Table of Contents

11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Table of Contents

VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main circuit (Analog output) 1 k Black OUT 12 to 24 VDC + 12 to 24 VDC + Load Blue LINE() Blue DC() Load Install the load either on the LINE (+) or LINE () side.

C85

12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4

SX

12 stations Note) For SS5X3: 4 to 12 stations.

Free Mount Cylinder

(mm) DQ HQ HP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 2.6 4.8 31 12 7 26 10 7 31 12 9 26 10 9 10 10 26 26 2.6 4.8 32 13 7 32 13 9 DQ HQ HP ZP ZC(D)UKD16 ZC(D)UKR16 12 12 31 31 15 12 33 18 16 37 28 20 44 DQ HQ HP 12 18 12 15 36 15 18 20 41 12 16 37 ZC(D)UKD20 ZC(D)UKR20 ZP 12 33 12.5 18.5 33.5 23 14 38 39.5 28 14 38 34 29 53 35 22 27 24 48 DQ HQ HP ZC(D)UKD25

MG

12 1 1 12 D12 -X 20Data 0.1 10 20 30 40 50 51 100 300 200 0.1 10 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) (15) l = 50 mm, V = 400 mm/s (16) l = 100 mm, V = 400 mm/s 50 50 100 100 100 100 80 80 80 80 63 63 50, 63 50, 63 50 50 10 10 40 40 40 40 5 5 Load weight m (kg) Load weight m (kg) 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 20 30 40 50 51 100 300 200

smcmaintenancepartslist

-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MH-G01 (contents quantity 30 g) Main parts No. e (1 pc.) !

MXQ

M8 x 1 MXQ-BS8(L) M3 x 12 20 7 24.5 14 12.5 40.8 5 12 1.4 16.6 8 12 14.6 MXQ12(L) M4 x 12 M8 x 1 MXQ-BS12(L) M4 x 12 18 9.5 29 14 11 40.8 6 12 1.4 20.5 11 13 18.5 MXQ16(L) M5 x 16 M10 x 1 MXQ-BS16(L) M5 x 16 22 11 36 17 13.5 46.7 7 14 1.4 23 13.5 16 21 MXQ20(L) M6 x 20 M14 x 1.5 MXQ-BS20(L) M6 x 18 35 13 46 22 17.5 67.3 11 19 12 27 17 22 25 MXQ25(L) M8 x 20 M14 x 1.5 MXQ-BS25(L) M8 x 18

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

00F 12 stations 00N Refer to page 3-3-7 regarding how to order applicable connector assemblies.

•

171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .

LEC-OM02704CN

12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15

LEC-OM02904

12.5 . 5 12 1 12 12 (AE3) LE-S6-LE-S7-LE-S812.1 1 ON/OFF CYC CYC LS LS 1 1 LS0 CYC0 LEC-MR-J3BAT MR-J3BAT 1pul se/rev 1pulse/rev 1 1 12 2 12 12.2.

MTS

Weight (g) Standard stroke (mm) 30 56 End lock additional weight 50 75 100 125 Model 150 20 48 175 15 44 200 10 40 5 36 25 MTS8 MTS12 MTS16 MTS20 MTS25 MTS32 MTS40 52 138 186 350 487 918 1,420 29 34 42 55 90 133 157 222 400 547 1,000 1,533 175 258 450 608 1,083 1,645 194 294 500 669 1,165 1,758 699 912 1,495 2,208 649 851 1,412 2,095 549 729 1,247 1,870 599 790 1,330 1,983 8-10-12 12

Vacuum Unit

VDC to 24 VDC Black OUT + (Analog output) 1 k 12 VDC to 24 VDC rown DC(+) Brown DC(+) Brown DC(+) Black OUT + White LED (Green) Load 12 VDC to 24 VDC For release valve (, +) Load Main circuit Main circuit Load 12 VDC to 24 VDC Black Brown Black Brown + + OUT1 12 VDC to 24 VDC Load 12 VDC to 24 VDC Black OUT 1 Black OUT 1 Load + + 12 VDC to 24 VDC ack OUT + + + Load White OUT 2 White

Vacuum System Peripherals:

) Diaphragm reed switch (100 VAC) 1 point setting M21 Note) Low wattage type is,12, 24 VDC.

HRX-OM-X084

(This product will continue operation.) (12) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

Compact Cylinder

(Refer to page 12 for contact protection box.)

PF2A/PF2W

CM01-8DP4S DDK Ltd. 16-11-15 12 Series PF2D Dimensions PF2A703H/706H/712H Internal circuit and wiring example to are terminal numbers.

Digital Flow Switches

White Load 50 OUT2 2 12 to 24VDC + Load (41.5) 3 Blue PF2W7T--67(-M) Connector pin numbers 4 3 77 34 2 1 Pin no.