,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

0.4

Stations 01 1 station When ordering a double check block, order the DIN rail mounting [-D]. 16 16 stations VVQ2000-FPG-06...6-station manifold VQ2000-FPGC6C6-D, 3set VQ2000-FPGC8C8-D, 3set Connection thread Rc 1/8 Rc 1/4 Proper tightening torque (Nm) 7 to 9 12 to 14 Bracket Assembly Double check block Part no.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Series VQ Base Mounted Metal Seal/Rubber Seal

Stations 01 1 station 16 16 stations VVQ1000-FPG-066 stations of manifold VQ1000-FPG-C4M5-D, 3 sets VQ1000-FPG-C6M5-D, 3 sets Double check block 1.10-194 VQ 0/1000 Plug Lead Unit Base Mounted Precautions Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN Model AMC A B D Dimensions (mm) Model Port size R Recommended flow (m3/min (ANR)) Weight (g) Effective area (mm2) 10 15 35 60 1 2 Flow Characteristics (Initial conditions) 1 8 AN203-02 1 4 AN303-03 3 8 25 84 25 22 AN403-04 AN103-01 0.8 or less 1.0 or less 2.0 or less 4.0 or less 1 23.5 11 3 36 16 14 17 66 22 19 AN103 to 403 1 Construction/Parts/Dimensions 0.5 Inlet pressure (MPa) Noise

7ND9071en

Ex ta II 2 G Ex ib, II 2 D Ex tb II 3 G Ex nA, II 3 D Ex tc II 3 G Ex ic, II 3 D Ex tc cCSAus: Non incendive ATEX / IECEx: II 2 G Ex d , II 2D Ex tb IIIC cCSAus: Explosion proof TYPE ND9203HE2 REV 2.4 CLASS I, DIV 1, GPS B, C, D; CLASS II, DIV 1, GPS E, F, G; CLASS III; T4...T6, ENCLOSURE TYPE 4X; Ex d IIC T4 T6, AEx d IIC T4...T6; Ex tb IIIC T100 C IP66, AEx tb IIIC T100 C IP66 CSA 08.1980091

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

CYP

Proper auto switch mounting position A B Auto switch model D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 Cylinder model CYP15 93.5 24.5 CYP32 122 33 Auto Switch Mounting When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

CYPSeries

Switches / Direct Mount Type D-Y7NW (V)/Y7PW (V)/D-Y7BW (V) Auto Switch Specifications D-Y7mW, D-Y7mWV (with indicator light) D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto switch part no.

CYPSeries

Switches / Direct Mount Type D-Y7NW (V)/Y7PW (V)/D-Y7BW (V) Auto Switch Specifications D-Y7mW, D-Y7mWV (with indicator light) D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto switch part no.

EXxx-OMW0014CN

1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01 1 Valve 18, 19 diagnostics 01 2 Valve 20, 21 diagnostics 01 3 Valve 22, 23 diagnostics 01 4 Valve 24, 25

HRX-OM-T004

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-R028

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig 3.3-2 RS-232C connector connection 3.3 Connected explanation HRSH Series 3-2 HRX-OM-R028 Chapter 4 MODBUS communication function Chapter 4 MODBUS communication function MODBUS protocol is a communication protocol developed by Modicon.

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MY CY Proper Auto Switch Mounting Position MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 93.5 24.5 -X CYP32 122 33 20Data

Table of Contents

Stations 01 1 station 16 16 stations VVQ1000-FPG-066 types of manifold VQ1000-FPG-C4M5-D, 3 sets VQ1000-FPG-C6M5-D, 3 sets Double Check block 2-4-25 Body Ported 26 Series VQ1000 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 2-9-2.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.