3 Port Solenoid Valve Metal Seal Series VZ200 1

300 2-M5 x 0.8 300 (Lead wire length) (Lead wire length) 92 84.3 Stations n: Stations Formula L1 = 19n + 12 L2 = 19n + 40 2 50 78 3 69 97 4 88 116 5 107 135 6 126 154 7 145 173 8 164 192 9 183 211 10 202 230 Symbol L1 L2 4-15-17 18 Series VZ200/400 Precaution 1 Be sure to read before handling.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

SZ3000

L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 298 287.5 265 16.5 310.5 300 275.5 17.5 310.5 300 286 12.5 260.5 250 233.5 13.5 273 262.5 244 14.5 285.5 275 254.5 15.5 210.5 200 181 15 223 212.5 191.5 16 235.5 225 202 17 248 237.5 212.5 18 248 237.5 223 12.5 173 162.5 149.5 12 185.5 175 160 13 198 187.5 170.5 14 123

Low Profile Guide Type

V CY1H 12 V Solid state auto switch Reed auto switch Yes IC circuit CY1F CY1F 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Grommet 24 V 12 V CYP IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V IC circuit 3-wire (NPN equivalent) A96V A96 5 V 12 V Yes 24 V Grommet Relay, PLC A93V2 A93 A90 100 V 2-wire A90V IC circuit No 100

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

X A 2 10 24 1 P 3 R Manual override 34 41 3.5 (Lead wire length) 38.5 300 Cover diameter 1.4 Cross sectional area 0.2mm2 SMC 35.5 A port PE 16 12 7.5 7.5 14.5 7 7.5 1/8 NPTF P,A,R port M5 x 0.8 PE port L type plug connector (L): VQZ115(R)L -01T M type plug connector (M): VQZ115(R)M -01T 51.5 300 (Lead wire length) 60.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2

CL

12 11 12 84 94 95 103 12 14 18 8 10 12 16 14 16.5 20 26 57.5 69 69 76 91 101 102 111 38 45 45 52 13 17 17 19 18 22 22 30 15.5 19.5 19.5 27 20 25 32 40 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 6 8 10 14 4 5 5.5 6 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 200 Up to 300 Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

= 4, 8, 12, 16) Note 2) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 20 95 100 105 110 D-Y7BA n (n = 2, 4, 6, 8) Note 1) 20 + 45 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 95 + 45 (n 4) 2 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16)

Series IDG

170 (6.00) 240 (8.48) 300 (10.59) IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 50 (1.77) 100 (3.53) 150 (5.30) IDG60SM IDG75SM IDG100SM V type A regulator combined with the M type 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3V IDG5V IDG10V IDG20V IDG30V IDG50V IDG60V IDG75V IDG100V 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M2 M3 m2 m3 m4 10 15 25 1 2 1 2 2 2 1.4 CY1F 1.5 3 1.5 5 5 5 2 14 20 14 12 12 12 12 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M2 M3 m2 m3 m4 10 15 25 1 2 1 2 2 2 1.4 CY1F 1.5 3 1.5 5 5 5 2 14 20 14 12 12 12 12 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

C85

12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4

17

V IC circuit 12 V 5 V, 12 V 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 5 V, 12 V IC circuit Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches

MXW

400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

15

V IC circuit 12 V 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 12 V 5 V,12 V 12 V IC circuit Water resistant (2-color indicator) 3-wire (NPN equivalent) Grommet 24 V Reed auto switch A96V A96 IC circuit 5 V Yes A93V2 A90V A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V No 100 V or less 1 Water resistant type auto switches can be mounted

Vacuum Unit

VDC to 24 VDC Black OUT + (Analog output) 1 k 12 VDC to 24 VDC rown DC(+) Brown DC(+) Brown DC(+) Black OUT + White LED (Green) Load 12 VDC to 24 VDC For release valve (, +) Load Main circuit Main circuit Load 12 VDC to 24 VDC Black Brown Black Brown + + OUT1 12 VDC to 24 VDC Load 12 VDC to 24 VDC Black OUT 1 Black OUT 1 Load + + 12 VDC to 24 VDC ack OUT + + + Load White OUT 2 White

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

125

0.26 12 0.29 12 0.28 13 0.28 0.6 0.7 VEX342-04 1/2 13 0.20 13 0.24 12 0.29 14 0.20 0.6 0.7 Base This is not a manual override.