MXQ

Dimensions are the same as standard type. 8-5-42 43 Air Slide Table Series MXQ External Dimensions of Adjuster Metal Stopper (CS/CT) Extension End (mm) Body mounting section Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model P D A B C F G M D E P *1) H J K Q 1) L MXQ-CS6(L) 5 15.5 MXQ6(L) M 6 19 7 7 M2.5 x 6 14.5 12.5 M2.5 x 8 8 2.5 7 8.3 M5

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com LW EB EA 2-P HC HP H HB HA HG HT NT Square nut for body mounting J 8 PP A N W Z + Stroke TW NL (mm) Model A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

), 2(OUT) port B B1 G G 2 x M thread depth N 2 x M thread depth N WN: M12 connector D K F C J E IN B1 B 2 x Port size 1(IN), 2(OUT) port A G 2 x M thread depth N Glossary of Terms [mm] Size Port size A B B1 C D E F G M N 20 1/8, 1/4 19 43 21 64.3 36 9.5 18 12.8 M4 6 30 1/4, 3/8 24 45 22.5 80.7 42 12 21 19 M5 8 Size Port size DIN terminal DIN terminal without connector M12 connector J K L

Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Air Slide Table Series MXS

Symbol Unit mm J J J mm Nm Nm Nm Nm Nm mm/s Definition Symbol Definition Symbol Unit mm/s kg kg kg kg Va W Wa We Wmax K An (n = 1 to 6) E Ea Emax Ln (n = 1 to 3) M (Mp, My, Mr) Ma (Map, May, Mar) Me (Mep, Mey) Mea (Meap, Meay) Mmax (Mpmax, Mymax, Mrmax) V Average speed Load mass Allowable load mass Mass equivalent to impact Max. allowable load mass Load factor Allowable load mass coefficient

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

Aluminum High Vacuum Angle Valve

flange surface Symbol S K L S L M K L M Pilot port direction Solid state auto switch D-M9P(M)(L)(Z) Left flange surface D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 1 Reed auto switch Right flange surface Without auto switch (with built-in magnet) 2 When the seal material is not being changed, there is no need to select a symbol.

24

less, V = 400 mm/s (10) Over 30 stroke, V = 400 mm/s 10 1 5 0.5 25 25 20 Load mass m [kg] Load mass m [kg] 20 16 1 0.1 16 12 12 0.01 10 50 100 200 0.1 10 50 100 200 Eccentric distance L [mm] Eccentric distance L [mm] MGPL32 to 100, MGPA32 to 100 (11) 50 stroke or less, V = 400 mm/s (12) Over 50 stroke, V = 400 mm/s 100 100 100 50 50 80 100 80 63 10 63 Load mass m [kg] Load mass m [kg] 50

MG

M5 x 0.8 Nil Slide bearing Ball bushing bearing M L NPT Rc N G TF Copper-free For bore size 16, M5 x 0.8 is only available.

A

E N S I O N S NAF30004000 B O D Y S I Z E A C C E S S O R I E S 1000 M5 2000 18 14 3000 14 38 4000 38 12 5000 341 6000 1 Without D W/Auto Drain B Bracket P O R T S I Z E M5 M5 01 18 02 14 03 38 04 12 06 34 10 1 P O R T T H R E A D Rc (PT)* Remove (N) when ordering N NPT F G(PF)* Remove (N) when ordering With Auto Drain C Model A B D E F G H J K L M P B Type NAF1000 25 66 7 25 26.5 86.5

CY1

A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

92 112 AD 24 26 31 37 46 M 2 2 2 3 4 AA 63 66 80 91 108 AC 3 3 3 4 5 K 9 9 10 11 12 54 57 70 79 93 0 -0.036 0 -0.036 0 -0.036 0 -0.043 0 -0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 MHSHJ3-32D MHSHJ3-40D MHSHJ3-50D MHSHJ3-63D MHSHJ3-80D 8h9 8h9 10h9 12h9 14h9 UA M5 x 0.8 M5 x 0.8 M6 x 1 SB 8 8 9.5 11 11 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5

MXS Series Air Slide Table

With end lock (12) MXS12R With buffer (12) MXS12F 2-M5 X 0.8 thread 8 deep Operating port 2-M5 X 0.8 J 10.5 9.5 38 14.5 16 37 3 29 30 0.5 Other dimensions not indicated are same as basic type.

MGP

or less V = 400mm/s 1 0 Over 30mm stroke V = 400mm/s 10 1 5 0.5 25 25 20 Load weight m (kg) 20 Load weight m (kg) 16 1 0.1 16 12 12 0.01 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 100 1 1 50mm stroke or less V = 400mm/s 1 2 Over 50mm stroke V = 400mm/s 100 100 100 50 50 80 100 80 63 10 63 Load weight m (kg) Load weight m (kg) 50 5 10 50 40