Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: [Other] CF, Flange Size Nominal: 40, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: No indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9NL
Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 40, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: With indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9NL
Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.12～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9NL
Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9NL
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M
Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40 Refer to page 38 for model selection. How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !
An analog voltage or current output is available. 25A-PFM5 is IP40 rated, CE and RoHS compliant. Compatible with the 25A-PFM3 monitor. Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100; Port sizes: 1/8 or 1/4 (Rc, NPT, G); ø6 or ø8 one-touch fittings; Rated pressure range (MPa): -0.07 to 0.75; Output options: 1-5V or 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.
An analog voltage or current output is available. 25A-PFM5 is IP40 rated, CE and RoHS compliant. Compatible with the 25A-PFM3 monitor. Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100; Port sizes: 1/8 or 1/4 (Rc, NPT, G); ø6 or ø8 one-touch fittings; Rated pressure range (MPa): -0.07 to 0.75; Output options: 1-5V or 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.
) : Not available Single rod Double rod Cushion Page Air Rubber Air Rubber 392 402 Symbol Specifications Applicable bore size 32 to 100 125 32 to 100 125 32 to 100 125 32 to 100 125 Standard Standard V V V V V V V V Long st Long stroke V V V V V V V V 32 to 125 D Built-in magnet V V V V V V V V MBl-lJ K With rod boot V V V V V V V V 25A Copper (Cu) and Zinc (Zn)-free Note 1) 32 to 100 V
0.0 0.0 0.5 Axis 2 CIR-L 40.00 100 0.0 0.0 0.5 2 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-R 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-R 0.00 100 0.0 0.0 0.5 3 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-3 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-3 -40.00 100 0.0 0.0 0.5 4 Axis 3 -20.00 100 0.0 0.0 0.5 Axis 4 -20.00 100 0.0 0.0 0.5
[ ] [%] [ ] 40 100 50 70 12 70 20 1.3 85 15 0.8 100 25 40 [%] [%] [ ] [%] [ ] 95 100 100 25 [%] [%] 40 [ ] [ ] 65 100 100 [%] LEY 32* 25 40 [%] [%] [ ] [%] [ ] 65 100 85 50 15 100 -43- 7.3 LEY / [Nm] L[mm] [mm] LEY 16 M50.8 3.0 10 14 LEY 25 M81.25 12.5 13 17 LEY 32 M81.25 12.5 13 22 / [Nm] L[mm] [mm] LEY 16 M81.25 12.5 12 14 LEY 25 M141.5 65.0 20.5
Example) When LEY16RA-75 is ordered, input LEY16RA-100. (b) For LEFSH (High precision type) Input LEFS to search. Example) When LEFSH25RH-300 isordered, input LEFS25RH-300 (c) When a Clean type (11-) or Secondary battery type (25A-) is ordered. Search without inputting 11or 25A-, and find the actuator to which 11or 25Ais applicable.