Digital Flow Switch (Integrated display type)

min Display flow range 7 to 140 L/min (Displays 0 when the value is 20 to 350 L/min (Displays 0 when the value is below 20 L/min) below 7 L/min) Switch point range 7 to 140 L/min 20 to 350 L/min Min. setting unit 1 L/min 2 L/min Conversion of accumulated pulse (Pulse width = 50ms) 1 L/pulse Fluid temperature 0 to 70 oC (No freezing and condensation) Display unit L/min for real-time flow and

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

LEKFS16 LE-D-6-5 9.8 pull LEKFS25 LE-D-6-2 19.6 LEKFS32 LE-D-6-3 49.0 LEKFS40 LE-D-6-4 98.1 Bolts Refer to (A) (A) Model Type of bolt Bolt size Tightening torque [Nm] LEKFS16 Round head combination M2.5x5 0.3610% LEKFS25 M3x6 0.6310% LEKFS32 M3x6 screw LEKFS40 M3x6 (B) Model Type of bolt Bolt size Tightening torque [Nm] Cross recessed round head screw with washer M2.5x7(without

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

High Vacuum Angle Valve

D-G

A

Note) (N)AM AM Japanese NAM North American H O W T O O R D E R M I S T S E P A R AT O R S E R I E S (N)AM (N)AM S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E Y Drain Guide 1/4 Internal Thread M With Drain Lock M5 Screw R IN, OUT Reverse Direction 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis O P T I O N S None B Bracket

CV/MVGQ

(Not mountable after the time of shipment) RHC MK(2) Auto Switch Mounting Height RS Q G D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7lWV D-A44 D-A44C D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W RS H A RZQ Bore size (mm) Hs Ht Hs Hs Hs Ht Hs Hs Ht Hs Ht Hs Hw Hs Hw MI W S

MK

Note D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F7BAVL D-F79F D-F7NTL Switch mounting screw RS H A 20, 25 BQ-1 (M3 x 0.5 x 8l) Square nut D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W RZQ Switch mounting screw 32, 40 50, 63 Magnetic body (Steel plate, etc.)

MK

Applicable Auto Switch Style Auto Switch Model Page Electrical entry (Function) Bore size D-A7, A8 D-A7lH, A80H D-A73C, A80C D-A79W D-A9l D-A9lV D-F7l, J79 D-F7lV D-J79C D-F7lW, J79W D-F7lWV D-F7BAL D-F7lF D-F7NTL D-F9l D-F9lV D-F9lW D-F9lWV D-F9BAL D-F5DWL 5.3-14 Grommet (Perpendicular) 5.3-15 Grommet (In-line) 20 to 63 Reed switch Solid state switch 5.3-16 Connector Grommet (2 color indication

CY1F

(mm) Bore size D-A9, D-A9V D-F9, D-F9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.) (mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

MNB

(different sides or same side) 15 25 1 pc. 10 Auto Switches / Proper Mounting Position and Height for Stroke End Detection Reed switch Solid state switch A B Hs A B Hs Ht Ht Auto switch mounting position Auto switch mounting height D-A5 D-A6 D-A59W D-F5, D-J5 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5, D-A6 D-A59W D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5NTL Bore size (mm) Bore size (mm) Hs Ht Ht Hs B

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

DC specifications of type "D" and "DO" is only available with 12 and 24 V DC.

Step Motor Controller

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Details P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this P Regeneration option C terminal. D Connect the control circuit power supply.

2/3 Port Valve

Note 3) "D", "E", "N", "P" etc. in the parenthesis are option symbols.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

It is already built into the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal (Type D) DC specifications of type D and DO are only available with 12 and 24 VDC. Power saving circuit is not available for D or DO types.

Step Motor Controller

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

Magnet: D (Built-in), Mounting: L (Axial Foot), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewied Connector: L (3m)

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Axial Foot, Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewied Connector: 3m, Number: -

SYJ300/500/700

It is already built-in to the rectifier circuit. 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

Low Profile Guide Type

(mm) D-M9V D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A90V D-A96V D-A93V Bore size (mm) D-A90 D-A96 D-A93 D-M9 D-M9W Bore size (mm) Mounting pattern q, w Mounting pattern e 32 32 20 22 35 20 10 15 25 12 5 10 Mounting of Auto Switch As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.