HRX-OM-Q026

Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" Monitoring start after the operation starts. timer Alarm monitoring starts when the set time has passed. Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Brown Brown White White Pink Pink Gray Gray Sky blue Sky blue Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

Air Cylinder

D-M9V D-M9MV D-M9AV D-A9V Hs Hs Auto switch Auto switch 17.5 17.5 A 20 (22) B A 22 B ( ): Dimension of the D-M9AV. A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch. A and B are the dimensions from the end of the head cover/rod cover to the end of the auto switch.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

ZZ + Stroke W I (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64 26 Up to 300 14 22 41 8 10 33.6 46.5 21 10.7 47.8 M14 X 1.5 21.5 42.5 M32 X 2 50 11 154 24 16 7 19 88 32 With rod boot h l Symbol f e 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

13 8 45 5.5 15 15 30 62 120 26 Up to 300 39.3 37.5 M10 X 1.25 34.5 19.5 17 32 12 7.5 6 8 27.6 M26 X 1.5 22 13 8 45 5.5 15 15 64 122 26 Up to 300 47.8 46.5 42.5 21 22 41 14 10.7 8 10 33.6 M14 X 1.5 21.5 M32 X 2 24 16 11 50 7 19 88 154 32 With rod boot h l Symbol e f 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400

C95Series

" SO, "63 a.5 25, 50, 75, 100,125, 150, 175, 200, 250.300, 350. 400. 450, 500 40 " !

0.4

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 32 35 39 43 16 18 32 35 39 43 6 8 10 12 6 8.5 10 20.5 22 20.5 22 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.

VFS

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

Electric Actuator Triple Axis P&P Unit

Mount the top cover. 22 Electric Actuator/Maintenance Guide 7 Be sure to read before handling.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

10

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 (Connection: 1/4) 500 700 10 (Connection: 3/8, 1/2) Flow rate Q [L/min (ANR

Electric Actuators

16 25 32 Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor (100/200/400 W) Ball screw drive Ball screw drive Belt drive Series LEFS Series

Guide Cylinder/Compact Type Series MGC

400, 450, 500, 600 CLJ2 350, 400, 450, 500, 600, 700, 800 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

CLS

200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100

Industrial Filters

(2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 1000 24 340 171 560 400 270 710 1570 1970 100 150 FGAC FGAS 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 760 22 500 24 330 131 620 450 270 720 1055 1455 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 760 22 750 24 380 173 620 450 270 720 1315 1715 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 760

CG5-S

+ Stroke (mm) Bore size (mm) Stroke range A AL B1 B C D GA GB H H1 I J K KA LD LH LS LT LX LZ M MM NA P S X Y ZZ 20 to 350 18 15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5