Step Motor Driver （ Pulse input type ）

1 1 Acceleration / 1 1 1 Deceleration pattern S-motion ratio 0 0 0 Storoke (+) Storoke +1 Storoke +1 Storoke +1 Storoke (-) -1.00 -1.00 -1.00 Maximum speed 200 400 200 400 150 400 Maximum acceleration/ 5000 5000 5000 Basic parameter default deceleration Default In position 0.50 0.50 0.50 ORIG offset 0.00 0.00 0.00 Max force 70 70 70 Para protect 1 1 1 Enable SW 2 2 2 Unit name Part no. of

HRX-OM-W002

Heating capacity [W] 600 600 Heating capacity [W] 40 40 32 32 25 25 400 400 5 5 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-12 Heating capacity (HRR012-A/W-20,HRR018-A/W-20) 9.5.3 HRR024-A/W-20,HRR030-A/W-20 Ambient temp. 800 800 or Ambient temp.

5

01 03 50 12 Part no.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight kg Load weight kg 16 12 25 15 MY2C40 MY2HT40 Horizontal impact: P = 0.5 MPa 40 24 Horizontal impact: P = 0.5 MPa Stroke Adjusting Unit Holding Bolt Tightening Torque (Nm) 2000 1500 2000 1500 H unit H unit Impact speed mm/s Impact speed mm/s L unit 1000 1000 Bore size (mm) Tightening torque 16 0.6 L unit 500 400 300 500 400 300 25 1.5 Air cushion Air cushion 40 5.0 Calculation

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

C92

15 16 20,5 20,5 20 20 130 145 155 170 190 205 245 280 7 9 9 9 12 14 16 18 10 12 12 16 16 20 25 30 65 75 80 90 110 140 164 204 15 18 18 23 23 28 30 35 142 160 170 190 210 230 275 315 45 52 60 70 90 110 130 170 26 28 32 40 50 60 70 90 26 28 32 40 50 60 69,5 89,5 9 12 12 16 16 20 25 30 32 36 45 50 63 75 90 115 10 11 12 13 15 18 15 20 3,2 3,2 3,2 3,2 4,5 6 9 11 144 163 175 190 215 230 270 320

CM2

SCM220A, #12, #4 SCM220A, #12, #4, #19 CM2F25SCM225A, #12 SCM225A, #12, #4 SCM225A, #12, #4, #19 CM2F32SCM232A, #12 SCM232A, #12, #4 SCM232A, #12, #4, #19 CM2F40SCM240A, #12 SCM240A, #12, #4 SCM240A, #12, #4, #19 40 8 32.5 1.4-41 Standard: Single Acting Spring Return/Extend Series CM2 Rear Flange (G) CM2G Bore size Stroke S T CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 CS1 (mm) B P Bore D K N NA

Thermo-chiller/Rack Mount Type

400 32C 25C 25C 300 300 200 200 5C 5C 100 100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature

CG1

12 13 14 14 20 20 201 to 350 10 (12) 16.5 20 26 32 38 50 60 M5 Depth 7.5 19.5 301 to 400 10 (12) M5 Depth 8 35.5 44 55 69 80 19.5 27 32 32 37 37 301 to 450 10 (13) M6 Depth 12 301 to 800 12 (14) M8 Depth 16 301 to 1200 12 (14) M10Depth 16 301 to 1200 16 (20) M10 Depth 22 301 to 1400 16 (20) 110 100 M12 Depth 22 301 to 1500 Note 1) ( ): Long stroke Note 2) Trunnion mounting taps with width

Compact Cylinder Series NCQ8

IC circuit Solid state switch Reed switch 5 V A96V A96 Yes Grommet IC circuit Relay, PLC A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet

Valve Single Unit

12 stations Note) For SS5X3: 4 to 12 stations.

JXCx-OMT0023

9, 10, 12) 25 Proximity dog 10m max.

KN Series Nozzles for Blowing

Weight (g) KNK-10-400 KNK-10-600 KNK-12-400 KNK-12-600 KNK-16-400 KNK-16-600 KNK-20-400 KNK-20-600 44 44 44 44 64 64 77 77 17 17 17 17 17 17 17 17 41.7 41.7 41.2 41.2 41.8 41.8 43.8 43.8 17 17 19 19 24 24 27 27 17 17 17 17 17 17 17 17 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 35 D 8.5 H2 H1 L1 M Pivoting nozzle with male thread/KNK (mm) Model Nozzle size D Connection thread L1 A Width across

Air Slide Table/Long Stroke Type Series MXY

Long stroke Long stroke MXH MXY12Max. stroke 400 mm MXU Series variations MXS Stroke Adjuster options Function options 50 100 400 Bore size (mm) MXQ 300 200 350 250 150 Shock absorber Metal stopper Rubber stopper Piping concentrated on one side of the switch rail MXF 6 8 12 MXW MXJ MXP Auto switch mounting Three types of auto switches can be mounted.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

IZx-OMT0049

Note 11) If ON is selected for key lock setting, the setting is held even if the power is turned off and on again. 3)When error occurs CPU failure CPU failure Power supply failure (High voltage power supply Incorrect high voltage Communication error (controller) module) Error codeE1 Error codeE3 Error codeE4 Error codeE0 Error codeE2 Display Status Note 12) Note 12) Note 12) Note 12) Power

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

Hygienic Design Cylinder Series HY

Mass (g) CDH9 CXH14 L RR U CZh14 CDH9 HY-D032SUS HY-D040SUS HY-D050SUS HY-D063SUS 32 40 50 63 220 350 490 810 22 25 27 32 10 12 12 16 12 15 17 20 10 12 12 16 26 28 32 40 45 52 60 70 ZB + Stroke ZA + Stroke RR L U CZ CX ZC HYC Bore size HYQ / without auto switch Bracket part no.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z76 5 V IC circuit Yes Grommet Z73 12 V 100 V Relay PLC 24 V 2-wire No 5 V, 12 V Z80 100 V or less IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7PV Y7P 3-wire (PNP) Y69B 2-wire Y59B 12 V Relay PLC Grommet Yes 24 V Y7NWV 3-wire (NPN) Y7NW IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Y7PWV 3-wire (PNP) Y7PW Y7BWV Y7BW 2-wire 12 V Improved water resistance