5

Installed state Shortened installation width Reduced width for short pitch mounting (mm) Compact foot type width A (mm) Current foot type width B (mm) Bore size (mm) 1 unit 2 units 3 units 12 16 20 25 32 40 50 63 80 100 25 44 19 38 57 29 48 19 38 57 36 62 26 52 78 40 66 26 52 78 A 45 71 26 52 78 Current model 52 78 26 52 78 64 95 31 62 93 77 113 36 72 108 98 140 42 84 126 117 162 45 90 135

ZP

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

Table of Contents

3 3 3 MHY MHW MRHQ Direct mounting type Misc.

1

121 5 147 21 48 8 58 3 138 6 NCA 170 26 59 9 66 3 158 8 170 26 9 3 72 66 158 10 DOther dimensions are the same as double acting, single rod, standard type.

CL

3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Y L2 N LQ2L2A-F LQ2L2B-F LQ2L2C-F LQ2L2D-F LQ2L2E-F LQ2L2F-F LQ2L3A-F LQ2L3B-F LQ2L3C-F LQ2L3D-F LQ2L4A-F LQ2L4B-F LQ2L4C-F LQ2L4D-F LQ2L5A-F LQ2L5B-F LQ2L5C-F LQ2L5D-F 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 18.5 1/8" 24 38 18 19.9 19 21.5 1/4" 26 43 42.5 43 42.5 52 51 52 51 59 58 59 58 21.5 1/4" 28 24 26.2 22 25 3/8" 25 3/8" 50.5 21

Micro Mechanical Valve Series VM1000

) 1 (P) (74.1) 3 port (A) 2 52 22 13 32 12 10 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 40 30 25 * 0.5 MPa supply F .O.F .* 52 N T.T. 6.5 mm 17 2/3 Port Mechanical Valve Series VM200 Series VM200 Push button (Flush) VM220-02-33A VM230-02-33A Panel mounting hole 38 23 T.T. 1.5 3 1.5 16.5 R port (3 port only) Max. 6 Symbol 2 port 22.1 (A) 2 (90.6) 12 10 (74.1) 1 (P) 52 3 port 22 13 (A)

CL

3 !4 !5 !6 !7 !8 !

Free Mount Cylinder

F9PWV F9BWV 2-wire Relay, PLC IC circuit 100 V or less No 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Grommet Relay, PLC Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

V100

N.O. 112 (55) (X port) (Rc1/8) (R port) Rc 1/2 40 (For mounting) 2-8.5 24 162.2 52 V100 (32) 3(R) 3(R) 3(R) 3(R) 48 86 1(P) 1(P) 1(P) 1(P) MAX.10 D: 173.4 Y: 172.9 SY 162.2 MAX.10 173.4 163 52 (P port) Rc 1/2 SYJ VK (Pitch) 300 Pg9 119.7 129.7 Pg9 Y: 131.7 148.7 (Non-locking) Manual override 41 37 (Lead wire length) 8 L2 129.2 139.2 124.2 134.2 D: 129.7 146.7 L1 VZ Applicable lead wire O.D

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Refer to pages 3-3-37 to 3-3-52 for manifold use. Combinations of Solenoid Valve and Gasket Round head combination screw M2.5 x 25 (With spring washer) Made to Order Specifications (For details, refer to page 3-3-85.)

High Purity Fluoropolymer

H E L1 M N L2 LQ2L2A-F LQ2L2B-F LQ2L2C-F LQ2L2D-F LQ2L2E-F LQ2L2F-F LQ2L3A-F LQ2L3B-F LQ2L3C-F LQ2L3D-F LQ2L4A-F LQ2L4B-F LQ2L4C-F LQ2L4D-F LQ2L5A-F LQ2L5B-F LQ2L5C-F LQ2L5D-F 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 24 1/8" 38 18 19.9 19 26 1/4" 43 42.5 43 42.5 52 51 52 51 59 58 59 58 1/4" 28 24 26.2 22 3/8" 50.5 3/8" 30 33.1 21 28 54

CQS

3 20 20 CQSB20-S-PS CQSB20-T-PS 25 25 CQSB25-S-PS CQSB25-T-PS Seal kit includes !3. Order the seal kit, based on each bore size. Seal kit includes !2, !3, !4.

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

LJ1H

X70 200 2 A 1 F P K 3 LJ1H30 Vertical Mount Specification Dust seal specification Motor specification Stroke Refer to Table below.

Table of Contents

(Refer to page 13-3-37.)

CQS

NPN) 5V A96V A96 IC 3 wire (NPN) F9NV F9N 3 wire (PNP) F9PV F9P Mounting Bracket Part No.

MGP

MB MC (Width across flats) MGPM, MGPL Common Dimensions (mm) MD Bore size (mm) MA MB MC MH ML MD MP MT 12 16 20 25 32 40 50 63 80 100 28 29 34 40 52 60 68 84 114 140 16 19 30 30 38 38 50 50 50 65 14 14 22 22 27 27 36 36 46 46 22 22 30 30 37 37 47 47 58 62 9 9 12.5 12.5 16 16 20 20 28 28 M5 x 0.8 M5 x 0.8 M8 x 1.25 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M22 x 1.5 3 3 3

C85

3 !4 !5 !6 !

Air Fittings & Tubing

(mm) Thread R(PT) D1 D2 L1 P L2 L3 M Part No. 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 22 18.5 21.5 23.5 18.5 21.5 23.5 21 24 25 28.5 26.5 27.5 30.5 28.5 29.5 32.5 41 44 46 41 44 46 48 51 52 55.5 58 59 62 64.5 65.5 68.5 37 38 40 37 38 40 44 45 45.5 47.5 52 53 54 58.5 59 60 KQ2VD04-01S KQ2VD04-02S KQ2VD04-03S KQ2VD06-01S KQ2VD06-02S KQ2VD06-03S KQ2VD08-01S KQ2VD08-02S