Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

AC Servo Motor Driver (CC-Link Type ）

PC ) . 6 -21 6.3.1 Parameter list . 6 -21 6.3.2 Detail list . 6 -22 6.3.3 S-pattern acceleration/deceleration . 6 -28 6.3.4 Alarm history clear . 6 -28 6.3.5 Rough match output . 6 -28 6.3.6 Software limit . 6 -29 6.4 I/O setting parameters (No.

Modular Design with Uniform Body Style

82.5 42.5 82.5 Optional specifications Bracket mount Panel mount Model M N Q R S T U V W Y Z AR20-D 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 AR40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40-06-D 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50-D 70 75 66 11 22 113 3.2 AR60-D 70 75 66 11 22 113 3.2 *1 The dimension of B is the length when the regulator

0.4

SOL.A 17 16 () (+) 21 25 24 Gray Red 23 Station 11 13 3 SOL.B () (+) 22 18 23 Black White 24 SOL.A 12 4 () (+) 23 26 Station 12 White None 25 19 22 SOL.B () (+) 24 11 5 21 20 White None 26 COM. 10 9 8 7 6 (+) () 25 COM. M27 female thread (+) () 26 Electrical characteristics Note) Positive COM spec. Negative COM spec.

Electric Actuator

Check SpeedVertical Work Load Graph on page 21.

CJ2

B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

AC Servo Motor Driver (CC-Link Type ）

When resuming operation after deactivating the alarm, make a home position return. 4 21 4.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 25.2 17.5 34.5 36 21 39.9

Table of Contents

output specifications 21 and 23.

ZX

analog Nil 21 22 23 24 P kPa Applicable to plug connector.

Sine Rodless Cylinder Series REA/REB

Note 2) 15 has internal magnets in the body. 946 Sine Rodless Cylinder Direct Mount Type Series REAR Construction: 20 to 40 8 9 4 5 7 6 3 1 25 23 21 22 11 12 13 18 14 20 30 26 15 19 10 24 2 27 28 29 17 16 Component Parts Component Parts No. Description Material Note No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-07SD AS321F-03-08SD 1/4" 13.2 27.8 39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41 18.5 43.3 31.8 21 10 18.5 81 79 19.8 52.6 AS321F-N03-11SD AS321F-03-12SD 3/8" 44.3 17.9 31.8 43.3 21 32.8 22 12 20.9 83 81 AS421F-N04-11SD AS421F-04-10SD 3/8" 17.9 33.6 47.9 21 47.9 33.6 21 10 18.5 141 141 24

Dual Speed Controller with One-touch Fitting Series ASD

17 18.5 21 22 17 18.5 21 22 21 22 17.5 20.6 22.9 28.2 25.2 28.2 31 25.2 28.2 32.6 34.4 25.2 28.2 32.6 34.4 32.6 34.4 29.4 32.5 38.5 44.8 43.5 46.5 49.3 48.3 51.3 54.1 55.9 48.3 51.3 54.1 55.9 64.3 66.1 9.3 11.6 11.6 15.2 12.8 15.2 18.5 12.8 15.2 18.5 20.9 12.8 15.2 18.5 20.9 18.5 20.9 M5 x 0.8 31 0.7 27.4 7.8 30.7 9.6 10 4.5 11.7 8 38.9 38.2 14 15.8 R 1/8 35.6 1.5 31.6 10.6 14.2 11.8 7 12

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15 25.3 32.4 16 25.2 34.4 10.4 15.2 4 5/16" 21 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 18.2 17 25.2 34.4 12.8 10.4 6 5/32" 16 18.5 35.4 40.4 17 34.4 29.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 18.2 24.9 34.2 34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2

Vacuum Module Series ZX

AEP 0X 21 ZSE3 HEP Related PV, V port size Wiring specifications Equipment Grommet (0.6 m) Nil M5 x 0.8 M6 x 1 (Option) Nil Without connector Connector (3 m) Connector (0.6 m) Grommet (3 m) Y C L CN CL Output specifications NPN open collector, double output Without analog output NPN open collector, double output With analog output 21 Note) Analog output is available only for grommet type.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)

Stainless Steel 316 Fittings

18 17 21 44.8 39.4 M M L2 8.5 21 19 17 21 48.1 41.7 L1 9.3 27 25 22 27 52.3 45.9 Union Elbow: KFG2L Applicable tube size (mm) O.D.

Mechanically Jointed Rodless Cylinder Series MY1

(mm) PB PG Q PP1 QW QQ RR2 SS TT UU W WW Model PP2 RR1 VV XX Z ZZ 50 7 206 12.7 46 15.5 17.9 15.5 16 84 11 MY1C25 4.1 12.7 18.9 16 38 220 Rc 1/16 21 16 102 13 MY1C32 60 8 264 15.5 60 16 24 4 18.5 22 19 48 280 Rc 1/16 25.5 9 26 21 118 20 MY1C40 23 54 Rc 1/8 340 80 9 322 17.5 20 72 26 29 Y 2 x d R WX S D Bottom ported (ZZ) (Applicable O-ring) DHole Size for Centralized Piping on the Bottom

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-11SD 6 17.9 31.8 43.3 21 3/8" 12.8 39.3 17 27.8 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8 47.4 R 3/8 1.2 19 20.9 AS321F-03-10SD AS321F-N03-09SD 10 18.5 43.3 NPT 3/8 19 23 9.8 20.9 53.7 1.2 47.4 21 31.8 5/16" 15.2 29.5 41 18.5 AS321F-03-12SD AS321F-N03-11SD 12 20.9 44.3 22 32.8 17.9 31.8 43.3 21 3/8" AS421F-04-10SD AS421F-N04-11SD 10 18.5 47.9 21

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

39.7 28.2 49.1 AS431F-04-10ST AS331F-N03-11ST 16.2 18.5 21 32.6 58 10 49.4 21 25.8 3/8" 17.9 23 16.2 43.7 32.6 53.5 12 55.8 28.6 63.8 1.5 24 R 1/2 AS431F-04-12ST AS431F-N04-11ST 20.9 22 36.3 61.7 12 52 16.2 3/8" 17.9 25.8 21 26.8 19.4 49.4 32.6 55.3 12 1/2" NPT 1/2 23.8 21.7 29 26.8 63.8 1.5 55.8 AS431F-N04-13ST Reference dimensions of M5 x 0.8, R threads after installation.