ML1

, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Thermo-con

Check that the internal tank has no leakage if using an external tank. 11. If there is a point where fluid is released to atmosphere externally (tank or piping), minimize the piping resistance at the circulating fluid return side.

MB1

(Refer to Rod boot/Air cushion on page 11.)

Guide Cylinder/Compact Type Series MGC

For 32 or larger bore sizes, Rc, NPT and G ports can be selected. 403 Series MGC Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height D-A9 D-M9/M9W Hs B A 11 16.5 8.5 Auto switch D-A9 D-M9/M9W D-C7/C8/H7 Hs B A 11.5 16 8.5 Auto switch D-C7/C8 D-H7 D-B5/B6/G5/K5 Hs B A 14.5 24.5 12 8.5 Auto switch D-B5/B6 D-G5/K5 D-B7/B8/G7/K7 14.5 Hs B A 11 8.5 Auto switch

Thermo-chiller

No anchor bolt is included. *10 Weight when the circulating fluid is not included. *11 The capacity is 60 Hz even in the 50 Hz area when option C is selected. *12 The capacity is 60 Hz even in the 50 Hz area when option P is selected. *13 The weight will increase by 4 kg when option C and P is selected. 11 A Thermo-chiller Compact Dual/Basic Type for Lasers HRLE Series Scheduled to acquire

Cylinder with Lock Series CLS

0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 125 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Gragh 7 Gragh 4 0.5MPaP 0.5MPaP 3000 3000 2000 2000 160 140 125 1000 1000 700 800 900 700 800 900 Load weight:

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Mechanically Jointed Rodless Cylinder Series MY2

Refer to front matters 54 and 55 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Operating Environment Warning 1.

Process Valve Series VNA

(mm) Symbol 3 2 1 Port size Rc 100 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note 2) Note) Note 2) 4 5 6 7 9 Other A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 24 VDC 12 VDC 7 Note 2) Valve size 1 to 4 Note 2) 240 VAC 50/60 Hz 11 15 11 10A 3 8 Note 2) B:

Pin Clamp Cylinders

Note) The tightening torque for the hexagon socket head cap screw (M2.5 x 11 L) is 0.2 to 0.3 Nm. The tightening torque for the hexagon socket head cap screw (M3 x 4 L) is 0.5 to 0.7 Nm. qRemove the set screw attached to the auto switch.

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

11 13 13 8.5 9.5 9.5 11 14 5 8.5 9 10 10 6 6 6.5 8.5 11.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Motor shaft should be round shape. *10 Please avoid loosen the screws for mounting of motor. *11 Do not allow collisions at either end of the table traveling distance. Additionally, when running the positioning operation, do not set within 7 mm of both ends.

DOC1023126

400 6 to 200 Stroke Speed [mm/s] 350 to 400 30 to 900 18 to 600 9 to 300 5 to 150 30 to 900 24 to 640 12 to 320 6 to 160 range 400 to 500 30 to 900 24 to 640 12 to 320 6 to 160 Actuator specification Max acceleration /deceleration [mm/s2] Horizontal 10 Vertical 5000 Pushing speed [mm/s2] Note5) 35 30 Positioning repeatability [mm] 0.05 Lost motion [mm] Note6) 0.1 or less Lead [mm] 20 12

Thermo-chiller

Displays the unit of displayed pressure (default setting: MPa). 11 Changing pressure unit Pressure unit can be changed. MPa PSI r [REMOTE] lamp Enables remote operation (start and stop) by communication.

AC Servo Motor Driver (CC-Link Type)

Requires set up software(MR Configurator2TM) . -11- 3. Wiring 3.1 Power Supply Wiring Connect the actuator and driver power supply. (1) LECSC (Absolute encoder) EX.)

AC Servo Motor Driver (CC-Link Type)

Requires set up software(MR Configurator2TM) . -11- 3. Wiring 3.1 Power Supply Wiring Connect the actuator and driver power supply. (1) LECSC2-T (Absolute encoder) EX.)

2-Color Display Digital Flow Switch Series PFM

1 w 5 Body PBT 6 Sensor housing LCP PFM 7 Sensor chip Silicon 8 Orifice Brass Electroless nickel plated PFMV 9 Seal FKM Fluoro coated Stainless steel 304 PF2A 10 Mesh 11 Bottom piping adapter PBT PF2W 12 O-ring HNBR Fluoro coated !5 !2 Flow adjustment valve assembly 13 PBT PF2D !4 !3 !

Membrane Air Dryer

(For the part number of the dew point indicator, refer to pages 10 and 11.) 3.