Cylinder with Lock Series CLS

59 16 107 58 110 M14 x 1.5 15 65 19 Up to 1000 3 30 14 47 78 43 31 50 161 18 110 146 1/4 128 28 17 36 36 90 59 16 114 64 110 M14 x 1.5 15 75 19 Up to 1200 5 46 14 56 53 182 95 23 132 169 1/4 144 32 20 40 40 90 59 43 18.5 130 74 120 17 36 80 22 M16 x 1.5 +0.100 0 Up to 1200 118 30 16 5 63 60 204 106 36 167 195 3/8 162 40 23 50 45 115 70 48 17 18.5 149 86 135 20 41 90 26 M18 x 1.5 +0.100

Cylinder with Lock

100 105 110 D-Y7BA n 85 + 45 (n 4) 2 (n = 4, 8, 12, 16)*2 90 + 45 (n 4) 2 (n = 4, 8, 12, 16)*2 100 + 45 (n 4) 2 (n = 4, 8, 12, 16)*2 105 + 45 (n 4) 2 (n = 4, 8, 12, 16)*2 110 + 45 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 90 95 100 105 110 D-P3DWA n (Different surfaces, same surface) 90 + 50 (n 4) 2 (n = 4, 8, 12, 16)*2 95 + 50 (n 4) 2 (n = 4, 8, 12, 16)*

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Rotation 90 Rotation 90 Rotation 11-9-13 14 Series MSQ Construction o i t !

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

90 Max. 25 8 16 250 270 Rod flange (F) [mm] Bore size [mm] R TF FB E2 UF W MF 4 x FB 32 32 64 7 50 79 16 10 40 36 72 9 55 90 20 10 50 45 90 9 70 110 25 12 63 50 100 9 80 120 25 12 80 63 126 12 100 153 30 16 100 75 150 14 120 178 35 16 E2 R W MF TF UF 125 90 180 16 Max. 157 Max. 224 45 20 Head flange (G) [mm] Bore size [mm] MF ZF 32 10 130 40 10 145 50 12 155 63 12 170 80 16 190 100 16 205

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

05 0.0049 0.0043 0.0037 0.0031 0.0025 0.0018 0.0015 0.31 180 0.0052 0.0046 0.0039 0.0033 0.0026 0.0020 0.0016 0.33 90 1 0.010 0.0091 0.0078 0.0065 0.0052 0.0039 0.0033 0.66 180 Features 7 Mini-Rotary Actuator Series CRJ How to Order Rotation angle 90 100 180 190 90 100 180 190 Basic type 90 E F9B CRJ B 05 S CRJ U 05 90 E F9B S With external stopper Number of auto switches Nil S 2 pcs. 1

CV/MVGQ

n = 2, 4, 6, 8 15 + 50 (n 2) 2 n = 4, 8, 12, 16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16, 110 + 50 (n 4) 2 Different sides n 75 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 90 100 110 20 90 100 110 75 90 100 110 10 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4

Brake mechanism added

55 75 80 90 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 20 + 35 (n 2) (n = 2, 3, 4, ) (Different surfaces) D-A44C n 75 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 55 + 50 (n 2) (n = 2, 3, 4, ) (Same surface) 1 10 75 80 90 2 (Different

C95

115 135 165 45 60 70 80 20 20 25 25 245 280 300 330 16 18 22 26 25 30 30 40 Max. 157 Min. 30 275 315 335 375 130 170 170 200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 199 242 257 289 125 160 200 250

JIS Standard Hydraulic Cylinder

As a guide, turn 90 from the position where it comes to feel tight.

Rotary Table/Rack & Pinion Style Series MSQ

Rotation 90 Rotation 90 Rotation 278 Rotary Table/Rack & Pinion Style Series MSQ Construction CRB2 CRBU2 CRB1 MSU CRJ o i t !

C95

115 135 165 45 60 70 80 20 20 25 25 245 280 300 330 16 18 22 26 25 30 30 40 Max. 157 Min. 30 275 315 335 375 130 170 170 200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 199 242 257 289 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 125 160 200 250

High Vacuum Angle Valve

1 XGT 16 SYJ319XLAV16-90-2 SYJ519XLAV63-90-1 SYJ519XLAV63-90-1 25 40 50 63 80 100 160 XLAV CYV SYJ319XLAV16-90-2 SYJ3190(single) SYJ3290(double) XLCV16-90-1 XLFV SY3120--C4 (single) SY3220--C4 (double) XLCV XLGV Solenoid valve i Plate assembly o V114Initial exhaust solenoid valve !1 XLDV V114XLDV25-90-2 SYJ314XLDV40-90-2 Main exhaust solenoid valve !2 Plate assembly !

CLS

As a guide, it should be turned about 90 past the point at which tightening can be felt. 9-9-23

Step Motor Controller

or less (No condensation) 14 to 140F (10 to 60C) (No freezing) 90 or less (No condensation) Between the housing (radiation fin) and SG terminal 50 (500 VDC) 0.29 lbs (130 g) Note 1) Do not use the power supply of inrush current prevention type for the controller input power supply.

Hydraulic Filters

90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120 120 140 140 140 170 170 30 310 380 450 520 590 45 385 485 585 685

CS1

14 36 43 29 32 25 to 1000 Lube Non-lube Air-hydro 1/2 M30 X 1.5 50 47 75 15 31 161 128 M14 X .5 36 90 43 14 16 32 17 59 35 36 28 to 1000 3/4 M36 X 1.5 56 53 80 36 18.5 17 182 144 M16 X 1.5 20 40 90 59 43 14 39 36 40 32 to 1200 3/4 M40 X 1.5 60 63 41 90 115 18.5 204 162 M18 X 1.5 20 17 23 45 70 48 39 44 50 40 to 1200 3/4 1 Lube Non-lube M45 X 1.5 60 63 90 115 18.5 46 20 226 182 M20 X 1.5

CV/MVGQ

D-G59F D-G5NTL Same side 90 + 50 (n 4) 2 (n 2) 2 15 + 50 n = 2, 4, 6, 8 (n 4) 2 110 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 n = 4, 8, 12, 16 n = 4, 8, 12, 16 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8, Different sides MQQ M n Same side RHC 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides MK(2) 2

Cylinder with Lock

1 10 90 100 110 Different surfaces Same surface 20 75 90 100 110 2 Different surfaces 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) (n = 2, 4, 6, 8, ) 20 + 50 (n 2) 2 90 + 50 (n 4) 2 D-B59W (n = 4, 8, 12, 16, ) n 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Same surface

Electric Grippers

Compact Basic LEHZJ10L, LEHZJ16L 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 Pushing force/Trigger level [%] Pushing force/Trigger level [%] Pushing force and trigger level range Pushing force and trigger level range Pushing speed [mm/sec] Pushing speed [mm/sec] LEHZJ20L, LEHZJ25L 110 100 90 80 70 60 50 40 300 20 10 30 40 50 60 Pushing force