5 Port Solenoid Valve Series SY3000/5000/7000/9000

11 20.5 (P, EA, EB port) 1/8 With plug (12.5) 41 (36.8) 41 L plug connector (L): SY3140(R)-L-01 M plug connector (M): SY3140(R)-M-01 M8 connector (WO): SY3140(R)-WO-01 Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 76.8 [79] 62 67 [69.2] 68.5 75.9 20.5 2 11 11 20.5 2 11 2 11 11 11 20.5 7.5 16.5 24.5 7.5 16.5 7.5 16.5 24.5 24.5 50

Electric Actuator Miniature Rod Type Miniature Slide table Type

Bearing 12 Bushing Oil impregnated sintered copper alloy 13 Soft wiper 14 Step motor (Servo / 24VDC) 11 - 3.

LEC-OM02904

11.1.1 113 11.1.2 116 11.1.3 118 11.1.4 11-10 11.1.5 SSCNET 11-12 11.2 11-14 TM 11-17 11.3 MR Configurator2 11.4 LEC-MR-J3BAT 11-19 3 - 11.5 11-20 11.6 () 11-24 11.7 11-25 11.8 11-31 11.9 EMC() 11-34 12 121 125 12.1 122 12.2 123 12.3 124 12.3.1 124 12.4 124 12.5 125 13 131 136 13.1 132 13.1.1 132 13.1.2 134 13.2 . 135 13.3 . 135 13.4 . 135 13.5

LEJ-OM002xx

The use of screws that are too long can touch the body and cause malfunction. 11. Do not operate by fixing the table and moving the actuator body. 12. The belt drive actuator cannot be used for vertically mounted applications. 13. Vibration may occur during operation, this could be caused by the operating conditions.

E-MY2_E_D

0.49 to 4.90 m/s2 0.98 to 9.80 m/s2 1.96 to 19.6 m/s2 Nominal size:16 5kg 1.25kg 10kg 2.5kg Maximum load weight NOTE2) Nominal size:25 20kg 5kg 10kg 2.5kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position Both ends 0.01mm Repeated Positioning stopping precision Intermediate

NCG/CG1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 114 119 121 139 162 162 196 196 11 11 11 12 13 13 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 12 12 12 13 14 14 20 20 Up to 350 Up to

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

AC Servo Motor Driver

] X, Y: 49 m/s2 series Note.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Multi-Axis Step Motor Controller

(Refer to page 12.) 11 Multi-Axis Step Motor Controller JXC73/83/92/93 Series Wiring Example 1 For 4 Axes 1 pc.

NCQ8

3280 ft/s2 Insulation resistance 50 M or more at 500 VDC (between lead wire and case) 1000 VAC for 1 min.

Programless Controller Series LECP1

MNPN MPNP CN4 24 VDC for I/O signal 24 VDC for I/O signal CN4 1 Step Motor (Servo/24 VDC) Specific Product 1 COM+ COM+ 2 2 COM COM 3 3 IN0 IN0 4 4 IN1 IN1 5 5 IN2 IN2 6 6 IN3 IN3 7 7 RESET RESET 8 8 STOP STOP Load Load 9 9 OUT0 OUT0 10 10 OUT1 OUT1 11 11 OUT2 OUT2 12 12 OUT3 OUT3 13 13 BUSY BUSY 14 14 ALARM ALARM Input Signal Output Signal Name Contents Name Contents COM+ Turns on when the

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[90.4] 300 (Lead wire length) 107 79.8 VS 45.4 45.4 11 VS7 11 A B A B 5 5 2-2.6 (Mounting holes for manifold) 10 10 (Lead wire length) 19 19 2-2.6 (Mounting holes for manifold) 300 26.6 26.6 40.6[47.1] 29.5[36] 23 23 17.1 10.5 10.5 10 2-2.6 (Mounting holes) 3 3 11 2-2.6 (Mounting holes) 10 11 15 77.4 15 77.4 [ ] for AC Other dimentions are the same as the grommet style

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

connector (M): 10-SYJ5223-M-M5 DIN terminal (D, Y): 10-SYJ5223-M5 M8 connector (WO): 10-SYJ5223-WO-M5 D Y Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107 [111.4] 3 87.4 [91.8] 3 3 3 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2 x 2.6 (For mounting) 2 x 2.6

SYJ3000/5000/7000

length) Pg7 20 20 20 20 107 [111.4] 3 3 3 3 87.4 [91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 23 23 23 27 2-2.6 (For mounting) Refer to page 1-5-79 for dimentions with connector cable. 1-5-32 33 5 Port Solenoid Valve Rubber Seal Series SYJ5000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 3 4 5

LEJ-OM004xx

LEJ-OM00401 PRODUCT NAME Electric Actuator / Slider Type AC Servo Motor For Clean Room Ball Screw type MODEL / Series 11-LEJ Series The description of this manual is only a peculiar content to "11-LEJS For Clean Room". Please match and confirm the manual of each model to a detailed content of the product.

Secondary Batteries

Indicator light Electrical entry Lead wire Grommet Oilproof flexible heavy-duty vinyl cord, 2.7 x 3.2, ellipse Switch, 1,000 m/s2 Impact resistance Connector, 300 m/s2 JIS C 4524, JIS C 4525 IEC 947-5-2, NECA 0402 In compliance with IP 67 when coupled 50 M or more (500 VDC Mega) between lead wire and case 1,000 VAC for 1 min.

20

After improvement Before improvement Conventional coil tube model Filter regulator Conventional coupler model S coupler 1 2 1 2 Coil tube L L VMG Air gun Nozzle 2.5 Nozzle 3 S2 S0 to S1 S2 S0 to S1 Effective area ratio 3.04 : 1 Effective area ratio 0.69 : 1 Before improvement After improvement Coupler S coupler Conventional model Piping Equipment TCU1065-1-20-X6 Conventional coil tube model

ZL3-OM00601

m/s2) *3 100 *1: Values are based on standard of SMC measurements.