5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

override PE port SJ 68 44 SY 22.5 14.5 8.5 14.5 79 75 40.5 63 PE 126.5 101 A A A A A SETTINGS 119.5 119.5 SV 1 0 R1 EA EB MOD/NET PWR MODEL SQ (SI No.EX124-SDN1) 150.5 158 SMC P R2.7 SYJ R2 B B B B B TM SZ 5.4 16.5 VP4 L1 30.5 L2 S0700 38 VQ 1 2 3 4 5 6 7 8 n Stations D side U side VQ4 VQ5 VQC 123.5 SMC SMC SMC SMC SMC VQZ 88.5 B B B B B B B B SQ 47 37.5 A A A A A A A A VFS 2 11.5 9 37.5

Rotary Actuator/Vane Style Series CRB1

Load voltage Lead wire length (m) No Yes Yes Indicator light Wiring (Output) Auto switch model Type Electrical entry Applicable load DC AC 0.5 (Nil) 3 (L) None (N) 5 (Z) Grommet T79 2-wire 12 V Connector Relay, T79C Solid state switch 24 V PLC S79 3-wire (NPN) IC circuit Grommet 5 V, 12 V S7P 3-wire (PNP) Grommet 100 V R73 Relay, Connector R73C Reed switch 2-wire 24 V PLC 100 V or less Grommet

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Relay, PLC 12 V Yes Yes 24 V (B54) B54 100 V, 200 V 2-wire C73C 12 V Diagnostic indication (2-color indication) PLC (B59W) B59W Grommet G79 K79 K79C 3-wire (NPN) H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 5 V, 12 V IC circuit Grommet 3-wire (PNP) 12 V 2-wire Connector 3-wire (NPN) G59W G5PW K59W 5 V, 12 V Relay, PLC IC circuit Diagnostic indication (2-color indication) 24 V 3-wire

Air Slide Table Series MXW

, D-A93 (V), D-A96 (V) Stroke (mm) Model 300 250 275 50 75 100 200 225 25 125 150 175 A 31.5 27.5 27.5 52.5 27.5 27.5 B 100.5 125.5 150.5 79.5 175.5 200.5 B A MXW8 W 11.5 7.5 7.5 32.5 7.5 7.5 V 120.5 145.5 170.5 99.5 195.5 220.5 A 51 31 31 31 31 B 104 124 149 174 199 MXW12 W 31 11 11 11 11 V 124 144 169 194 219 W V A 34.5 34.5 59.5 34.5 34.5 34.5 B 235.5 260.5 135.5 160.5 185.5 210.5 MXW16

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

ZR

(for replacing filter element etc.) on side mounting. 1 Ejector Adapter C Bracket B Bracket B Rc 1/8 V port (Vacuum port) Nozzle dia./1.8, 2.0 mm Note) 1 Dimensions for mounting bracket B ZR1 1-K1M18 20 2 Dimensions for mounting spacer B Bracket B part no. : P3270154 (Standard accessory) Spacer B part no. : P3270157 Manual override 1 Dimensions not indicated are identical to the top drawing

NCM

Note 2) When setting an auto switch, confirm the operation and adjust its mounting position. 49 Series NCM Auto Switch Proper Mounting Position and Its Mounting Height (Double rod) D-M9(V)/M9W(V) D-A9(V) HS HS 0.66 0.66 A 0.88 B A 0.88 B (0.98) ( ):D-A93 HS D-C7/C8 0.66 HS A 0.88 B 0.63 1.02 A B D-H7/H7W/H7NF/H7BAL D-B5/B6/B59W HS HS 0.96 SMC SMC 0.63 1.30 A B B A (1.42) 1.14 D-G5NTL

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

12 V Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) 2-wire 12 V Yes No Yes No 100 V Reed auto switch Relay, PLC IC circuit 100 V or less Grommet 24 V 2-wire 12 V 100 V, 200 V 200 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid

Large Size Vacuum Module: Series ZR

pressure supply port (PS) Filter block Spacer A Valve unit 84 2 x 4.2 (Mounting hole) Rc 1/8 PV port Air pressure supply port(PV) A 2 2 1.2 1 Adapter C Ejector Bracket A Bracket A Rc 1/8 Vacuum port (V) A: Release flow rate adjusting needle with lock nut ZR1 1-K1M-D10 13 15 7.2 1 For port exhaust 9 (Needle fully open) Exhaust (EXH.) port Rc 1/8 A A B B A A B B S S A A B B 73 Digital pressure

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32

•

(NPN) b-v G39 1 e , i,,",, 2-wi," K39 -1 i DiagnostiC Indication I'" 3-~,e (NPN) 1 5V, 12 \ M9NW Relay, PLe 3-w", (PNP) It . ~ .. (2-ColOr indication) 2-~-,"24 V I ( ~ .' Grommet , , 3-wi,.

Air Slide Table Series MXS

5 V, 12 V 12 V Reed switch Solid state switch Relay, PLC Grommet Yes 24 V 5 V, 12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V Yes (NPN equivalent) 24 V Grommet Relay, PLC A93V A90V A93 A90 100 V 12 V 2-wire No 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches

Electric Actuator

Weight [g] D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch model 8 8 7 0.5 LECS; 14 14 13 1 Lead wire length Auto Switch Internal Circuit (m) 41 41 38 3 D-M9NW/M9NWV 68 68 63 5 DC (+) Brown How to Order Main circuit OUT Black of switch D-M9 N W V L Specific Product Precautions Series Lead wire length DC () Blue Nil 0.5 m 1 m 3 m 5 m Wiring/Output type M D-M8PW/M9PWV Electrical entry N P B 3-wire

Precautions 1

(PNP) 2-wire 4-wire (NPN) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V 12 V 5 V, 12 V Grommet With diagnostic output (2-color indication) IC circuit IC circuit 3-wire (NPN equivalent) A96 5V Yes A93 A90 B54 B64 C73C C80C B59W 100 V Grommet 100 V or less IC circuit None Yes 100 V, 200 V Relay, PLC 12 V 2-wire 24 V 200 V or less None Yes Connector DIC circuit 24 V or

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

However, always use the positive COM with the "Z" type, since valves will not be actuated when the negative COM is used. 1.2-94 Base Mounted Type SY9000 Type43P SY9000: SS5Y9-43PStations D -02, 03, C8, C10, C12-(D)-Q Scale: 25% For external pilot specification 11 18.3 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 (Indicator light/Surge voltage suppressor) 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 SV

CHKD/CHKG

CHKGL--XC63 155, 160, 165, 170 Stroke Bore size (mm) 55, 60, 65, 70 80, 85, 90, 95 105, 110, 115, 120 130, 135, 140, 145 LA B Z LA B Z LA B Z LA B Z LA B Z 32 166 131 147 191 156 172 216 181 197 241 206 222 40 183 140 160 208 165 185 233 190 210 258 215 235 283 240 260 50 196 145 169 221 170 194 246 195 219 271 220 244 296 245 269 63 215 152 182 240 177 207 265 202 232 290 227 257 315 252

Compact Cylinder Series CQS

(PNP) 2-wire IC circuit 5 V, 12 V Solid state switch Reed switch 12 V IC circuit Diagnostic indication (2-color indication) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit Water resistant (2-color indication) 5 V, 12 V 12 V 3-wire (NPN equivalent) A96 A96V IC circuit 5 V Yes 24 V Grommet A93 A90 A93V A90V 100 V Relay, PLC 2-wire 12 V No 100 V or less IC circuit DSolid state auto

Compact Manifold Regulator Series ARM5

VY2 17 VBA VBAT AP100 513 Series ARM11A/B Pressure Switch Block 56 ARM11AW Z A 0.6 0.2 0.4 MPa 20 24 56 q w 0.5 0.1 0.3 1. Accessory 2.

SX

0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with shielding Type 3 ground Type