Electric Actuator/Slider Type

Note 11) Only when motor option With lock is selected. Note 12) For an actuator with lock, add the power consumption for the lock.

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

TABLE OF CONTENTS

H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

MGP

B + Stroke A + Stroke E MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 59.5 37.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 12.5 112 120 148 162 24 27 32 39 M8 x 1.25 20 20 22 22 M8 x 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50 34 40 46 58 7.5 7.5 9 9 Rc

LEC-OM07605CN

AC200V240VL1L3L2 2. 11 29 11. (3) (a) EMC HF3010A-UN [:mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN (41) 258 4 65 4 273 2 288 4 300 5 HF3030A-UNHF3040A-UN [:mm] 6-K 3-L 3-L G 1 D 2 E 1 F 2 M J 2 C 1 C 1 H 2 B 2 A 5 [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 8 M5 M4 HF3040A-UN 11 30 11.

Digital Flow Switch (Remote type sensor unit)

Model S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0010-J PF3W521 Basic type Symbol Piping port size A AA B DD E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W521 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 76.6 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0010

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MGPM, MGPL, MGPA Common Dimensions [mm] Bore size [mm] Standard stroke [mm] B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P Nil TN TF 32 25, 50, 75 100, 125, 150 175, 200, 250 300, 350, 400 59.5 37.5 14 10 12 48 12 9 112 M6 24 24 34 M8 x 1.25 20 M8 x 1.25 6.7 11 7.5 Rc1/8 NPT1/8 G1/8 40 66 44 14 10 12 54 15 12 120 M6 27 27 40 M8 x 1.25 20 M8 x 1.25 6.7 11 7.5 Rc1/8 NPT1/8 G1/8 50 72 44

10

Note) L Note) J Note) M Note) K Note) J Note) L Note) K Note) M Note) L Note) N Note) M Note) N Note) Note) Since the bracket is attached to the resin body type H, J, K, L, M, N, XB cannot be selected.

AC Servo Motor Driver (Network card type ）

11 32 11.

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

Step Motor Controller

7 6 9 8 11 10 3 Connector B terminal no.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 12 16 20 25 42 29 6 8 5 26 11 7.5 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 13 8 18 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8

REA/REB

B 4-Counter bore depth C MM thread depth M Hollow shaft for piping FA FB EB H S + Stroke HO TT T HP 4-J depth JK HI HG PA Slider Type/Slide Bearing REAS H 2-P HP HG 2-P d D LD A 5.5 NN GP PW PW QW GP PB W HT HT Slider Type/Ball Bushing REAL (11) RW HB HS HB HA L G G View A REAL15 HS Z + Stroke Q + Stroke A High Precision Guide Type REAH N N Max.

Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q AH AG S U W K L B R A AL I J AI AJ AP 4 x AK hole AA AB V Y + Stroke X Z + Stroke For 4 x AO AG AN AI Cutout window AM Mounting dimensions (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) AA AB AG AH AI AJ AK AL AM AN AO AP B I J K L M N O A 11 11 112 125 82 95 6.6 9 65 115 M6 25 108 30 55 60 80 25 45 M6 x 1 depth 9 90 75, 100, 125, 150, 200 14 13 134 150 92 108

C95Series

. __ I -='.1' .J.. ~ ~ _.

Proposals for Energy Saving

depth 8 14 depth 10.5 17.5 depth 13.5 17.5 depth 13.5 5.5 5.5 5.5 5.5 6.6 9 11 11 11 0 0.052 0 0.062 0 0.062 0 0.062 0 0.074 28 35 35 43 59 10.5 15 16 23 Note 1) Dimensions other than above are the same as the standard double acting single rod type.

Vacuum Unit

for vacuum/pressure sensor Cannot be selected when e is J PD port D With individual release pressure supply (PD) port (M3)6 100 to 100 Screwdriver operation type long lock nut Screwdriver operation type long lock nut Cannot be selected when e is J Can be selected only for the combination of J and K E Vacuum break flow adjusting needle Lock nut J Round lock nut 3 The unit selection function

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel