HRX-OM-W002

output signal 1 function RUN 1 D.OUT1 SEL 5.5.5 No.13 screen Contact output ignal 1 operation A A/B D.OUT1 TYPE No.14 screen Contact output signal 1 alarm AL.01 AL.01AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A

Table of Contents

VQ1 3 C6 Y 5 0 1 D-sub connector kit with 3 m cable VV5Q13-08FU2 1 set Manifold base no. VQ1130-5-C6 4 sets Valve part no. (Stations 1 to 4) VQ1230-5B-C64 sets Valve part no.

Serial Network

Assumptions 1. Allen-Bradley PLC 1747-L524, list price: $770 as of 10/01 2. Allen-Bradley I/O card 1740OB, list prices: $280 as of 10/01 3. Allen-Bradley Scanner module 1747 SN, list price: $995 as of 10/01 4. Wiring costs are estimated at $10/point and $100/node for SI system. Your costs may vary. 5.

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): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 1/8, Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 01 (1/8), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

= 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

Vacuum

9P Applicable lube O D oP t'j oA l:M5x0 8 l:[t6x1 . gL D E D I E R(FB 6 7 2 5 20 25 71 5 3 3 9.1 4 I I 4 7 1 0 . 1 Tube Applicable tube o.D. 6P R sS q4 4 20.615.61 0 . 4 s6 6 2 1 . 6 16.6 12.8 Tube Applicable tube O.D o P o4 4 1 5 . 8 1 1 0 . 4 s6 6 24.316.81 12.8 Pad Diameters o1O. @13. @16 68 I 18.7 | 15.2 Bellows type Pad Diameters @4O. @5O Fr4q!

SMC Electronic Switch Series Variations

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

Nozzle Type Ionizer

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

connector (2 m) Lead wire with connector (2 m) + Connector cover (Silicone rubber) Symbol OUT1 OUT2 A NPN NPN B PNP PNP C NPN Analog 1 to 5 V Analog 0 to 10 V*3 ZS-33-D ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

EX500-GPR1A.eng

SI unit for VQC/S0700 series valves ( EX500-Q 01 ) 1. SI unit for SV series valves ( EX500-S 01 ) ( EX500-Q 02 ) PWR PWR COM COM 64.4 80.3 64.4 28 66 84.8 79.4 68.5 80.3 series 54.5 60 60 43.2 43 43.2 22.2 22 22.2 13 10.5 28.6 44 0 1 36 10.5 1 0 22 23 The mounting and removing methods of SI unit are as shown below.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VQ Example: SS3YJ7-20-03 .1 pc.(Manifold base) SYJ712-5LZ-01 .2 pcs. (Valve) SYJ700-10-2A .1 pc. (Blank plate ass'y) VQZ SS3YJ7-42R-03-01 .1 pc. (Manifold base) SYJ714R-5G .2 pcs. (Valve) SYJ700-10-2A . .1 pc.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

HEC-OM-S008

01 03 0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][

C95Series

I>-AG A66I Grommet Reed type D-A59W Grommet (2 color indication) , . D-A44 Conduit , _;-c' I>-F5CJ51!:1 Grommet D-F5i!