ZP

A6) M3 x 0.5 v (uConnection thread: A5/A6) Female thread Nil v (uConnection thread: A8) B5 M5 x 0.8 v v B6 M6 x 1 v v v B8 M8 x 1.25 v v B01 Rc1/8 v v v N01 NPT1/8 v v v T01 NPTF1/8 v v v M5 x 0.8 v (uConnection thread: A8) 04 4 vV vV 06 6 vV vV vV 08 8 V vV Female thread One-touch fitting N4 For 4 nylon tubing1 N6 For 6 nylon tubing1 v v v U4 For 4 soft tubing2 U6 For 6 soft tubing2

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ1000 VQZ2000 VQZ3000 Port size One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc(PT)1/8 Rc(PT)1/4 Mixture of port sizes Symbol C3 C4 C6 C8 C10 M5 01 02 CM v v v v v v Kit v v v C Connector v v v v (1) v v Note 1) When ordering port mixture and/or with port plug, suffix it in manifold specifications

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D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style .

Modular F.R.L. Unit

(The SI unit type is provided for use in Japan.) 01 02 03 04 06 10 1/8 V 1/4 V V V 3/8 V V 1/2 V 3/4 V V 1 V 17 Series AC Spacers and Brackets Accessories Spacer (X) D Center of F.R.L. body C 1 X-X B X RELEASE 2 Y200 Y400 X Applicable model A 6 3 4 5 5 B 27 35.5 47 57 61 C 15 18.5 26 31 33 D 33 48 59 65 70 Model Y100 Y200 Y300 Y400 Y500 Seal AC10, AC10A, AC10B AC20 AC25, AC30 AC40 AC40-

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Example: Analog output = 1 to 5 [V] F.S. = 5 [V] 1 [V] = 4 [V] 3 [% F.S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 0.12 [V].

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS3ll1FSGl-l02 1/4 V V V V V V V AS3ll1FSGl-l03 3/8 V V V V V V V AS-FP AS4ll1FSGl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSGl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSGl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSGl-G02 1/4 V V V V G Face seal AS3ll1FSGl-G03 3/8 V V V V AS-T AS4ll1FSGl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Modular Design with Uniform Body Style

Example) AW30K-03BE-2N-D-X406 0.4 MPa Setting Long Bowl Symbol Description V q V q Body size Body size 20 30 40 60 20 30 40 60 V w With backflow function Nil Without backflow function V V V V V V V V K1 With backflow function V V V V V V V V + V e Pipe thread type Nil Rc V V V V V V V V N NPT V V V V V V V V F G V V V V V V V V + 01 1/8 V V 02 1/4 V V V V V V 03 3/8 V V V V 04 1/2

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

ZP

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

ZP

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Kit Manifold C Connector 2 Body ported Stations 2 stations 02 20 stations 20 How to Order Valve C6 VQZ 1 2 1 1 5 M Port size {4(A), 2(B) port} VQZ2000 VQZ1000 Symbol Port size VQZ3000 Series v v v v v v v C3 C4 C6 C8 C10 M5 02 One-touch fitting for 3.2 v v v v VQZ1000 Body width 10mm VQZ2000 Body width 15mm VQZ3000 Body width 18mm 1 2 3 One-touch fitting for 4 One-touch fitting for

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

110 V [115 V] 200 V 220 V [230 V] (R1)5 1 (P) 3(R2) 1 (P) (R)3 AC Apparent power (VA) 2 position double 2 position double 2(B) (A)4 4(A) (B)2 Diode (DIN terminal, Varistor when non-polar types) LED (Neon light when AC with DIN terminal) Surge voltage suppressor Indicator light (R1)5 1 (P) 3(R2) (R)3 1 (P) Common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

Series SV

related components Total stroke time s Solenoid valve Tubing Speed controller Silencer 0.0 0.4 0.8 1.2 1.6 2.0 2.4 2.8 3.2 3.6 4.0 800 MB 63 10% 30% 50% 600 Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

] + 42.1 25.5 20 12 11.5 22 22 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): 10-SYJ7 43-L3 4 5 01 02 M plug connector (M): 10-SYJ7 43-M3 4 5 01 02 DIN Terminal (D): 10-SYJ7 43-D3 4 5 01 02 M8 connector (WO): 10-SYJ7 43-WO3 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8[146.2] Approx. 300 (Lead wire length) 91 57.5[64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) 44.5 68.6

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø4 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: Operation Manual, Calibration Certificate