Compact Cylinder with Lock Series CLQ

YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no. Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no.

REA/REB

2 t r e w u y !4 !9 @7 !8 @2 !7 @6 #1 #0 @8 !0 @9 !1 #2 i !6 @3 @1 @5 @4 @0 REAS10 Parts list Parts list No. Description No.

CXS

N X (Hexagon socket head cap screw) F (Through) V (Opposite side: Same) (L) (Z) TT QQ (G) T Q U R UU (Piping port) (Opposite side: Same) (I) (L) (Z) N W C (mm) M N OO A B C D E G H I J K L NN P F Model 2-5.5 through 2-9.5 counterbore with depth 5.3 2-M4 x 0.7 with depth 6 64 25 62 23 11.5 50 28 6 12 12 30 10 M6 x 1.0 x 18.5 53 CXS20 2-M5 x 0.8 2-6.9 through 2-11 counterbore with depth 6.3

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBAIB63SCBA13, #2 CBAIB80SCBA14, #2 CBAIB100SCBA15, #2 f ZZ Bore (mm) e Stroke range (mm) h l 40 50 63 80 100 1/4 stroke 154 43 59 20 to 500 11.2 1/4 stroke 167 52 66 20 to 600 11.2 1/4 stroke 178 52 66 20 to 600 11.2 1/4 stroke 213 65 80 20 to 750 12.5 1/4 stroke 224 65 81 20 to 750 14 3.4-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore

Table of Contents

hole) 1.5 IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA IDF-TR500-2 Output sealing C A Output outlet Input fuse 5A Voltage selector B 220V INPUT 200V 230V 240V E D 4-5.5 x 10 long hole F Input cord 2 m Transformer part no.

VFS

3 8 1 2, 3 4 ( ): Rc 3/4 2 position double: VFS5210-E, VFS5210-D 3 position closed center: VFS5310-E, VFS5310-D 3 position exhaust center: VFS5410-E, VFS5410-D 3 position pressure center: VFS5510-E, VFS5510-D 3 position double check: VFS5610-E, VFS5610-D 2-7 mounting hole 101.5 (3 position: 109.5) 2-7 mounting hole G 1 2 Applicable cabtire cable O.D. 8 to 10 G 1 2 Pilot valve manual override

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

CP95

8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

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Technical Data 1503 CY1S Series Dimensions CY1S/Bilateral piping type (NA) T GA S + Stroke Z + Stroke (NA) T GA PA HG HC HB H 2 x Square nut groove E F HB 4 x MM Thread depth M 2 x JJ (Equal about center) d D d PB (Equal about center) HT 4 x LD QW QW PW GP W HT 2 x P (Piping port) 2 x UU (Bumper bolt) HP HA HG Q + Stroke L GB A G R GA GB A G GA 5.3 2 x For holding switch rail (6.9) 2 x 2

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

EXxx-OML0010CN

PLC (23 ) Enforce (21 ) (22 ) -20No.EX-OML0010CN-C a) (52) b) 28 c) /(16) d) e) f) 3 () (ON) (OFF) OFF ON Set Cancel Set Cancel -21No.EX-OML0010CN-C a) (52) b) 28 c) /(16) d) e) f) () g) / g)# Set Cancel Set() g)* Cancel() g) -22No.EX-OML0010CN-C (0 ) A,B Z, 0,19 "Wrong Password" -23No.EX-OML0010CN-C 2. Diagnosis Data() [2.DiangosisDate] 1.& & 2. 3. 1. (1718) 2. 25 3.

Stopper Cylinder

across flats K T 0 0.1 E W M D E 2 x N through 4 x O counterbore 2 x P (Rc, NPT, M thread) Stroke A + 2 stroke B + Stroke V H + Stroke Width across flats K T 0 0.1 Y M Q F D E A + 2 stroke B + Stroke V H + Stroke Width across flats K M T 0 0.1 D E 2 x P (Rc, NPT, G) A + 2 stroke B + Stroke V H + Stroke Width across flats K M Q F Z Stroke 2 x P (Rc, NPT, G) M E J Q F Z Stroke 32 40 50 RSQB

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(B) 2 (B) 2 (A) 4 (A) 4 Number of solenoids Plug Plug Single Double Locked position 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) LOCK PUSH (B) 2 (A) 4 (A) 4 (B) 2 Plug Plug 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) (JIS Symbols above: Series 10-SYJ5000) Caution When locking the manual override on the push-turn locking types (D, E), be sure to push it down before turning.

MHZ

, refer to page 12-2-51 to 12-2-52 for option specifications. 12-2-43 43 Series MHZJ2 Construction: MHZJ2-6 Double acting/With fingers open Single acting/Normally open !

MHZ

0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A Ball bushing bearing #5 @5 #0 @6 @8 !7 !3 #8 !2 @1 !

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Note 2) Refer to Best Pneumatics No. 2-1 for lead wire lengths.

Integrated Controller

Stroke A + Stroke (Table traveling distance)2 (52) 52 39.4 Auto switch groove (1 row per side) 10 (56)[54]4 54[(56)]4 Stroke Setup communication connector (M12) Parallel I/O connector (M12) Opposite end [Origin end]4 Origin end3 [Opposite end]4 58 (4)[2]4 2[(4)]4 38 Power supply connector (M12) 15 27.8 (48) 24 22 38.5 60 6.5 28.6 6 M4 x 0.7 thread depth 8 (F.G. terminal) D x 120 (= E) B +

3

Through-hole/Both ends tapped common (Basic) 10 0.1 0.2 Q 12 (Rod size) G M5 x 0.8 (2 locations) (Port size) Auto switch Minimum bending radius of lead wire 10 R 4 3 E Yh9 S T 3 F M8 x 1.25 Effective thread depth 11 6.8 (The dimension on the opposite side is the same.) 5.5 (2 locations) 13.6 7 10 7 10 M6 x 1 (2 locations) Flat washer With 2 pcs. 9 (2 locations) (The dimension on the opposite