4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

pulses) 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses)

Refrigerated Thermo-chiller

60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated

AR20-B to AR60-B

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

RHC

G5-S CV MVGQ CC RB J D-X 20Data 10-6-9 9 Series RHC Construction: 20 to 40 u q !

33

Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet

Mist Separator

.: AMX-OMX0019-C PRODUCT NAME Mist Separator MODEL / Series / Product Number AM20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AM30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AM40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

39.9 34.9 18.5 15 17 8 R 1/4 ASD430FG-02-08S 28.2 18.5 55 46.5 15.2 34.4 29.4 11 19.7 10 21 31 58 ASD430FG-02-10S 49.3 18.5 17 25.2 74 6 ASD530FG-02-06S 48.3 12.8 20.3 18.5 28.2 76 8 ASD530FG-02-08S 51.3 15.2 46.9 41.9 48.3 43.3 23 19.8 19 R 1/4 42.8 37.8 15.4 21 80 32.6 10 ASD530FG-02-10S 54.1 18.5 23.1 22 83 34.4 55.9 12 ASD530FG-02-12S 20.9 17 74 25.2 48.3 6 ASD530FG-03-06S 12.8 20.3 18.5

Booster Regulator Series VBA1110 to 4200 1

G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.

Mini Free Mount Cylinder

Allowable kinetic energy (J) Applicable bore size (mm) Bolt Proper tightening torque (Nm) 3.8 x 10-3 6.25 x 10-3 9.35 x 10-3 12.5 x 10-3 0.030 0.053 0.077 0.54 20% (0.432 to 0.648) 4 M2.5 x 0.45 6 8 10 12 16 (Supply pressure: P = 0.5 MPa) 1.06 20% (0.848 to 1.272) M3 x 0.5 100 3.27 20% (2.61 to 3.92) M4 x 0.7 10 20 16 12 10 Load mass m1 + m2 (kg) 6.6 20% (5.28 to 7.92) 20 M5 x 0.8 Torque

Line filter

.: AMX-OMX0018-B PRODUCT NAME Line filter MODEL / Series / Product Number AFF20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AFF30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AFF40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

Micro Mist Separator

.: AMX-OMX0020-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AM20-(F, N)01 ~ (F, N)02(B, C)(-2, 6, C, J, L, R, Z)-D AM30-(F, N)02 ~ (F, N)03(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D AM40-(F, N)02 ~ (F, N)04(B, C, D)(-2, 6, 8, J, L, R, W, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5.

Vacuum

{check leakage). 98 lloninntal Type Uacuum Entny: Witlrout BullcD lrllilh 0ne-Iouch Tube litting Specif ications 2, 4,6, 8, 10, 13, 16, 10,13,16,20 10, 16,25, 4D 6,8, 10, 13, 16,20 NBR (black), Silicone (white), Urethane (brown), Ftuorine (black with mark), Conductive NBR (black with mark), Conductive Silicone {black with NBR (50 J Silicone rubber (40"J. Urethane rubber.

Vacuum

{check leakage). 98 lloninntal Type Uacuum Entny: Witlrout BullcD lrllilh 0ne-Iouch Tube litting Specif ications 2, 4,6, 8, 10, 13, 16, 10,13,16,20 10, 16,25, 4D 6,8, 10, 13, 16,20 NBR (black), Silicone (white), Urethane (brown), Ftuorine (black with mark), Conductive NBR (black with mark), Conductive Silicone {black with NBR (50 J Silicone rubber (40"J. Urethane rubber.

I

from the VY Valve. 02 14 2.0 3 03 38 3.3 body Ported Type 04 12 3.9 Terminal Designations are as follows: 04 12 7.2 5 06 34 8.9 1 = 24v Power Supply 2 = Control Signal 3 = Common Negative for both power and signal. 10 1 10 5% 2% + -2% 7 10 1 114 17 12 114 18 9 14 112 2 33 20 2 37 Courtesy of Steven Engineering, Inc. !

Title not found

, 16,20, 25:40 mm, Bore size 32,40:80 mm Refer to catalog E2,l5A a a a a a a a a a a a Parallel Gripper Series MHZ2 Standard Body o6 to s40mm Bore 6 Size 6: MHZ 2 Sizes 10 to 25: MHZ 2 Sizes 32 & 40: MHZ 2 .,rr,"""^ J Number of fingers Action Bas c iype End boss side porled' End boss arialonelouch ftlin91 " End boss axal M5 porlr j S nsle-acling on y Throug F a t 'D S actori, basic and N

VCC

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output