V

Hg L 400mm Hg 1 Torr = 0.0197PSI I N L E T P O R T 10 10mm Tube 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !

Round Type Low Pressure Hydraulic Cylinder Series CH
M

36 44 M4 10 10 13 13 10 10 12 12 12 12 12 16 7 7 7 9 6.5 5.5 5.5 +0.058 0 +0.070 0 +0.070 0 M4 6.5 10 10 5.5 9 9 5.5 7 10 M5 M5 Y-type double knuckle joint Bracket pin Material: Carbon steel 20: Y-02 25: Y-03 Material: Rolled steel 32: Y-04A 40: Y-04B Material: Cast iron 2-D drill through RR1 C1 Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) IR3000-03 IR3000-03 IR3000-03 Supply pressure: 0.5 MPa Back pressure: 0.5 MPa 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.202 0.4 Set point Set point Set point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000 3500

Booster Regulator Series VBA1110 to 4200 1

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Example: SS3YJ3-20-03 .1 pc. (Manifold base) SYJ312-5LZ-M3 .2 pcs. (Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

OMU0023

Step Request data Response data Operation details 1 01 03 0600 0004 01 03 08 Acquires the alarm history. 2 Alarm history confirmation Confirms the acquired alarm history. (9) Alarm history clearance example E.g) The Alarm History saved in the Card Motor controller (controller ID1) is cleared.

70pvpump

PAP: Clean room LVH Note 1) 1 to 12 l for 3/8" tubing type. Note 2) The above values are for a normal temperature and using clean water. LVD Refer to the separate pamphlet P-E00-5A for further details.

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

PA300/500/700

15 0.29 0.23 3.1 3.8 2.9 3.8 12 14 0.36 0.25 VPA742 (Body ported) 0.64 Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

E-P HYREG

sub-plate ITVH 02 14 03 38 04 12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Size: 3/8 Basis, Style: Union Tee, Thread: M3, M5, U10/32, R, Port Size: R3/8, Tube Size: Ø12, Sealant: -, Option: -, Made to Order: -, Lock Nut: -

Size: 42, Type: Q (Rapid Supply and Exhaust Function), Thread: Rc, Port Size: 03 (3/8), Tubing O.D: ø12

.: 3/8, Types of Screw: R, Applicable Tube O.D. mm(mm): 12, Applicable Tube O.D. inch size(inch): -, Body Size: 3, Sealing Method: No Sealant, Hex Size H (H1)(mm): 9, Indicator window direction: 0°, Made-to-order specifications: None

.: 3/8, Types of Screw: R, Applicable Tube O.D. mm(mm): 12, Applicable Tube O.D. inch size(inch): -, Body Size: 3, Sealing Method: No Sealant, Hex Size H (H1)(mm): 9, Indicator window direction: 0°, Made-to-order specifications: None

.: 3/8, Option: None, Types of Screw: R, Applicable Tube O.D. mm(mm): 12, Applicable Tube O.D. inch size(inch): -, Body Size: 3/8 Standard, Made-to-order specifications: None

.: 3/8, Option: None, Types of Screw: R, Applicable Tube O.D. mm(mm): 12, Applicable Tube O.D. inch size(inch): -, Body Size: 3/8 Standard, Made-to-order specifications: None

Types: Air Blow Gun Body and Nozzles, Nozzle Shape: Standard, Features: Standard, Air Supply Port Connection Type: Female Thread, Nozzle Connection Port Type: Male Thread, Body Material: PBT (Polybutylene Terephthalate), Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 1.5, Piping exit direction: Down direction, Connector size: Rc3/8, Body color: Dark blue,