VK3000

4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1426 VK3000 Series 5 Port Solenoid Valve Direct Operated Poppet Type Type 41 Manifold/Base mounted (Side ported) VV5K3-41Station -M5 Grommet: G DIN terminal: D Applicable cable O.D.: 3.5 to 7 78.9 74.6 Max

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

BBA1: D-A5/A6/F5/J5 types *"D-F5BAL" switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, "BBA1" screws are attached.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450

MWB

The D-A9l/M9l/P3DWAl auto switches are shipped together, but not assembled.

MNB

Standard Stroke DMaximum manufacturable stroke Bore size (mm) -X Standard stroke (mm) 20700 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 800 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

30 37 47.3 d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 Part no.

VK3000

(P port) (P port) n1 = Number of VK3000 n2 = Number of VK300 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 3-2-7 Series VK3000 Base mounted (Bottom ported) Type 40 Manifold Grommet: G DIN terminal: D

Digital Flow Switch (Integrated display type)

min Display flow range 7 to 140 L/min (Displays 0 when the value is 20 to 350 L/min (Displays 0 when the value is below 20 L/min) below 7 L/min) Switch point range 7 to 140 L/min 20 to 350 L/min Min. setting unit 1 L/min 2 L/min Conversion of accumulated pulse (Pulse width = 50ms) 1 L/pulse Fluid temperature 0 to 70 oC (No freezing and condensation) Display unit L/min for real-time flow and

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

LEKFS16 LE-D-6-5 9.8 pull LEKFS25 LE-D-6-2 19.6 LEKFS32 LE-D-6-3 49.0 LEKFS40 LE-D-6-4 98.1 Bolts Refer to (A) (A) Model Type of bolt Bolt size Tightening torque [Nm] LEKFS16 Round head combination M2.5x5 0.3610% LEKFS25 M3x6 0.6310% LEKFS32 M3x6 screw LEKFS40 M3x6 (B) Model Type of bolt Bolt size Tightening torque [Nm] Cross recessed round head screw with washer M2.5x7(without

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

High Vacuum Angle Valve

D-G

A

Note) (N)AM AM Japanese NAM North American H O W T O O R D E R M I S T S E P A R AT O R S E R I E S (N)AM (N)AM S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E Y Drain Guide 1/4 Internal Thread M With Drain Lock M5 Screw R IN, OUT Reverse Direction 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis O P T I O N S None B Bracket

CV/MVGQ

(Not mountable after the time of shipment) RHC MK(2) Auto Switch Mounting Height RS Q G D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7lWV D-A44 D-A44C D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W RS H A RZQ Bore size (mm) Hs Ht Hs Hs Hs Ht Hs Hs Ht Hs Ht Hs Hw Hs Hw MI W S

MK

Note D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F7BAVL D-F79F D-F7NTL Switch mounting screw RS H A 20, 25 BQ-1 (M3 x 0.5 x 8l) Square nut D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W RZQ Switch mounting screw 32, 40 50, 63 Magnetic body (Steel plate, etc.)

MK

Applicable Auto Switch Style Auto Switch Model Page Electrical entry (Function) Bore size D-A7, A8 D-A7lH, A80H D-A73C, A80C D-A79W D-A9l D-A9lV D-F7l, J79 D-F7lV D-J79C D-F7lW, J79W D-F7lWV D-F7BAL D-F7lF D-F7NTL D-F9l D-F9lV D-F9lW D-F9lWV D-F9BAL D-F5DWL 5.3-14 Grommet (Perpendicular) 5.3-15 Grommet (In-line) 20 to 63 Reed switch Solid state switch 5.3-16 Connector Grommet (2 color indication

CY1F

(mm) Bore size D-A9, D-A9V D-F9, D-F9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.) (mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

MNB

(different sides or same side) 15 25 1 pc. 10 Auto Switches / Proper Mounting Position and Height for Stroke End Detection Reed switch Solid state switch A B Hs A B Hs Ht Ht Auto switch mounting position Auto switch mounting height D-A5 D-A6 D-A59W D-F5, D-J5 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5, D-A6 D-A59W D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5NTL Bore size (mm) Bore size (mm) Hs Ht Ht Hs B

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

DC specifications of type "D" and "DO" is only available with 12 and 24 V DC.

Step Motor Controller

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Details P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this P Regeneration option C terminal. D Connect the control circuit power supply.

2/3 Port Valve

Note 3) "D", "E", "N", "P" etc. in the parenthesis are option symbols.