ZR

1/2 EXH port 3 3 1.5 1 2.5 1.5 1 2.5 7.5 7.5 Pilot valve supply pressure port Common exhaust port 4.5 4.5 Rc 1/8 PV port Air supply pressure port 2-M5 PS port Common pilot supply port 2-Rc 1/8 PV port Common air supply pressure port Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 13-3-46 46 Series ZR Large Size Vacuum Module: Vacuum Pump System Circuit

C95

3 to !

CM2

3 !4 !5 !6 !7 !8 !

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Load voltage Auto switch model Lead wire length (m) Indicator light Electrical entry Wiring (Output) Pre-wired connector Applicable load DC Type Special function 0.5 (Nil) 1 (M) 3 (L) 5 (Z) AC M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed auto switch Solid state auto switch IC 5 V, 12 V

CNG

[Horizontal] W 3 port Normally open SOL.C SOL.B Regulator with relief function SOL.A 3 port Normally closed 2.

Cylinder with Lock Series CNG

112 1/8 65.5 26 16 26 11 7 12 8 47 301 to 800 301 to 800 (mm) Bore size (mm) 20 25 32 40 P K KA M MM NA PG PH PL S LC LD LS LH LT LX LZ X Y W XA XB 117 (125) 141 (149) 24 7 5 6 3 M8 x 1.25 1/8 21.5 2 65 4 6 25 3 50 62 15 10 3 12 127 (135) 151 (159) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 128 (136) 154 (162) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28

•

g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

MNB

3 !4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

MNB

] W SOL.C SOL.B SOL.A W SOL.C SOL.B SOL.A 9-6-3 4 Series MNB Specific Product Precautions 3 Be sure to read before handling.

PA300/500/700

31.5 VR 74 60 2 52 31 VH 9 119.5 (Piping port) Rc 3/8, 1/2 VHS 42 31 9 3(R) 1(P) 3.5 108.5 (Breathing port) M5 x 0.8 A B Body ported: VPA742V41 31.5 NC NO 2(A) 33 40 4.5 2-5.2 52 Switch mark (Mounting hole) (PA port) Rc 1/8 (Mounting groove for M6 thread) 2-R 3.2 2-5.2 Bracket (Mounting hole) PA 63.9 63 63 56.5 38.5 5.5 31.5 2 52 31 74 60 9 119.5 (Piping port) Rc 3/8, 1/2 42 31 9 3(R) 1(

7

: 12.5 Unit: mm +0.3 0 +0.4 0 +0.5 0 Symbol F IA IB N S W Hs Bore size 40 50 63 45.5 5 53 52 47 52 44 40 51 5.5 56 49 58 60 55 57 58.5 5.5 56 49 72 74 69 CKP140, 50, 63 Rod mounting type Cushion valve Top width across flats 3 (Tube cover side only) 3 x 1/4 (Rc, NPT, G) (Piping port) S + Stroke N 52 3 x 1/4 (Rc, NPT, G) (Piping port) 20 17 30 10 W 2 x Speed controller valve Top width across

Table of Contents

IFW520 125 VAC 10 to 20 25 1.5 or less 5 5 1.5 0.7 4 4 2.5 1.3 IFW550 250 VAC 20 to 50 60 3 or less 5 5 1 0.5 4 4 1.5 0.8 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the operation position (ON signal) to the return position (OFF signal). 8 VDC 7 5 3 3 5 4 3 3 5 5 3 3 4 4 3 3 14 VDC 30 VDC 5 5 3 3 4 4 3 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1 250 VDC

42

52 3-position Pressure center Metal seal VQ450 5 0 6.2 0.18 1.6 6.4 0.18 1.6 45 47 47 0.28 (0.34) Rubber seal VQ450 5 1 7.0 0.38 1.9 7.1 0.38 2.0 50 52 52 Double check Metal seal VQ460 5 0 2.7 3.7 55 57 57 0.50 (0.56) Rubber seal VQ460 5 1 2.8 3.9 62 64 64 Note 1) Value for valve on sub-plate and cylinder port 3/8 Note 2) Based on JIS B 8419: 2010.

SX

ground Type 3 ground Type 3 ground Type 3 ground b) 3-wire type Wiring with signal ground line (SG) Master unit Slave unit 01 Slave unit 03 Slave unit 75 Type 3 ground Type 3 ground Type 3 ground Type 3 ground Twisted pair with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground 1-6-113 114 Type SF1 NKE Corporation Uni-wire System Type SJ1, SJ2 SUNX Corporation S-LINK System Type

VM

Push button (Flush) VM220-02-33 VM230-02-33 JIS Symbol 2 port 3 port Panel mounting hole EXH port (3 port only) 0.5 MPa supply 4.9 mm P.T. 52 N F.O.F. 2-5.5 mounting hole 1.6 mm O.T. 6.5 mm T.T.

KJ

16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22 9.6 59 17 1 2 100 56 22.23 Reference dimensions after Uni thread installation. 15-4-34 5 Inch-size Uni One-touch Fittings Series

VS 8-2/VS 8-4

26 mm 3/5 3/5 95 2 2 2 2 2 2 14 12 41.2 65.4 (60) 4 4 4 4 4 4 39 17 13 1 1 24.5 33.5 64.5 27 (36.5) L2 24.5 33.5 2 x 1/2" 1(P) port 60.5 19 2n x 1/8" 4(A), 2(B) port (Size 18 mm) 2n x 1/4", 3/8" 4(A), 2(B) port (Size 26 mm) 1 2 3 4 Station number n D side U side 5 6 L1 8.5 8.5 (45) 56 52 19 27 Size 18 mm pitch ( ) Size 26 mm pitch ( ) 98 21 118 (Single) 152 (Double dual 3-port) 165 (3-position

F

OD ID L D Number of coil winding per tube length Model D I M E N S I O N S P O LY U R E T H A N E C O I L T U B I N G TCU0425B-1 210 18 1 52 1.5 TCU0425B-2 280 4 2.5 2 35 28 TCU0425B-3 265 3 22 1 TCU0604B-1 24 1 54 2 325 TCU0604B-2 2 27 1.5 6 4 37 TCU0604B-3 305 3 17 1 TCU0805B-1 8 5 330 31 1 41 2 Courtesy of Steven Engineering, Inc. !

REA/REB

3.5 3 3 3 4 Since this is a guideline including hysteresis, not meant to be guaranteed.