High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 M5 x 0.8 M3 x 0.5 10.5 16 M6 x 1.0 M4 x 0.7 11.5 20 M8 x 1.25 M5 x 0.8 13.5 25 M10 x 1.25 M6 x 1.0 16.5 30, 40 M14 x 1.5 M8 x 1.25 22.5 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable snap ring Part no.

REA/REB

Type REBH Order Made Auto Switches 79 Series REBH Dimensions/25, 32 Dual axis type/REBHT LL 138 4-M thread depth MM PA XB PB 2-Rc 1/8 LW S + Stroke EB EA HC HP NL HG HT HA H HB NT PP PS N A Z + Stroke W Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J LL LW M MM N REBHT25 REBHT32 125 28.5 79 63 46 46 61.5 19.5 58.5 35 M6 x 1.0 56 119 M6 x 1.0 10 20.5 30 90 75 52.5

New

C 110 VAC J 6 one-touch fitting 1/8 3 D 200 VAC K L 13/64 5 Resin E 230 VAC 5/64 2 M N 8 one-touch fitting 1/8 3 F 24 VDC 13/64 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H 5/32 4 H 100 VAC 1/4 9/32 7 J 110 VAC Aluminum 5/32 4 3/8 K 200 VAC Single 9/32 7 2 Size 2 Unit L 230 VAC 5/32 4 N.C. 8 one-touch fitting J L 9/32 7 M Conduit terminal 24 VDC Resin With surge voltage

SYJ3000/5000/7000

Note) Do not replace SV111 (G, H, L, M, W) to SV115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 1-5-30 31 5 Port Solenoid Valve Rubber Seal Series SYJ5000 2 Position Single [ ]: AC G H Grommet (G), (H): SYJ5120-M5 With bracket SYJ5120-M5-F G H 37 30 3.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 2-3.5 (For mounting) 63.1 [65.3] 41 19.5 18 25 + SV 19.7 11

Table of Contents

(H) (J) F E Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (K) L IDG30V/50V IDG30HV/50HV IDG30LV/50LV/60LV/75LV/100LV IDG60SV/75SV/100SV A B C (G) D IN OUT M (H) E (J) F HA With float type auto-drain Drain Discharge With drain guide AT ID (H) (H) AMG N.C.: Gray N.O

Integrated Controller

H A B C H A B C 16 25 32 16 25 Rod flange: EQY H -F Head flange: EQY H -G LL FV M FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.

CM2

20 75 8 41 20 33.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 120 40 10 15 30 62 22 13 41 7 4 60 25 75 8 45 26 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 122 40 12 15 64 22 13 41 7 4 60 32 75 8 45 26 21 47.3 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 154 52 14 88 24 16 45 7 5 66 40 36 82 11 50 32 With rod boot (mm) ZZ Symbol h l Stroke f e Bore 1 to 50

5 Port Solenoid Valve SY Series

Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075

Auto Switch Guide

L D-A73 (Example) CLQ Lead wire length MLGP 5 m None Nil L 0.5 m 3 m Z N RLQ Applicable for the connector type (D-C) only.

CLQ

Knuckle pin (common with double clevis pin) Rod end nut d d Dd9 C m l L t m t H B Material: Carbon steel Material: Rolled steel (mm) (mm) Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l Part no.

Compact Hydraulic Cylinder

(M) -45D (M) x 110L 110 135 x 135L -50D (M) -50D (M) x 115L 115 140 x 140L -75D (M) -75D (M) x 140L 140 165 x 165L -100D (M) -100D (M) CHQWB100-10D (M) x 165L 165 190 x 190L CHQWB40-5D (M) CQ-M5 x 75L CQ-M10 x 105L 75 105 -15D (M) -10D (M) x 80L 80 x 110L 110 -20D (M) -15D (M) x 85L 85 x 115L 115 -25D (M) -20D (M) x 90L 90 x 120L 120 -30D (M) -25D (M) x 95L 95 x 125L 125 -35D (M) -30D (M

Compact Cylinder with Lock Series CLQ

Knuckle pin (common with double clevis pin) Rod end nut d d Dd9 C m l L t m t H B Material: Carbon steel Material: Rolled steel (mm) (mm) Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l Part no.

SMC

0.5 30 32 Z ZZ (NN1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN-M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5

MXS

MY1 (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 M 71 71 71 83 103 149 203 GA 15 15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA 2 2 2 2 2 4 4 Refer to "Dimensions

Air Pilot Operated Series NVSA

LIST h. o.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

W H T U Pin no. n LEC-CSNA-1 39 37.2 12.7 14 14 773 LECY M U Series Options cable type M LEC Y C 1 Cable length (L) Motor type Y AC servo motor L* 0.2 m J 0.5 m 1 1 m 3 3 m Cable description M MECHATROLINK-2cable U MECHATROLINK-3cable * Not available for the MECHATROLINK2cable. * LEC-CYM-l is JEPMC-W6002-ll-E manufactured by YASKAWA CONTROLS CO., LTD. * LEC-CYU-l is JEPMC-W6012-ll-E manufactured

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

MHZ

Weight (g) End boss type (Symbol) Model W K M E 70 70 70 70 MHZJ2-10 165 165 165 165 MHZJ2-16 290 290 290 290 MHZJ2-20 525 525 525 525 MHZJ2-25 12-2-52 52 Auto Switch Series MHZ Auto Switch Hysteresis Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc.

Compact Cylinder with Air Cushion

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Carbon steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.