11 11 11 11 16 16 18.5 8 11 11 13 16 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) J K KA MM N S W P H ZZ e f h ZZ l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63 80 100 125 140 160 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5
.5-64 5.8.7 Torque Reference Filter.5-71 6.
For MY1M50, 63 Work piece EY SMC EC a FH a 5 4.5 6 4 9 9.5 W 58 70 88 104 128 152 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 7 12 15 15 25 25 S 46.7 67.3 73.2 73.2 99 99 h 3.5 4.5 5.5 5.5 11 11 FW 66 82 95 FH 16 22 22 FC 14 17 22 22 30 35 FB 52 67 78 F 5 6 8 8 8 8 EY 50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 E 20 24
1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range 5 Usable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Bottom 1/2 SYJ S kit 12 stations SZ n: Stations VF Flow Rate Characteristics at the Number of Manifold Stations (Operated individually) VP4 Model Passage/Stations Station 1 Station 5 Station 10 C [dm3/(sbar)] 11 11 11 VQ 1/2 1 4/2 (P A/B) b 0.24 0.24 0.24 2-position metal seal VQ51 2 00 Cv 2.7 2.7 2.7 VQ 4/5 VQ 4/5 C [dm3/(sbar)] 12 12 12 b 0.14 0.14 0.14 4/2 5/3 (A/B EA/EB) VQC 1/2 Cv
Depth 7 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 13 17 17 19 27 27 32 41 24 29 8 10 12 16 20 20 25 30 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 69 (77) 69 (77) 71 (79) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 14 12 14 18 25 30 32 40 50 26 31 38 47 58 72 89 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 2 2 2 2 2 2 3 3 12 12
5 u !0 #4 #3 $7 #7 @4 q i @8 $6 @7 $2 @0 $8 #8 $5 $0 #0 #1 @6 @2 $4 #9 @9 $6 @1 $2 @5 !3 $3 !9 $1 #5 #2 !2 #6 A @3 A Section A-A !7 !8 t !7 Enlarged drawing of shim part !6 y !
V 6 +5V 6 4 Shield ground 9 SIELD SQ Optical fiber (Reserve) 12 RTS Pin no. 3, 5, 7, 8, 10 and 11 marked with are open.
Hs A 29 B (mm) D-C73 A D-H7A1/H7B B Hs A B Bore size Hs 7 6 22.5 6 5 22.5 7 6 25 6 5 25 8 7 28.5 7 6 28.5 14 12 32.5 13 11 32.5 20 25 32 40 Note) The above values should be used as a guide for detection at stroke end.
) 3 11 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN Terminal (D): 10-SYJ5 23-D-M5 3 4 5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 54.1[56.3] 44.3
5 Power consumption [W] Note 11) 24 VDC o10% Rated voltage [V] Note 1) Horizontal: The maximum value of the work load.
10 13 11.4 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 17 25 73 32.5 2 20 5 3.5 39.5 5 93 11 20 15 14 AU dimension is not the dimension at the time of shipment, since its dimension is for adjustment parts.
With External Pilot Specifications (Pitch) 23.5 21.3 P = 20.5 18 11 SV 13.5 11.6 36.1 83.8 5 37.6 SZ 60.3 3 5 E 3 5 E 4 A E 3 5 3 5 4 A E 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 76.8 SY 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 1 P 1 P X PE X PE SYJ One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 6, 1/4" 8, 5/
Weight (g) (1) D L A M 7 32 32 24 19 17 14 4 9 8 9 7 2 KQ2R01-03 KQ2R01-05 KQ2R01-07 KQ2R03-05 KQ2R03-07 KQ2R05-07 KQ2R05-09 KQ2R07-09 KQ2R07-11 KQ2R09-11 KQ2R09-13 KQ2R11-13 9.6 34.5 18.5 17.5 17 5 32 3 16 1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 15.5 2.5 1 8 34 9.2 34 34.5 34.5 36.5 37 40 40 41 44 10 5 32 17.5 16 3 10.4 11.4 10.7 18.5 18 18.5 19.5 3 16 16.5 3.5 1 4 13.2 17 4.6 14 5 16
side PLC side LEC CK4 (16) Cable length(L)[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.
6 4 54 54 5 4 6.5 54 4 5 3 3 3 5 5 33 33 33 (mm) NB 5h9 6h9 6h9 NA 8 10 12 K 4 5 6 J 10 12 14 G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 5 6 7 EO 7 8 10 DC 15 18 21 DO 17 20 24 B 30 36 42 R 25 29 34 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 Q 6 7 8 Model MHS3-16D MHS3-20D MHS3-25D 0 -0.030 0 -0.030 0 -0.030 4 5 5 VA 2H9 2H9 3H9 UB 4.5 6 6 UA M3 x
14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120 86 106 125 150 70.5 82.5 101 121 Other dimensions are the same as basic style.
38.5 42 42 44 44 16 17 16.5 17 17 18.5 21 21 22 22 3 5 4 4 5 6 11 11 16 17 15.5 2.5 1 8 Applicable tubing Applicable tubing 1 4 3 16 16 3 5 32 1 4 1 4 5 16 3 8 3 8 1 2 1 2 3 16 16.5 3.5 1 4 17 4.6 18.5 6 5 16 3 8 21 7 Note) D: Max. diameter Male Elbow: KQ2L Connection thread UNF NPT 10-32 UNF Applicable tubing O.D.