VXA21/22

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

Air Pilot Operated Series NVSA

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

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PT ports lfeuin-in magna (l-lopuo* ilq-hoa a""t N J K aorh .!

Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

In case of ZQ1 3M-00, the overall length is 111. 5 6 5 6 5 6 5 6 K J Q N K J E F E F Q N Circuit diagram P PE EXH EXH P PE Left Right V V V V E F E F E F 5 6 5 6 5 6 ZQ1 3M-K1 ZQ1 3M-K2 KZQ1 3M-J1 -FZQ1 3M-Q1 K10 Series ZQ Dimensions Manifold type (with PD port) ZZQ1 -BSC ZQ1 3MCommon air pressure supply (P) port (One-touch fitting: Applicable tubing O.D. 8) Supply valve Release valve Common

155

62 5.5 48 30 31 1 90 74 44 22 135.9 144.5 151 40 36 72 6.5 60 35 39.5 External pilot solenoid type (Conduit terminal) P Pilot port 2 x 1/8" (Back side PE: Filter standard installation) J N I Manual override 2.3 12 Bracket G O L M F E 4 x K 2 1 D C H (2 locations) Main port A B A B C D E F G H I J K L M N O P Main port Model SGC2lll-ll10 SGC2lll-ll15 SGC3lll-ll20 SGC4lll-ll25 3/8 63 49.6

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Air Pilot Operated

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

B C D E F G H J K L M N P Q R S T ARG20 ARG30 ARG40 40 114 26.5 57 45 47 38 52.5 39.5 19.5 6 48 65 10.4 5.4 60 2.3 35 1/8, 1/4 53 138.5 31 59 58 59 50 65 50.5 25 7 59 75 10.5 6.5 70 2.3 45 1/4, 3/8 70 150.5 36 68 70 70 54 70 55.5 27.5 7 65.5 85 12.5 8.5 75 2.3 50 1/4, 3/8, 1/2 23 Regulator with Built-in Pressure Gauge with Back Flow Mechanism Series ARG20K/30K/40K How to Order ARG 20 K 01

VCW

1 2 3 4 5 n LVA LVH LVD LVQ 21 LQ 16 H H P = J (Pitch) OUT port n-1/4 2 5.5 LVN n-1/8 : Thread type TI/ TIL L Dimension (mm) PA n (stations) Dimensions Model PAX 2 3 4 5 6 7 8 9 10 L1 69 103.5 138 172.5 207 241.5 276 310.5 345 L2 VV2CW2 PB 81 115.5 150 184.5 219 253.5 288 322.5 357 L3 93 127.5 162 196.5 231 265.5 300 334.5 369 L1 77 115.5 154 192.5 231 269.5 308 346.5 385 L2 VV2CW3 89 127.5

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

"#$ S Q J K E B ! "#$ A !

AWM20 to AWM40

cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] AD38 AD37 NPN output / Wiring bottom entry NPN output / Wiring top entry Digital pressure switch Note 4) PNP output / Wiring bottom entry NPN output / Wiring top entry N.O.

AWM20 to AWM40

cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] AD38 AD37 NPN output / Wiring bottom entry NPN output / Wiring top entry Digital pressure switch Note 4) PNP output / Wiring bottom entry NPN output / Wiring top entry N.O.

Table of Contents

ZSE1-01-15CN1 pc.

ZP

(mm) 10 to 16 20 to 50 M10 x 1 M14 x 1 Mounting 10, 20, 30, 40, 50 10, 20, 30, 50 Stroke (mm) 0 stroke 0 stroke Spring reactive 2.0 N 1.0 N Stroke end Stroke end force 5.0 N 3.0 N With no non-rotating (J), With non-rotating (K) Non-rotating specification Weight (g) Vacuum entry port Pad dia.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Refer to the table below for accessory/option combinations Thread Rc (PT) Table: Accessory/Option combinations Depending on model l Not available Available F G (PF) N NPT Accessories Options C C D -J -R D J T AMD150 R AMD250 AMD350 AMD450 Applicable models Accessories /Options Port size AMD550 AMD650 AMD850 01 B B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN R

ML1C

Holding force 25 320 N 32 500 N 40 800 N CNG MNB CNA2 CNS Brake construction is designed not to allow loads on guide. CLS Spring force works directly on the brake-shoe and the brake plate is caught between brake shoes from top and bottom so that the slide table can stop without compromising guide performance.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W K CY1RG50/63 HB HC N X MX H MTS CB HA 2-P (Piping port) 4-J x E (Depth) 4-Counterbore dia.