Vacuum System Peripherals:

D 6 N ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com r Stations ZL Indicate ejector/valve, etc for X. (When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

AC Servo Motor Driver (CC-Link Type ）

. output 8 PT7 RY(n 2)9 Reserved RX(n 2)A RY(n 2)A Position/speed specifying system selection to Reserved RX(n 2)F selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Trouble ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F RY(n 3)B to Reserved

LJ1H

Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 5.2 200 6.0 300 6.8 400 7.5 500 8.3 5 to 40 (with no condensation) 10 74 600 mm kg C kg N mm/s mm Standard stroke For manufacture of strokes other than the standard strokes on the left, add "-X2" at the end of the part number.

RHC

There may be the case it will vary substantially depending on an ambient environment. 15 + 50 ( ) CE2 n2 2 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n2) ML2B 20 + 50 ( ) n2 2 D-B59W 15 20 75 (n = 2, 4, 6, ) C J G5-S D-A3 D-A44 D-G39 D-K39 CV 10 35 100 100 + 100 (n 2) 35 + 30 (n 2) MVGQ CC Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches 32 40 50 63 80 100 2 (Same surface) 50 D-M9l D-M9lW 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-M9lV D-M9lWV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 55 50 D-M9lA 1, 2 (Different surfaces) 15 10 n 15 + 40 (n 2) 10 + 40 (n 2) 2 (Same surface) 40 D-M9lAV 1,

V100

U side 1 2 3 4 5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2 = n x 7.2 + 18.4, n: Stations (maximum 20 stations) n L 12 101.2 104.8 19 151.6 155.2 2 29.2 32.8 3 36.4 40 4 43.6 47.2 5 50.8 54.4 6 58 61.6 7 65.2 68.8 8 72.4 76 9 79.6 83.2 10 86.8 90.4 11 94 97.6

Table of Contents

(N specifications) Maximum operating pressure 1 MPa max.

Cylinder with Lock Series CNS

(same side) (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 BT-12 BT-12 BT-16 F5W/J59W/ F5BAL/F5F n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs.(different side, same side), 1 pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 155 35 145 D-A3/A4/G39/K39 BS1-125 BS1-140 BS1-160 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

Cylinder with Lock Series CLS

(same side) 25 + 55 125 + 55 135 + 55 BT-12 BT-12 BT-16 F5W, J59W, F5BAL, F5F n = 2, 4, 6, 8 ... n = 4, 8, 12, 16 ... n = 4, 8, 12, 16 ... 2pcs. (different side, same side), 1pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 35 145 155 BS1-125 BS1-140 BS1-160 D-A3, A4, G39, K39 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

7

A SMC IN OUT VXZ VXS 8 x 18 VXB F S D Q VXE VXP U V E G1/2 Cable 6 to 12 DIN terminal C VXR (44) 31.5 VXH VXF R VX3 T VXA A SMC IN OUT N B 8 x 18 S Q D F (mm) Model Grommet DIN terminal Electrical entry Applicable flange A B C E F N Q R S D U T 90 (98) V U T 168 (176) 67.5 82 (90) 90.5 (98.5) 96 (104) 7 E VXD2 32A 29.5 67 35 160 55 22 51.5 135 12 100 36 98.5 (106.5) 104 (112) 179.5 (187.5

CLA

Center trunnkH1 _Hell No. of Auto ..tteh 0 ASA6 O-FSJS MinImum auto switch mounting strokes are as follows due to the space necessary to mount il. model I:: _.oSO . .,00 I ~ D-A5 With 2 switches (WIfen switches 15+55'1f.Zi 9D+55 J OO;.SSO-yI 110+55'1'fl 1 20;.55~ [).JS (same sur1ace) n"I ,2,3.4 ... n = 4.81 2"" n ..4 .B .1

CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

Air Slide Table

44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4 6 8 8 8 HA 55 55 55 65 80 65 88 132 132 Model F 55 46 55 65 75 60 48 60 65 GA 23 23 23 23 32 72 88 97 122 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 MXQR2510 MXQR2520 MXQR2530 MXQR2540 MXQR2550 MXQR2575 MXQR25-100 MXQR25-125 MXQR25-150 Note) Note) Note) Refer to the bottom view of the MXQR25-75. 18 Air Slide Table/Reversible Type Series MXQR Note 1

Clamp Cylinder with Lock Series CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

Membrane Air Dryer

P Q R Model S T IDG6055 31 9 15 276 262 26 Series IDGN SMC SMC SMC 2 SMC 202 60 Port size 1/8, 1/4 119 41.5 30 Dew point indicator (Option: S) 5.5 29 24 24 67 OUT IN 10

Series SV

SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2

ZP

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type.

CQM

30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x

Electric Actuator

Motor Servo Motor (24 VDC) Controller Controller E ProgramlessType E AC Servo Motor Controller E Step Data InputType New New New New New New Series LECSA/LECSB Series LECP6/LECA6 Series LECP1 N Pulse input type N Absolute encoder (LECSB) N Built-in positioning function (LECSA) N 64 positioning points N Teaching box, controller setting kit input N 14 positioning points N Control panel setting

Guide Cylinder Series MGG

Same surface Same surface D-A9 D-M9 D-M9W 10 note) 45 45 + 45 (n-2) D-C7 D-C80 10 50 50 + 45 (n-2) D-H7 D-H7W D-H7BAL/H7NF 60 + 45 (n-2) 10 60 D-C73C D-C80C D-H7C 65 + 50 (n-2) 10 65 D-B5/B64 D-G5/K59 D-B59W 75 + 55 (n-2) 10 75 D-B7/B80 D-G79/K79 50 + 45 (n-2) 10 45 Note) For cylinders with 2 auto switches D-A93/M9/M9W.