High Vacuum L Type Valve

) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 3) for 0.5MPa 31 61 220 390 680 1420 Solenoid valve SYJ319 SYJ519 Port size M5: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight kg 0.34

High Vacuum L Type Valve

oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

Cylinder with Lock

100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Double acting single rod, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 500mm, Mounts: basic, foot, front and rear

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Centralized piping: double acting single rod, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 500mm, Mounts: basic

Magnet: D (Built-in Magnet), Mounting: V (Integral Clevis, 90°), Bore: 32mm, Port Thread: Rc, Stroke: 100mm, Cushion: None, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Environmental Options: XC85

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Leadwire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 32mm, Port Thread: Rc, Stroke: 125mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: V (Single Knuckle Joint)

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 32mm, Port Thread: Rc, Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: V (Single Knuckle Joint)

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled), Rod End Bracket: V (Single Knuckle Joint)

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 32mm, Port Thread: Rc, Stroke: 300mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: -, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: A34A--Reed, AC/DC Volt, LED, Terminal, Leadwire or Prewired Connector: -, Number: -

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Rubber cushion, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Rubber cushion, Specification: Built-in magnet, Port thread type: Rc,

Magnet: D (Built-in), Type: Pneumatic, Mounting: V (Integral Clevis, 90°), Bore: 32mm, Port Thread: Rc, Stroke: 300mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: N (Pivot Bracket not assembled)

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Rubber cushion, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Rubber cushion, Specification: Built-in magnet, Port thread type: Rc,

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Leadwire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 32mm, Port Thread: Rc, Stroke: 125mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: Pivot Bracket not assembled, Rod End Bracket: Single Knuckle Joint, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -