HEC-OM-S008

0040 0001 BB [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0041 Reading external Sensor temperature 1 :01 03 0041 0001 BA [CR][LF] :01 03 02 09E1 10 [CR][LF] Answer 25.29 deg.C. 0043 Reading status 1 :01 03 0043 0001 B8 [CR][LF] :01 03 02 0005 F5 [CR][LF] Run with alarm 0044 Alarm flag 1 1 :01 03 0044 0001 B7 [CR][LF] :01 03 02 8000 7A [CR][LF] ERR15 :01 06 0050 0 A9 [CR][LF] :

I

www.stevenengineering.com I 7.24 INSTRUMENTATION ELECTRO-PNEUMATIC REGULATOR D I M E N S I O N S S E R I E S VY140 0 102 03 04 D I M E N S I O N S S E R I E S VY150 0 102 03 04 D I M E N S I O N S S E R I E S VY170 0 110 12 D I M E N S I O N S S E R I E S VY190 0 114 20 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 !

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

2 u r e q w No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Soft Start-up Valve AV2000/3000/4000/5000 1

4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-

Series IDG

and 50HM are 03 only.

AR Series Modular Type Regulator

r q w w Component Parts No.

E-P HYREG

00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Symbol Base mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 3(R) 1 4 1 1 2 2(A) 1(P) 9 2 2 Note

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Symbol Body size Symbol Standard characteristics Symbol Port size Without sub-plate Rc 1/4 Rc 3/8 1 2 3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate

Soft Start-up Valve AV2000/3000/4000/5000

R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Applicable cylinder bore size (mm) AS121-M5 Model Port size 4 6 8 10 12 M5 x 0.8 6, 10, 16, 20 Construction 1 8 AS221-01 R 20, 25, 32 1 4 AS221-02 R 20, 25, 32, 40 3 8 AS321-03 R 40, 50, 63 1 2 AS421-04 R 63, 80, 100 Note) marking is electroless nickel plated, provided as standard.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04

Electro-Pneumatic Valve NVEP/NVEF Series

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

NVEPA|VEFseies

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

VHS400-02 VHS401-02 VHS400-03 VHS401-03 VHS400-04 VHS401-04 VHS500-06 VHS501-06 Pipipng direction Port size 3 4 1 2 3 8 1 4 1(P) 2(A) 21 105 76 54 35 35 57 93 Effective area (mm2) Mass (kg) 2(A) 3(R) 0.25 0.34 The front face of the handle is the reference position. Easy to Operate The direction of air flow can be verified at a glance by the orientation of the handle.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

0 o u r t !1 q i !2 e !

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Type 20 (5 Port/Body ported) SS5YJ520P 05 A, B port Applicable blanking plate assembly SYJ5000-21-3A A A B A P, R port thread type P port 1/8 B Number of stations A B B 03 3 stations Nil 00F 00N 00T Rc G NPT NPTF : : Applicable connector assembly Refer to page 35. 12 12 stations R port 1/8 Type 41P (5 Port/Base mounted) How to Order SS5YJ541P 05 M5 A A B A, B port M5 x 0.8 A P, R port thread