30

13.6 16.1 17 18.6 20.8 T H M M L Note) Value of FEP tube.

2/3 Port Valve for Various

$% % 33 1 ,) % % 1 ) ,, ) /) H B 7 !"# ! , & Ordering example VX021-001GB-01 !"# $ % & VX021-002DBT-04 ' ( !

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 T D1 H D2 D3 L1 L2 Max. Min.

Series AS-FM/AS-M/ASD-FM

Weight g Model d T D1 H D2 D3 L1 L4 L2 L3 Min. Max.

5-Port Solenoid Valve

H Hexagon socket head cap screw (Falling-out-prevention type)*1 !0 Manual override *1: For K and H, the valve body cover has a drop prevention construction to stop the mounting screws from falling out when the valve is removed for maintenance etc. *: When ordering a valve individually, the base gasket is not included.

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

JXCx-OMT0062

RWr6DATA (H) (0)h RWr7DATA (L) (1388)h (8) Check that step data has been edited correctly.

JXCx-OMX0009

RWr6DATA (H) (0)h RWr7DATA (L) (1388)h (8) Check that the Step data is edited correctly.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

L4 (Width across flats) Applicable tubing O.D. d A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

Digital Flow Switches

YES For Water / High Temperature Fluid Type (For Water) OFF n-1 n-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate Window comparator mode H : Hysteresis GPM gal (US) "n" H H GPM = gal (US)/min Note 2) Output mode is set to inverted output at the factory before shipment.

Series H, DL, L, LL Self-align Fittings

(Except L-04 and LL-04 which are for the body of 6 tube.) Swivel type fittings, elbow (L) and (LL) constitute the combination with a male connector (H) and connector as shown in the diagram.

VQ5000

2 position double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550 1-G H 194.5(200) 121.3 53 73.2(78.7) Indicator light 213 121.3 91.5 13.5 2(B) port 59.5 53 4 (A) port17.5 13.5 2(B) port 59.5 4(A) port 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

L4 (Width across flats) Applicable tubing O.D. d A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

JXCx-OMT0061CN

16 CC-Link 001dh 1 1,2,4 * 30 - (9000)h 2 0.01mm (9002)h 1 1mm/s (9003)h 1 1% (9004)h 2 0.01mm (9006)h No. 1 (9008)h 2()/1() 1 (9009)h 4()/3() 1 JOG (0030)h JOG 1 *1 1mm/s 2 (0031)h JOG 1 1 1mm/s 2 (0032)h JOG 1 1 1mm/s (0033)h JOG 1 *1 1% (0034)h 2 (-) 0.01mm (+) (0400)h (040F)h (No.0) 16 (0410)h (041F)h (No.1) 16 (0420)h (042F)h (No.2) 16 . . . . . . . . . . . . .

13

38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS

AC Servo Motor Driver (Pulse input type/Positioning type ）

OPTIONS AND PERIPHERAL EQUIPMENT (b) Cable internal wiring diagram MR-J3ENCBL2M-L/-H MR-J3ENCBL5M-L/-H LE-CSE-RA LE-CSE-RB LE-CSE-SA LE-CSE-SB MR-J3ENCBL10M-L/-H Encoder side Driver Servo amplifier connector side connector P5 LG 1 2 3 P5 6 LG MR MRR MR MRR 3 4 5 4 BAT BAT 9 2 Plate SD 9 SHD 11 8 11.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Recommended Parameter Values [LEF/LEKFS] LEFS25T6 LEFS32T7 LEFS40T8 /LEKFS25T6 /LEKFS32T7 /LEKFS40T8 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

LEC-OM02704CN

RX0F RX00 1 1 FROM E 1 H RX 1 F RX 1 0 M15 M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(WNG)

LVQ

Series 2 8.4 (0.35) 31.2 (1.3) 45.6 (1.9) 120 (5) 192 (8) Series LVQS-Z 4 LVQ20(H)S-Z LVQ30(H)S-Z 8 LVQ40(H)S-Z 10 LVQ50(H)S-Z 16 LVQ60(H)S-Z 22 Series LVQHS-Z Tube Extension Fitting Type Series LVQ-T/LVQH-T Tubing size Flow characteristics Av x 106m2(Cv) 10 12 19 25 1/4 3/8 1/2 3/4 1 Orifice dia.