Body Size: 20, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 02 (1/4), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 40, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 02 (1/4), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: Standard, Attachment: Standard, Semi-Standard 1: 3 (Lubricator w/Drain Cock, Exhaust Port), Semi-Standard 2: Standard

Body Size: 20A, Thread: Rc (Rc: for Sizes 20, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: Standard, Attachment: Standard, Semi-Standard 1: 3 (Lubricator w/Drain Cock, Exhaust Port), Semi-Standard 2: Standard

Table of Contents

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

Table of Contents

3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

AC

A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1

Micro Mechanical Valve Series VM1000

OFF 45 ON Max. 6 38 24.5 Symbol 3 port (A) 2 (A) 2 1.5 3 1.5 28 82 (110) 12 12 1 (P) R port (5 port only) 5 port (A) 2 (A) 2 12 12 1 (P) 3 (R) 3 (R) 32 16 40 R port (5 port only) 3 x 1/4 53.2 25 25 * 0.5 MPa supply 63.5 F .O.F .* 40 N T.T. 45 Foot pedal VM220-02-40A VM230-02-40A 3 x 6.5 mounting hole Symbol 2 port 54 71 (A) 2 152 12 10 159 1 (P) 177 3 port (A) 2 1/4 2(A) T.T. 12 10 1 (P)

CATALOG

1 Drain Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT

Table of Contents

) LVH A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations LVD 02 2 stations LVQ 05 5 stations LQ LVN How to Order Valve TI/ TIL LVA 2 0 02 C A PA PAX Option Body class Nil 1 4 Symbol 2 3 4 5 None With flow rate adjustment With indicator Body class 2 3 4 5 Orifice dia. 4 8 12 20 PB Valve type 0 1 2 N.C.

VM

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

AS

1F-02-03(S)A 5/32" 8.2 13.3 17 1/4 12.6 36.6 35 31.1 29.5 AS22;1F-02-07(S)A 1/4" 11.2 23.4 32.5 (32.8) 22.6 19 (19) (17.5) AS22;1F-02-09(S)A 5/16" 13.2 23.9 33 (33.3) 14.2 19 (20) AS22;1F-02-11(S)A 3/8" 15.5 26.4 35.5 (35.8) 15.6 20 (21) AS32;1F-03-07(S)A 1/4" 11.2 21.8 32.1 13.3 28.7 31 (32) 3/8 15.6 42.3 40.7 37.1 35.5 19 AS32;1F-03-09(S)A 5/16" 13.2 22.7 33 14.2 AS32;1F-03-11(S)A 3/8"

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 R R 4 A 4 A 4 A 4 A 18.8 3/5 3/5 18.8 18 4 A 4 A R R 4 A 4 A 4 A 4 A 3/5 3/5 39.3 40.1 4 A 4 A 39.3 63.3 79.8 SJ 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" 1/4, 3/8 [4 (A), 2 (B) port] SY SV One-touch fitting

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

5-Port Solenoid Valve

r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) 3-position pressure center 2(B) (A)4 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) (EA)5 1 (P) 3(EB) Component Parts No.

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

with 02 2 stations "-02T' is l/S" P,A,B bottom and 1/4" A,B side.

VM

One way roller lever VM220-02-02 VM230-02-02 VM220-02-02S VM230-02-02S JIS Symbol 2 port 17 polyacetal or hard steel roller 3 port EXH port (3 port only) 0.5 MPa supply 7.0 mm P.T. 22 N F.O.F. 5.0 mm O.T. 2-5.5 mounting hole 12.0 mm T.T.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW VP4 9 B B B B B S0700 23 SMC SMC SMC SMC 42 VQ 63.5 VQ4 1 2 3 4 5 6 7 n Stations D side U side 1(P), 5(R3), 3(R1) 6 x Rc 1/2 VQ5 Manual override VQC SMC VQZ 150.5 141.00 SQ 115.5 A A A A A A A 91.5 74.00 VFS 58 18 14 B B B B B B B VFR 3 3 3 4(A), 2(B) port 2n x Rc 3/8, 1/2 30 43 62.5 VQ7 EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100B04A) for the unused