P.599 P.771 P.791 P.833 P.854 P.858 Actuator page reference (: Best Pneumatics) P.39 P.21 1264 Applicable Cylinder Series 1 Auto Switch Guide CDY1S/CY1L CY1H CY1F CYP MXH MXU MXS MXQ/MXQR MXF MXW MXJ MXP MXY MTS MGJ MY1W HYDC HYDG MY1B-Z MY1HT Cylinder series MY1M MY1B MY1C MY1H CY3R MGP MY2 MY3 25 to 40, 63 to 100

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Both Ends Tapped Style A B C D E H I J K L M O P S Q R Th9 U Z Bore size (mm) Stroke range (mm) M8 x 1.25 58.5 M6 x 1.0 12.5 10 31.5 14 0 0.052 (1) 125 to 200 250, 300 32 62.5 13 Rc 1/8 45.5 16 45 60 4.5 14 17 34 22 M8 x 1.25 66 M6 x 1.0 14 10 35 14 40 72 13 Rc 1/8 55 16 52 69 5 14 17 40 0 0.052 28 M10 x 1.5 80 M8 x 1.25 14 14 41 19 0 0.062 Note 1) For 125 to 200 stroke, strokes are by the

3 Port Solenoid Valve Metal Seal Series VZ200 1

Ported/Base Mounted Series VZ400 Dimensions: Common Exhaust Common exhaust: VV3Z4-50 (G) (L) (M) (D) With light/surge voltage suppressor Max.10 93 87.5 With light/surge voltage suppressor 300 (Lead wire length) 79.9 300 (Lead wire length) 300 (Lead wire length) 2-M5 x 0.8 (Pilot EXH) 2-M5 x 0.8 (Pilot EXH) P = 20 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5 x 0.8 Manual override (Non-locking)

Compressed Air Preparation Filter

10 Micro Mist Separator AMD Series Standard Specifications p. 11 Flow Rate Characteristics p. 12 Activated Carbon Filter AMK Series Standard Specifications p. 19 Flow Rate Characteristics p. 20 AFF AM AMD Construction p. 21 Dimensions p. 23 Modular Connection Example p. 25 Accessories Sold Separately p. 27 International Standard ISO 8573-1:2010 p. 28 Specific Product Precautions

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg MY2HT25 Horizontal impact: P = 0.5MPa MY2H25 Horizontal impact: P = 0.5MPa 2000 1500 2000 1500 H unit Impact speed mm/s Impact speed mm/s Impact speed mm/s 1000 1000 H unit L unit 500 400 300 500 400 300 L unit Air cushion Air cushion Caution 200 200 Do not use a shock absorber and air cushion together. 100 1 2 3 4 5 10 20 50 40 1001 2 3 4 5 10 20 30 4050 30 Air

MNB

P-76 (M)