Regulator

Note 1) Note 2) G46-4-01 (Rc type) / G46-4-N01 (NPT type) / G46-P4-N01-X30 (NPT, Z type). Part number for 0.2 MPa: G36-4-01 (Rc type) / G36-4-N01 (NPT type) / G36-P4-N01-X30 (NPT, Z type). With O-ring (1 pc.) and mounting screw s (2 pcs.). Part number for 0.2 MPa: GC3-4AS(-J)-D (Rc, NPT type) / GC3-P4AS(-J)-D-X30 (NPT, Z type).

VCW

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Symbol Nil S Material Brass Stainless steel D side U side 1 2 3 4 5 n 02 : 10 2 stations : 10 stations All IN ports are 3/8. Refer to the L dimension table on page 4.5-9 regarding the maximum number of stations.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Symbol Nil S Material Brass Stainless steel D side U side 1 2 3 4 5 n 02 : 10 2 stations : 10 stations All IN ports are 3/8. Refer to the L dimension table on page 7 regarding the maximum number of stations.

Prevents Micro-Bubbles

K type ony) S Option Part No.

IDG

: S) 59.5 30 223 45 133 11 IN OUT 24 140 97 8.5 124 118 9 Purge air for dehumidification With float type auto-drain (N.C.)

Series IDG

IDG 10 M 03 X016 Optional specifications Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard 10 Flow direction (rightleft) With dew point indicator R S 20 Standard equipment 30 50 Drain discharge symbol Standard dew point Size 3 10 20 30 50 5 Drain discharge method Nil Manual valve C N.C. auto drain D N.O. auto drain Drain guide (aperture 1/4, without valve) J Port size Note) IDG50M

Title not found

Longrudinal mounlng space s rduced because there is no protrlsion from adtlshent bolts or nlernal shockabsorbeis sEe e pol J- a a a a a a a a a a a a a a a a MSo E Options " Except sEe 1, 2, 3,7, 10 and 20 2 pcs. 1 p c n pcs Body size a Lead wire length Eos.--l E s . I E s.

Air Pilot Operated Series NVSA

DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

MPa MPa MPa P P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to Mounting angles other than 45, 135, 225 and 315 are available through the Made to Order (page 29).

Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

High Purity Chemical Valve

S) L 49.5 A B (mm) Dimensions W (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2 x 2 Depth 4 S Model LVA2m LVA3m LVA4m LVA5m 88.5 12.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K (mm) Dimensions A B C D Q R P E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1m 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2m 30 36 57.5 44 11 31.5 13 4 20 37 3.5 26.5 M3 x 0.5 Rc

Air Pilot Operated

DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

Compact Vacuum Unit

Also, do not use the filter when these chemicals are present in the atmosphere. 2 Series ZB How to Order Manifold S 01 ZZB 08 M5 Stations Pressure Sensor/Vacuum Pressure Switch Mountable Note) Sensor/switch non-mountable base Sensor/switch mountable base Nil S 01 02 1 station 2 stations Note) Select S when the model with either the pressure sensor or the vacuum pressure switch is selected

90

P Single unit Note 4) Vacuum pump system J N.C. None Note 5) Self-holding release valve linked For manifold Q R N.C. Note 7) N None None Silencer exhaust A Note 3) Only non-locking type is available for the manual override for K, J, R. Note 4) When J is selected for vacuum pump system, install a release valve or vacuum breaker.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L1 L2 L3 L4 110.5 123 135.5 148 160.5 160.5 173 185.5 198 100 112.5 125 137.5 150 150 162.5 175 187.5 77.8 87.8 97.8 107.8 117.8 127.8 137.8 147.8 157.8 19.5 20.5 22 23 24 19 20 21.5 22.5 20 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D B (S, R, RS) 1 2 P J Stations (Pitch) P = 10 [

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

Table of Contents

Fixed 4% F .S.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Lubricant: Vaseline X12 702 ASD-FG Series Dual Speed Controller with One-touch Fittings Stainless Steel Series How to Order ASD 3 30FG 01 06 S Lock nut option Nil J Hexagon lock nut Round lock nut AS-F Body size TMH Made to Order 2 3 4 5 6 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard X12 Lubricant: Vaseline ASD With seal M5 and U10/32 are not available with seals.

VCW

(mm) Dimensions Electrical entry A B C D E G H J Z Model Grommet Conduit DIN terminal Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 63.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5 74 24 55 45.5 53 48 60 51 68 101 86.5 VV2CW4 57 25.5 28.5 30 5.5 42 20.8 41.5 81.5 26 62.5 47.5 60.5 50 62 58.5 70 103 94 17-2-59

ML1C

LP-01 ML1C LC-01 25 32 40 Series Mounting position A B ML1C 177.5 128.5 152.5 123.5 147.5 172.5 D-M5 D-M5W D-M5T Lead wire cap Lead wire clamp Auto switch 14 11 Lead Wire Clamp/Lead Wire Cap (Option) 22 22 B A Lead wire clamp Lead wire cap Series LC-01 LP-01 ML1C (mm) 25 32 40 Mounting position Series A B 124.8 148.8 173.8 ML1C 113.2 137.2 162.2 Minimum Stroke for Auto Switch Mounting Operating