Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

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2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch fitting for 6 C6 One-touch fitting

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

ZP

5AU-4-X83 [Weight: 1.6 g] 2 M-5AU-6-X83 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

Table of Contents

Description Material Flower fin tube assembly 42046 Aluminum Copper Carbon steel 42073 r 42054 42062 42036 Flower fin tube assembly 42012 Aluminum Copper, Carbon steel 42022 w Packing Packing Packing Packing Non-asbestos Non-asbestos 42013 42015 t 42013 42015 42032 42042 42045 42047 42042 42045 42047 42072 y u Packing 42047 42042 42045 V # 6401 V # 6401 V # 6401 42035 42037 42074 i y 14-

Base Mounted Metal Seal/Rubber Seal Series VQ

with lead wire M plug connector without connector (1.0 W) Note) Nil Standard type VQZ High pressure type Low wattage type (1.5 W) (0.5 W) H VQD Y Note) For power consumption of AC type, refer to page 2-4-218.

LEC-OM02704CN

W U V W M AWG 19(/) (B) 10m 10m 2m 13.4 2m MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H LE-CSM50m MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L CNP3 AWG19 AWG19 AWG19 AWG19 / AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) () () .

AC Servo Motor Driver (Network card type ）

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

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2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch fitting for 6 C6 One-touch fitting

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

LEC-OM07605CN

V DOCOM DOCOM RA RA (FR-BIF) (UVW)(UVW) U U U U V V M V M V W W W W U,V,WCN2 3 2 3. 3.1 (L1L2L3) ALM() () U,V,WCN2 SSCNET/HAA EM2EM1 AC200V240VL1L3LECSS-S LECSS-SLECSS2-T ON(MCCB) 3 3 3

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)]

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: L (Bottom Ported)

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)]

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

ZSE20C: ZSE20C, Rated Vaccum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)]

ZSE20C: ZSE20C, Rated Vaccum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported)

ZSE20C: ZSE20C, Rated Vaccum Range: -100 to 100 kPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: -, Lead Wire: -, Bracket: -