Refrigerated Thermo-chiller

[Outlet port: Max.] 0.9 50 40 0.8 0.4 0.7 40 30 0.6 0.3 30 0.5 20 0.4 0.2 20 0.3 [Return port] 10 0.2 0.1 10 [Return port] 0.1 0 0 0 0 0 10 20 30 40 0 10 20 30 40 Lifting height (m) Pressure (MPa) Lifting height (m) Pressure (MPa) Circulating fluid flow (l/min) Circulating fluid flow (l/min) The pump capacity of the HRZ010-W1S is same as that of the HRZ001-L1 group on page 85.

JXCx-OMU0004

300 30 300 12 300 2 40 400 30 400 15 400 50 400 40 400 15 400 3 50 500 40 500 20 500 60 500 50 500 20 500 4 60 600 50 600 25 600 80 600 60 600 25 600 5 80 700 60 700 30 700 100 700 80 700 30 700 6 100 800 80 800 40 800 200 800 100 800 40 800 7 200 900 100 900 50 900 300 900 200 900 50 900 8 300 1000 200 1000 75 1000 500 1000 300 1000 75 1000 9 400 1200 300 1200 100 1200 600 1200 400 1200

Programless controller Step motor (servo 24 VDC)

LEFS16A LEFS16B LEFS25H LEFS25A Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s] [mm/s2] [mm/s2] 0 10 200 5 200 20 200 12 200 1 20 300 10 300 30 300 20 300 2 30 400 15 400 40 400 30 400 3 40 500 20 500 50 500 40 500 4 50 600 25 600 60 600 50 600 5 60 700 30 700 80 700 60 700 6 80 800 40 800 100 800 80 800 7 100 900 50

1.1

Facility water required flow rate (l/min) Circulating fluid flow (l/min) 30 HRG010-A, HRG010-W HRG005-W 0.5 50 Outlet port [60 Hz] 0.4 40 Outlet port [50 Hz] 0.3 20 30 0.2 20 HRG002-W Return port HRG001-W 0.1 10 10 0 0.0 0 20 40 80 60 10 30 50 70 Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) HRG015-A, HRG015-W 0 0.5 50 0 10 20 30 40 Outlet port [60 Hz] 0.4 40 Facility water

Vacuum

(mm) 2, 4,6, 8, 10. 13, 16, 2 0 , 2 5 , 3 2 , 4 0 , 5 0 10, 13, 16,20 25,32, 40, 50 10,16,25,406,8, 10,13, 16,20 25,32, 40, 50 :otqq, NBR (black). Silicone (while). Urethane (brownl, Fluorine (black with markl NBR (50"), Sil'cone (40"), Urethane (60"), Fluoine (60") , : l . . : ] ] : l l How to Order Pad dia.

Vacuum

(mm) 2, 4,6, 8, 10. 13, 16, 2 0 , 2 5 , 3 2 , 4 0 , 5 0 10, 13, 16,20 25,32, 40, 50 10,16,25,406,8, 10,13, 16,20 25,32, 40, 50 :otqq, NBR (black). Silicone (while). Urethane (brownl, Fluorine (black with markl NBR (50"), Sil'cone (40"), Urethane (60"), Fluoine (60") , : l . . : ] ] : l l How to Order Pad dia.

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

0.55

16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-1l 3/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 3R NC 1P 1/8 12(PA) port 11.5 16 115.1 24 96.5

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch)

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A90V--Reed, DC Volt, AC Volt, Vertical, 0.5M

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: L (3m)

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9NWV--Solid State, 2-color Indication, 3 Wire NPN, Vertical