Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

JXCx-OMX0009

Brown 2 A B-1 A A-1 Red 1 Cable lehgth (L) Orange 6 B B-2 8 8m B A-2 Yellow 5 Green 3 COM-A/COM B-3 A 10m COM-B/ A-3 Blue 4 B 15m Shield (3) Cable color Terminal No. C 20m Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 produced upon recipt of A A-5 Black 6 order B B-6 Orange 9 B A-6 Black 8 Only Robotic type cable 3 can be selected.

SQ1000/2000

SUP/EXH block Note 1) SSQ1000-PR-3-C8-(S) Back pressure check valve Note 2) SSQ1000-BP SUP block plate SSQ1000-B-P EXH block plate SSQ1000-B-R Port plug Note 3) P R A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B Note 4) C3 (N1) With 3.2 (1/8") One-touch fitting C4 (N3) With 4 (5/32") One-touch fitting C6 (N7) With 6 (1/4") One-touch fitting

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

10 stations A, B P , EA, EB Symbol 04 06 Thread type Symbol 1 2 Nil Rc 3 4 3 4 Passage Porting specifications (A, B) EA, EB P G F Symbol M Mixed N NPT For bottom ported: 1/2 only.

HRX-OM-M090

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

Flow Control Equipment

AQ340F-06 04 06 06 4.3-3 4.0-2 Precautions Be sure to read before handling.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note

20

No cracks, breaks or other damage occurred in a drop test from a 2-meter height or in a human stomp test.

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A B C A B A B A B A B Application Same tubing size 1 2 1 2 1 2 3 1 2 1 2 1 2 Refer to the applicable tubing table.

90

size: 4 Inch size: 5/32" 3.5 38.5 A 16.5 1 Suction filter 15 Vacuum (V) port 78.8 A C V port type 06 08 07 09 6 8 1/4" 5/16" 8.25 11.4 10.8 11.4 4 6 4.76 6 1 Refer to page 22 for dimensions with a bracket mounted.

KN Series Nozzles for Blowing

High efficiency nozzle/KNH (mm) Model Nozzle size D Connection thread L1 A Width across flats H1 Connection thread Weight (g) KNH-R02-100 KNH-R02-150 KNH-R02-200 1 1.5 2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 38 38 38 D H1 A L1 Reference dimensions after R thread installation. The air blow thrust is improved by 10%.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

band (except D-A9V and M9V), a rail, a tie-rod or a square groove when auto switch mounting brackets are used.

IIIIIII

(kg) 5.73(2.6) P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.1 38 (3.5) DIUENSIONS A B t c D E F G H J K M N P R 1.38 (35) ).s812.38 '25) 160.s 2.09 t53) 1.42 (36) 0.53 13.5', 0.7',!

Mechanical Valves Series NVM, NVFM, NVZNI

(kg) 5.73(2.6) P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.08 (2) T.T.ln(mm) 0.1 38 (3.5) DIUENSIONS A B t c D E F G H J K M N P R 1.38 (35) ).s812.38 '25) 160.s 2.09 t53) 1.42 (36) 0.53 13.5', 0.7',!

C95

9 i *1 *1 C95K32 A A-A A !2 !

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

SMC B 19 19 23.5 23.5 D C 4 6 6 8 A 60 60 68 68 04 06 06 08 17 17 21 21 ZFC100A X17 Width across flats C ZFC2001115 Series ZFC Specific Product Precautions Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions. Selection Handling of One-touch Fittings 1.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

10(S)A 10 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS33l1FG-02-12(S)A 12 18.5 42.5 28.3 64.7 17 48 (48) AS33l1FG-03-06(S)A 6 11.2 12.9 16.6 20.2 36 21.4 57.8 AK 1/4 19 50 48.4 44.5 42.9 VCHC 13.3 32 (33) AS33l1FG-03-08(S)A 8 13.2 37.1 23.5 52.2 14.2 33 (34) AS33l1FG-03-10(S)A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 37 (38) AS33l1FG-03-12(S)A 12 18.5 42.5 28.3 57 17 38 (39) AS43l1FG-04-10(S)A