Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Rotary Actuator/Vane Type

14 0 0.043 1.5 1.5 8 7 10 0.5 25.5 14 13 21 M4 x 0.7 M4 x 0.7 4.5 4.5 M5 x 0.8 30 16 4 56 64.5 22 44 36 26 59 30 50 47.5 13 22 80.005 0.020 16 0 0.043 2 2 9 8 12 1.0 33.5 15.5 14 25 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 42 21.5 4.5 71.5 82.5 24 52 42 29 69 40 63 53 15 30 100.005 0.020 25 0 0.052 3 4.5 10 9 20 1.0 39 21 20 31.6 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 47.8 25 5 87.5 98 30 64 52 38

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

High Vacuum Angle Valve

switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

e-Rodless Actuator

How to Order Cam follower guide type E-MY2C 16 N 100 TA M9B Nominal size Number of auto switches 16 25 Nil S n 2 pcs. 1 pc. n Stroke Refer to the standard stroke table.

Made to Order

, 32, 40 25, 32, 40 10, 20 16 to 40 16 to 40 10, 16, 20 16 to 40 16, 25, 40 16, 25, 40 16, 25 16 to 50 16, 25, 40 6 to 25 10 to 25 25 12 to 40 20 to 32 10, 15, 25 12 to 25 Vol. no.

5

n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 D-F5l D-J5l D-F5lW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 15 25 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 1 10 25 2 (Different surfaces, same surface) 15 25 n (Same surface) 15 + 55 (n 2) 2 (n =

Electric Actuator/Slider Type

C L A B C L 25 32 63 25 32 63 Rod ange: LEY F Head ange: LEY G Head ange is not available for the LEY32/LEY63.

2–4

Variations Standard stroke (mm) Series Bore size (mm) Cushion 5 10 15 20 25 30 35 40 45 50 75 100 12, 16 20, 25 Rubber cushion CQM 32, 40 50 Compact Cylinder/Guide Rod Type 12, 16, 20, 25, 32, 40, 50 Series CQM How to Order Without auto switch B 20 10 CQM B 20 10 M9B S CDQM With auto switch With auto switch Number of auto switches Mounting Bore size 12 16 20 25 32 40 50 Nil S n 2 pcs. 1 pc