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400 (4') Auto-switch Mounting Kit 056-150 BQ-z 20G400 BQ-3 Series NCDQT Magnet Center D, S, DC Type T Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.

Air Cylinder NCQ7 Series Compact Cylinder

400 (4') Auto-switch Mounting Kit 056-150 BQ-z 20G400 BQ-3 Series NCDQT Magnet Center D, S, DC Type T Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.

High Vacuum Angle Valve

D-G

4/5 Port Solenoid Valve

DC specifications of type D and DO is only available with 12 and 24 VDC.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

H T E d W T D L Max.

Compact Manifold Regulator Series ARM5

200 250 0 0 50 100 150 200 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM5AA1-308 (One-touch fittings: IN/OUT 6) ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition:

20

Outside diameter Nozzle size L2 Note1) D L1 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 1.5 2 1.5 2 1.5 2 1.5 2 2.5

Clamp Cylinder with Lock

Applicable cylinder series CLK2Pl40-50 CLKP40-R050 63 50 40 CLK2Pl40-75 CLKP40-R075 Dedicated to CLK2Pl40 series D-P4DWSC D-P4DWSE D-P4DWL/Z CLK2Pl40-100 CLKP40-R100 CLK2G series BK1T-040 CLK2Pl40-125 CLKP40-R125 CLK2Pl40-150 CLKP40-R150 BAP1T-040 D-P79WSE D-P74L/Z CLK2P series CLK2Gl50-50/CLK2Pl50-50 CLKG50-R050 CLK2Gl50 series CLK2Pl50 series CLK2Gl50-75/CLK2Pl50-75 CLKG50-R075 CLK2Gl50

CLS

4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80 D-Y59/

Booster Regulator/Air Tank

steel 304 SRH Connected to VBA22A, 42A SRP Tank IN port Rc 1/2 Booster regulator IN port SRF Booster regulator IN port C C ITV EXH: C EXH: C IC (A) (B) Tank OUT port Rc 3/4 (A) D (B) OUT OUT 355 ITVH 256 256 205 4 x 13 4 x 13 ITVX 50 50 150 150 500 PVQ 250 250 824 (mm) VY1 Drain port Rc 1/4 A 531 570 494 527 576 B 444 479.8 444 479.8 479.8 C Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 1/2 D Note) 519

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

G Standard port Mounting hole Width across flats B1 I Relief port Eh8 D FY B B AL MM K NA A FX N F N FZ S + Stroke FT H ZZ + Stroke Z + Stroke 40 Standard port 2 x 7 Mounting hole Relief port (mm) H G FZ FT E F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 50 45 45 41 75 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 19.5 19.5 15.5 .

Sine Rodless Cylinder Series REA/REB

RHC RZQ D-X Individual -X 961 Series REAS Auto Switch Proper Mounting Position (Detection at Stroke End) B A (mm) A dimension B dimension Auto switch model D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 Bore size (mm) 10 35 35.5 45 44.5 40.5

REA/REB

15 Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8

REA/REB

case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 103 103 47 47 78 78 22 32 30.5 117.5 117.5 55.5 55.5 92.5 92.5 30.5 Operating Range Bore size (mm) Auto switch model 32 25 15 D-A9 8 D-M9 3 D-Z7/Z8 9 9 D-Y5/Y6/Y7 6 7 Since this

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

0.4

Note) ( ): VVQ1000-NC-n Dimensions Blanking plug (For one-touch fittings) A L D Model Applicable fitting size d A L D Model Applicable fitting size d KQ2PIt is inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces.

Valve Single Unit

D D side Applicable makers Valve stations MB1 For Mitsubishi Electric Corporation TA1 For OMRON Corporation FU1 For Fuji Electric Co., Ltd.

SMC Pneumatic Clean Series

M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

17

D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 12 to 100 B A D-P3DW 80, 100 25 to 63 B Ht A Hs Hs Auto Switch Proper Mounting Position Applicable Cylinder Series: MGP (mm) Auto Switch Mounting Height (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model Auto switch model D-A9 D-M9 D-M9W D-M9A D-A9V D-M9V D-M9WV D-M9AV D-P3DW D-A9 D-A9V D-P3DW Bore size (mm) Bore size (mm) A 7.5 10.5

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B