0.4

e q w VQ1100 VQ1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4

0.4

e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2)

Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball AXT625-3A-10 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Compact Cylinder

+ Stroke B + Stroke A + Stroke A + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 x 0.8 VQD1151-M5 0.06 0.31 0.22 0.05 0.10 0.22 0.07 Base mounted (With sub-plate) U W VQD1151M5 0.28 0.27 0.07 0.25 0.27 VQC Construction SQ Component Parts JIS Symbol VQ0 (A) 4 (B) 2 No q w e r t y u i o !

Table of Contents

J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H -1 -2 -6 -8 -C -J -N -R -W -Z With bracket (With set nut) Float type auto-drain (N.C.)

REA/REB

8 Stainless steel Wear ring B Special resin Cylinder tube w !

REA/REB

MVGQ Calculate (WA) from the formula for the tentatively determined bore size Review of bore size, stroke and Lo W > WA CC RB W WA (Refer to data (B) on page 10-2-28.)

LJ1H

Non-standard motor switch Motor output: 100W H B 8mm 12mm Nil W None N.C. (B contact) 2 pcs.

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Battery-less

3 A-A B B @1 !8 B-B w Component Parts No. Description Material Note No.

SQ1000/2000

5 1 3 (R1) (P)(R2) u u SQ1531 SQ1530 (A) (B) 2 4 (A) (B) 2 4 5 1 3 (R1)(P)(R2) 5 1 3 (R1) (P)(R2) Dual 3 port valve: SQ1 31 A B C SQ1A31 Parts list 4 2 y e e q w w No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

5 Port Solenoid Valve

(Tool required) 2(B) (A)4 1 e Function B A 1 (P) (R1) 5 3 (R2) Nil Standard (0.4 W) Quick response type (0.95 W) High pressure type (145 psi (1.0 MPa), 0.95 W) B 2-position double (Metal) 2(B) (A)4 K Note 2) B: Locking type (Tool required) N Note 3) Negative common External pilot 1 (P) (R1) 5 3 (R2) R Note 4) 2 2-position double (Rubber) B A Note 1) When two or more symbols are specified

AC Servo Motor Driver (CC-Link Type ）

(b) Connection of driver and servo motor 1) The servo motor power supply terminals (U, V, W) of the driver match in phase with the power input terminals (U, V, W) of the servo motor. Servo amplifier Servo motor Driver U U V V M W W 2) The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

CRB2/CRBU2/CRB1

B S 90 Standard 90 W B S R73 CDRB1 80 With auto switch Number of auto switches S Nil 1 pc.

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

AC Servo Motor Driver (CC-Link Type ）

(b) Connection of driver and servo motor 1) The servo motor power supply terminals (U, V, W) of the driver match in phase with the power input terminals (U, V, W) of the servo motor. Servo amplifier Servo motor Driver U U V V M W W 2) The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).